Patent classifications
H01L2027/11831
Semiconductor Circuit with Metal Structure and Manufacturing Method
The semiconductor structure includes a semiconductor substrate having active regions; field-effect devices disposed on the semiconductor substrate, the field-effect devices including gate stacks with elongated shape oriented in a first direction; a first metal layer disposed over the gate stacks, the first metal layer including first metal lines oriented in a second direction being orthogonal to the first direction; a second metal layer disposed over the first metal layer, the second metal layer including second metal lines oriented in the first direction; and a third metal layer disposed over the second metal layer, the third metal layer including third metal lines oriented in the second direction. The first, second, and third metal lines have a first thickness T.sub.1, a second thickness T.sub.2, and t a third thickness T.sub.3, respectively. The second thickness is greater than the first thickness and the third thickness.
IC INCLUDING STANDARD CELLS AND SRAM CELLS
An IC is provided. The IC includes a plurality of a plurality of P-type fin field-effect transistors (FinFETs). The P-type FinFETs includes at least one first P-type FinFET and at least one second P-type FinFET. Source/drain regions of the first P-type FinFET have a first depth, and source/drain regions of the second P-type FinFET have a second depth that is different from the first depth. A first semiconductor fin of the first P-type FinFET includes a first portion and a second portion that are formed by different materials, and the second portion of the first semiconductor fin has a third depth that is greater than the first depth.
Well contact cell with doped tap region separated from active region, and methods to form same
The disclosure provides integrated circuit (IC) layouts and methods to form the same. An IC layout may include two standard cells, with a well contact cell laterally between them. The well contact cell may include a single semiconductor region having the first doping type, an active bridge region within the single semiconductor region, extending continuously from the first active region of the first standard cell to the third active region of the second standard cell. A doped tap region within the single semiconductor region is laterally separated from the active bridge region. The doped tap region is laterally aligned with the second active region and the fourth active region.
Circuits employing a double diffusion break (DDB) and single diffusion break (SDB) in different type diffusion region(s), and related fabrication methods
Aspects disclosed herein include circuits employing a double diffusion break (DDB) and a single diffusion break (SDB) in different type diffusion regions, and related fabrication methods are disclosed. In exemplary aspects disclosed herein, either a DDB or a SDB is formed in the N-type diffusion region(s) and the opposing type diffusion, either a SDB or DDB, is formed in the P-type diffusion region(s). Forming different diffusion breaks between a DDB and a SDB in different diffusion regions of the circuit can be employed to induce channel strain that will increase carrier mobility of either P-type or N-type semiconductor devices formed in respective P-type or N-type diffusion region(s), while avoiding or reducing such induced channel strain in either P-type or N-type semiconductor devices formed in respective P- or N-type diffusion region(s) that may degrade carrier mobility.
SEMICONDUCTOR STRUCTURE
A semiconductor structure is provided. The semiconductor structure includes a first transistor. The first transistor includes a first set of nanostructures vertically stacked and spaced apart from one another, a first gate stack wrapping around the first set of nanostructures and extending in a first direction, and a first source/drain feature and a second source/drain feature adjoining opposite sides of the first set of nanostructures. The semiconductor structure also includes a first contact plug over the first source/drain feature and a second contact plug over the second source/drain feature. As measured in a second direction which is perpendicular to the first direction, a width of the second contact plug is greater than a width of the first contact plug.
Semiconductor structure and manufacturing method thereof
The invention provides a semiconductor structure, which comprises a first standard cell and a second standard cell located on a substrate, wherein an isolation region is included between the first standard cell and the second standard cell, a plurality of fin structures and a plurality of gates form a plurality of transistors, which are respectively located in the first standard cell and the second standard cell, and a plurality of single diffusion breaks (SDBs) located in the first standard cell and the second standard cell. A plurality of first dummy grooves in the first standard cell and the second standard cell, and a plurality of second dummy grooves in the isolation region, wherein some of the second dummy grooves overlap the first dummy grooves.
TIE OFF DEVICE
An integrated circuit device includes a first power rail, a first active area extending in a first direction, and a plurality of gates contacting the first active area and extending in a second direction perpendicular to the first direction. A first transistor includes the first active area and a first one of the gates. The first transistor has a first threshold voltage (VT). A second transistor includes the first active area and a second one of the gates. The second transistor has a second VT different than the first VT. A tie-off transistor is positioned between the first transistor and the second transistor, and includes the first active area and a third one of the gates, wherein the third gate is connected to the first power rail.
Semiconductor circuit with metal structure having different pitches
The semiconductor structure includes a semiconductor substrate having active regions; field-effect devices disposed on the semiconductor substrate, the field-effect devices including gate stacks with elongated shape oriented in a first direction; a first metal layer disposed over the gate stacks, the first metal layer including first metal lines oriented in a second direction being orthogonal to the first direction; a second metal layer disposed over the first metal layer, the second metal layer including second metal lines oriented in the first direction; and a third metal layer disposed over the second metal layer, the third metal layer including third metal lines oriented in the second direction. The first, second, and third metal lines have a first thickness T.sub.1, a second thickness T.sub.2, and t a third thickness T.sub.3, respectively. The second thickness is greater than the first thickness and the third thickness.
Integrated Circuit Device and Method of Forming the Same
An integrated circuit device includes a first device and a second device. The first device is disposed within a first circuit region, the first device including a plurality of first semiconductor strips extending longitudinally in a first direction. Adjacent ones of the plurality of first semiconductor strips are spaced apart from each other in a second direction, which is generally perpendicular to the first direction. The second device is disposed within a second circuit region, the second circuit region being adjacent to the first circuit region in the first direction. The second device includes a second semiconductor strip extending longitudinally in the first direction. A projection of a longitudinal axis of the second semiconductor strip along the first direction lies in a space separating the adjacent ones of the plurality of first semiconductor strips.
IC including standard cells and SRAM cells
An IC is provided. The IC includes a plurality of a plurality of P-type fin field-effect transistors (FinFETs). At least one first P-type FinFET includes a silicon germanium (SiGe) channel region. At least one second P-type FinFET includes a Si channel region. Source/drain regions of the first P-type FinFET have a first depth, and source/drain regions of the second P-type FinFET have a second depth. The first depth is greater than the second depth.