A laterally diffused metal oxide silicon (LDMOS) transistor and a method of making the LDMOS transistor are disclosed. The LDMOS transistor includes a drain drift region formed in a substrate and containing a drain contact region. A gate structure overlies a channel region in the substrate and a first shallow-trench isolation (STI) structure located between the drain contact region and the channel region. The first STI structure contains a high-k dielectric and a second STI structure contains silicon oxide.

An electrically erasable programmable nonvolatile memory cell includes a semiconductor substrate having a first substrate region and a trench region apart from the first substrate region in a lateral direction, a channel region between the first substrate region and the bottom portion of the trench region, an electrically conductive control gate insulated from and disposed over the first channel portion, an electrically conductive floating gate insulated from the bottom and sidewall portions of the trench region, an insulation region disposed over the second channel portion between the control gate and the second floating gate portion, an electrically conductive source line insulated from the floating gate and electrically connected to the trench region of the substrate, and an electrically conductive erase gate insulated from and disposed over a tip of the floating gate.

A semiconductor device includes an erase gate electrode, an erase gate dielectric, first and second floating gate electrodes, first and second control gate electrodes, a first select gate electrode, a second select gate electrode, a common source strap, and a silicide pad. The erase gate electrode is over a first portion of a substrate. The common source strap is over a second portion of the substrate, in which the common source strap and the erase gate electrode are arranged along a second direction perpendicular to the first direction. The silicide pad is under the common source strap and in the second portion of the substrate, wherein a top surface of the silicide pad is flatter than a bottom surface of the erase gate dielectric.

Certain aspects of the present disclosure generally relate to electrically erasable programmable read-only memory (EEPROM) device comprising at least one EEPROM cell structure. The EEPROM device generally includes a first active region, a second active region, a channel region disposed between the first active region and the second active region, a floating gate structure disposed above the channel region and separated from the channel region by a first dielectric layer, a control gate structure disposed above the floating gate structure and separated from the floating gate structure by a second dielectric layer, and a bottom gate structure disposed below the channel region.

A method for manufacturing an integrated circuit is provided. The method includes depositing a floating gate electrode film over a semiconductor substrate; patterning the floating gate electrode film into at least one floating gate electrode having at least one opening therein; depositing a control gate electrode film over the semiconductor substrate to overfill the at least one opening of the floating gate electrode; and patterning the control gate electrode film into at least one control gate electrode over the floating gate electrode.

The present disclosure relates to a flash memory structure. The flash memory structure includes a first doped region and a second doped region disposed within a substrate. A select gate is disposed over the substrate between the first doped region and the second doped region. A floating gate is disposed over the substrate between the select gate and the first doped region, and a control gate is over the floating gate. The floating gate extends along multiple surfaces of the substrate.

A semiconductor device includes a semiconductor part; first and second electrodes respectively on back and front surfaces of the semiconductor part; and a control electrode between the semiconductor part and the second electrode. The control electrode is provided inside a trench of the semiconductor part. The control electrode is electrically insulated from the semiconductor part by a first insulating film and electrically insulated from the second electrode by a second insulating film. The control electrode includes an insulator at a position apart from the first insulating film and the second insulating film. The semiconductor part includes a first layer of a first conductivity type provided between the first and second electrodes, the second layer of a second conductivity type provided between the first layer and the second electrode and the third layer of the first conductivity type selectively provided between the second layer and the second electrode.

A semiconductor device constituting a non-volatile memory includes a semiconductor portion of a first conductivity type, a first well of a second conductivity type, a second well of the second conductivity type, an insulating film, and a conductive layer. The first well includes a trench extending from the surface of the semiconductor portion to an inside of the first well. The insulating film extends on a surface inside the trench. A conductive portion formed continuous with the conductive layer is disposed on the insulating film inside the trench.

A non-volatile memory device includes a vertical state transistor disposed in a semiconductor substrate, where the vertical state transistor is configured to trap charges in a dielectric interface between a semiconductor well and a control gate. A vertical selection transistor is disposed in the semiconductor substrate. The vertical selection transistor is disposed under the state transistor, and configured to select the state transistor.

A method includes forming a semiconductor layer on a semiconductor substrate. The semiconductor layer is patterned to form a semiconductive structure. Each of widths of two ends of the semiconductive structure is wider than a width of a middle of the semiconductive structure. The semiconductive structure is doped to form a doped semiconductor structure. An isolation structure is formed to surround the doped semiconductor structure. A recessing process is performed such that two trenches are formed on the doped semiconductor structure, and first, second and third portions of an active region are formed on the semiconductor substrate. A first gate structure and a second gate structure are formed in the trenches such that the first portion and the third portion are partially spaced apart by the first gate structure, and the second portion and the third portion are partially spaced apart by the second gate structure.