A semiconductor device and method of fabricating the same are disclosed. The method includes depositing a polysilicon gate layer over a gate dielectric formed over a surface of a substrate in a peripheral region, forming a dielectric layer over the polysilicon gate layer and depositing a height-enhancing (HE) film over the dielectric layer. The HE film, the dielectric layer, the polysilicon gate layer and the gate dielectric are then patterned for a high-voltage Field Effect Transistor (HVFET) gate to be formed in the peripheral region. A high energy implant is performed to form at least one lightly doped region in a source or drain region in the substrate adjacent to the HVFET gate. The HE film is then removed, and a low voltage (LV) logic FET formed on the substrate in the peripheral region. In one embodiment, the LV logic FET is a high-k metal-gate logic FET.

Disclosed is a three-dimensional flash memory including a back gate, which includes word lines extended and formed in a horizontal direction on a substrate so as to be sequentially stacked, and strings penetrating the word lines and extended and formed in one direction on the substrate. Each of the strings includes a channel layer extended and formed in the one direction, and a charge storage layer extended and formed in the one direction to surround the channel layer, the channel layer and the charge storage layer constitute memory cells corresponding to the word lines, and the channel layer includes a back gate extended and formed in the one direction, with at least a portion of the back gate surrounded by the channel layer, and an insulating layer extended and formed in one direction between the back gate and the channel layer.

A first doped region extends from a top surface of a substrate to a first depth. An implant into the first doped region forms a second doped region of a second conductivity type. The second doped region extends from the top surface to a second depth that is less than the first depth. A split gate NVM structure has select and control gates over the second doped region. A drain region of the second conductivity type is formed adjacent to the select gate. A source region of the second conductivity type is formed adjacent to the control gate. Angled implants into the second doped region form a third doped region of the first conductivity type under a portion of the select gate and a fourth doped region of the first conductivity type under a portion of the control gate. The drain and source regions adjoin the third and fourth regions.

A charge trapping nonvolatile memory device includes a source region and a drain region disposed in an upper portion of a substrate and spaced apart from each other by a first trapping region, a channel region, and a second trapping region. A gate stack structure is disposed over the channel region. A first stack including a tunnel insulation layer, a first charge trap layer, and a first blocking insulation layer are disposed over the first trapping region. A second stack including a tunnel insulation layer, a second charge trap layer, and a second blocking insulation layer are disposed over the second trapping region. An interlayer insulation layer is disposed over the substrate and covers the gate stack structure. A first contact plug and a second contact plug penetrate the interlayer insulation layer and respectively contact the source region and the drain region. A third contact plug penetrates the interlayer insulation layer, contacts the gate stack structure, and overlaps with the first and the second charge trap layers.

A three-dimensional (3D) semiconductor memory device includes a source conductive pattern on a substrate and extending in parallel to a top surface of the substrate, and an electrode structure including an erase control gate electrode, a ground selection gate electrode, cell gate electrodes, and a string selection gate electrode, which are sequentially stacked on the source conductive pattern in a first direction perpendicular to the top surface of the substrate.

A three-dimensional semiconductor memory device is disclosed. The device may include a first source conductive pattern comprising a polycrystalline material including first crystal grains on a substrate, the substrate may comprising a polycrystalline material including second crystal grains, a grain size of the first crystal grains being smaller than a grain size of the second crystal grains, a stack including a plurality of gate electrodes, the plurality of gates stacked on the first source conductive pattern, and a vertical channel portion penetrating the stack and the first source conductive pattern, and the vertical channel portion being in contact with a side surface of the first source conductive pattern.

A memory device that includes a pair of non-volatile memory cells, a first memory cell including a first memory gate and a first select gate, and a second memory cell including a second memory gate and a second select gate. The first and second memory cells share a source line, and the first and second memory gates are not connected to one another.

Resistance of a FINFET is reduced while performance of an element is prevented from being deteriorated due to an increase in stress, thereby performance of a semiconductor device is improved. When a memory cell formed on an upper side of a first fin and an n transistor formed on an upper side of a second fin are mounted on the same semiconductor substrate, the surface of the first fin having a source/drain region of the memory cell is covered with a silicide layer, and part of a source/drain region of the n transistor is formed of an epitaxial layer covering the surface of the second fin.

To improve reliability of a semiconductor device, a control transistor and a memory transistor formed in a memory cell region are configured to have a double-gate structure, and a transistor formed in a peripheral circuit region is configured to have a triple-gate structure. For example, in the memory transistor, a gate insulating film formed by an ONO film is provided between a memory gate electrode and sidewalls of a fin, and an insulating film (a stacked film of a multilayer film of an insulating film/an oxide film and the ONO film) thicker than the ONO film is provided between the memory gate electrode and a top surface of the fin. This configuration can reduce concentration of an electric field onto a tip of the fin, so that deterioration of reliability of the ONO film can be prevented.

An improvement is achieved in the performance of a semiconductor device having a nonvolatile memory. A first memory cell includes a first control gate electrode and a first memory gate electrode which are formed over a semiconductor substrate to be adjacent to each other. A second memory cell includes a second control gate electrode and a second memory gate electrode which are formed over the semiconductor substrate to be adjacent to each other. A width of a sidewall spacer formed on a side of the second memory gate electrode opposite to a side thereof where the second memory gate electrode is adjacent to the second control gate electrode is smaller than a width of another sidewall spacer formed on a side of the first memory gate electrode opposite to a side thereof where the first memory gate electrode is adjacent to the first control gate electrode. A threshold voltage of a first memory transistor including the first memory gate electrode in a neutral state is different a threshold voltage of a second memory transistor including the second memory gate electrode in the neutral state.