Patent classifications
H01L2027/11866
IC with test structures and e-beam pads embedded within a contiguous standard cell area
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama ,
- Matthew Moe
An IC that includes a contiguous standard cell area with a 4x3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.
SEMICONDUCTOR INTEGRATED CIRCUIT
A semiconductor integrated circuit includes a first power line to which a first voltage is continuously applied, a second power line, a power switch cell connected to the first power line and configured to output a second voltage to the second power line according to a first signal, a logic circuit driven by the second voltage applied via the second power line, a first circuit driven by the second voltage applied via the second power line and configured to output a third voltage to logic circuit according to a second signal which is an inverted signal of the first signal, and a second circuit driven by the second voltage applied via the second power line and configured to output a fourth voltage to logic circuit according to a third signal which is an inverted signal of the second signal, the fourth voltage being lower than the third voltage.
IC with test structures and e-beam pads embedded within a contiguous standard cell area
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama ,
- Matthew Moe
An IC that includes a contiguous standard cell area with a 4×3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.
INTEGRATED CIRCUITS INCLUDING INTEGRATED STANDARD CELL STRUCTURE
An integrated circuit includes a first standard cell including a first p-type transistor, a first n-type transistor, a first gate stack intersecting first and second active regions, first extended source/drain contacts on a first side of the first gate stack, a first normal source/drain contact on a second side of the first gate stack, a first gate via connected to the first gate stack, and a first source/drain via connected to the first normal source/drain contact, a second standard cell adjacent the first standard cell and including a second p-type transistor, a second n-type transistor, a second gate stack intersecting the first and second active regions, and a second gate via connected to the second gate stack, an input wiring connected to the first gate via, and an output wiring at a same level as the input wiring to connect the first source/drain via and the second gate via.
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
Provided is a semiconductor integrated circuit device including a nanowire field effect transistor (FET) and having a layout configuration effective for making manufacturing the device easy. A standard cell having no logical function is disposed adjacent to a standard cell having a logical function. The standard cell includes nanowire FETs having nanowires and pads. The standard cell further includes dummy pads, which have no contribution to a logical function of a circuit.
SEMICONDUCTOR DEVICE
Disclosed is a semiconductor device including a substrate with first and second regions adjacent to each other in a first direction, and first to third gate electrodes extending from the first region toward the second region. Each of the first and second regions includes a PMOSFET region and an NMOSFET region. The first to third gate electrodes extend in the first direction and are sequentially arranged in a second direction different from the first direction. The first and third gate electrodes are supplied with a first signal. The second gate electrode is supplied with a second signal that is an inverted signal of the first signal. The first gate electrode includes a first gate of the first region and a first gate of the second region. The first gates are aligned and connected with each other in the first direction.
IC with test structures and E-beam pads embedded within a contiguous standard cell area
- Stephen Lam ,
- Dennis Ciplickas ,
- Tomasz Brozek ,
- Jeremy Cheng ,
- Simone Comensoli ,
- Indranil De ,
- Kelvin Doong ,
- Hans Eisenmann ,
- Timothy Fiscus ,
- Jonathan Haigh ,
- Christopher Hess ,
- John Kibarian ,
- Sherry Lee ,
- Marci Liao ,
- Sheng-Che Lin ,
- Hideki Matsuhashi ,
- Kimon Michaels ,
- Conor O'Sullivan ,
- Markus Rauscher ,
- Vyacheslav Rovner ,
- Andrzej Strojwas ,
- Marcin Strojwas ,
- Carl Taylor ,
- Rakesh Vallishayee ,
- Larg Weiland ,
- Nobuharu Yokoyama ,
- Matthew Moe
An IC that includes a contiguous standard cell area with a 43 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.
INTEGRATED CIRCUIT INCLUDING INTEGRATED STANDARD CELL STRUCTURE
An integrated circuit includes a first standard cell including a first first-type transistor, a first second-type transistor, a third second-type transistor, and a third first-type transistor, a second standard cell including a second first-type transistor, a second second-type transistor, a fourth second-type transistor and a fourth first-type transistor, a plurality of wiring layers which are disposed on the first and second standard cells and includes a first wiring layer, a second wiring layer, and a third wiring layer sequentially stacked. A source contact of the first first-type transistor and a source contact of the second first-type transistor are electrically connected through a first power rail of the plurality of wiring layers, and a source contact of the third first-type transistor and a source contact of the fourth first-type transistor are electrically connected through a second power rail of the plurality of wiring layers.
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
The present disclosure attempts to provide a capacitor cell having a large capacitance value per unit area in a semiconductor integrated circuit device using a three-dimensional transistor device. A logic cell includes a three-dimensional transistor device. A capacitor cell includes a three-dimensional transistor device. A length of a portion, of a local interconnect, which protrudes from a three-dimensional diffusion layer in a direction away from a power supply interconnect in the capacitor cell is greater than a length of a portion, of a local interconnect, which protrudes from a three-dimensional diffusion layer in a direction away from a power supply interconnect in the logic cell.
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE HAVING GATE ELECTRODES WITH DOPANT OF DIFFERENT CONDUCTIVE TYPES
A method of manufacturing a semiconductor device is provided. The semiconductor device includes providing a substrate; forming a plurality of gate electrodes on the substrate; doping a first portion of the plurality of gate electrodes with a first dopant of a first conductive type; and doping a second portion of the plurality of gate electrodes with a second dopant of a second conductive type different from the first conductive type.