Patent classifications
H
H01
H01L
2224/00
H01L2224/74
H01L2224/75
H01L2224/7525
H01L2224/753
H01L2224/75301
H01L2224/75314
H01L2224/75315
H01L2224/75316
H01L2224/75316
PRESS FITTING HEAD AND SEMICONDUCTOR MANUFACTURING APPARATUS USING THE SAME
A press fitting head comprising an elastic member in a part where the press fitting head contacts a semiconductor device, and an alignment mark recognition area capable of detecting an optically readable marker provided on a surface to be contacted to the semiconductor device is provided. Additionally, a semiconductor manufacturing apparatus in which the press fitting head is applied is provided.