Patent classifications
H01L2224/13316
METHOD FOR PRODUCING JOINED STRUCTURE
A method for producing a joined structure according to the present invention includes: a reflow step of heating a first member and a solder material while keeping them in contact with each other in a reflow chamber to melt a solder alloy constituting the solder material, the reflow step including: a first reflow step of melting the solder alloy with an atmosphere in the reflow chamber reduced to a first pressure P.sub.1 lower than the atmospheric pressure; and a second reflow step of, after the first reflow step, melting the solder alloy with the atmosphere in the reflow chamber reduced to a second pressure P.sub.2 lower than the first pressure P.sub.1.
METHOD FOR PRODUCING JOINED STRUCTURE
A method for producing a joined structure according to the present invention includes: a reflow step of heating a first member and a solder material while keeping them in contact with each other in a reflow chamber to melt a solder alloy constituting the solder material, the reflow step including: a first reflow step of melting the solder alloy with an atmosphere in the reflow chamber reduced to a first pressure P.sub.1 lower than the atmospheric pressure; and a second reflow step of, after the first reflow step, melting the solder alloy with the atmosphere in the reflow chamber reduced to a second pressure P.sub.2 lower than the first pressure P.sub.1.
Semiconductor structure and manufacturing method thereof
A semiconductor structure includes a substrate; a conductive pad disposed over the substrate; a passivation disposed over the substrate and covering a portion of the conductive pad; a bump pad disposed over the conductive pad and the passivation; a conductive bump including a conductive pillar disposed over the bump pad and a soldering member disposed over the conductive pillar; and a dielectric member disposed over the passivation and surrounding the conductive pillar.
Semiconductor structure and manufacturing method thereof
A semiconductor structure includes a substrate; a conductive pad disposed over the substrate; a passivation disposed over the substrate and covering a portion of the conductive pad; a bump pad disposed over the conductive pad and the passivation; a conductive bump including a conductive pillar disposed over the bump pad and a soldering member disposed over the conductive pillar; and a dielectric member disposed over the passivation and surrounding the conductive pillar.
Semiconductor structure and manufacturing method thereof
The present disclosure provides a semiconductor structure, including a substrate, a conductive pad, a passivation layer, a recess, a bump pad, and a conductive bump. The conductive pad is disposed over the substrate. The passivation layer is disposed over the substrate and partially covers the conductive pad. The recess extends through the passivation layer and extends at least partially into the conductive pad. The bump pad is disposed over the passivation layer and within the recess; and the conductive bump is disposed over the bump pad. A method of manufacturing the semiconductor structure is also provided.
Semiconductor structure and manufacturing method thereof
The present disclosure provides a semiconductor structure, including a substrate, a conductive pad, a passivation layer, a recess, a bump pad, and a conductive bump. The conductive pad is disposed over the substrate. The passivation layer is disposed over the substrate and partially covers the conductive pad. The recess extends through the passivation layer and extends at least partially into the conductive pad. The bump pad is disposed over the passivation layer and within the recess; and the conductive bump is disposed over the bump pad. A method of manufacturing the semiconductor structure is also provided.
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
The present disclosure provides a semiconductor structure, including a substrate, a conductive pad, a passivation layer, a recess, a bump pad, and a conductive bump. The conductive pad is disposed over the substrate. The passivation layer is disposed over the substrate and partially covers the conductive pad. The recess extends through the passivation layer and extends at least partially into the conductive pad. The bump pad is disposed over the passivation layer and within the recess; and the conductive bump is disposed over the bump pad. A method of manufacturing the semiconductor structure is also provided.
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
The present disclosure provides a semiconductor structure, including a substrate, a conductive pad, a passivation layer, a recess, a bump pad, and a conductive bump. The conductive pad is disposed over the substrate. The passivation layer is disposed over the substrate and partially covers the conductive pad. The recess extends through the passivation layer and extends at least partially into the conductive pad. The bump pad is disposed over the passivation layer and within the recess; and the conductive bump is disposed over the bump pad. A method of manufacturing the semiconductor structure is also provided.
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
A semiconductor structure includes a substrate; a conductive pad disposed over the substrate; a passivation disposed over the substrate and covering a portion of the conductive pad; a bump pad disposed over the conductive pad and the passivation; a conductive bump including a conductive pillar disposed over the bump pad and a soldering member disposed over the conductive pillar; and a dielectric member disposed over the passivation and surrounding the conductive pillar.
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
A semiconductor structure includes a substrate; a conductive pad disposed over the substrate; a passivation disposed over the substrate and covering a portion of the conductive pad; a bump pad disposed over the conductive pad and the passivation; a conductive bump including a conductive pillar disposed over the bump pad and a soldering member disposed over the conductive pillar; and a dielectric member disposed over the passivation and surrounding the conductive pillar.