Provided is a substrate treating apparatus. The substrate treating apparatus includes a chamber, a support member disposed within the chamber to support a substrate, and an exhaust member for exhausting a gas within an inner space of the chamber to the outside of the chamber. A trap space for collecting fumes contained in the gas is defined in the exhaust member.

The invention concerns a device comprising: a base (2); a moveable or removable door (20), said device having a closed door position; and in the closed door position, a circuit (8) comprising a bag comprising two flexible films and conveying network connectors, and a press (9) comprising a first shell (16) disposed on said front face (5) of said base (2) and a second shell (17) disposed in said door (20); said bag being clamped between said first shell (16) and said second shell (17) in a state in which conduits of said network for conveying liquid are formed between said films.

An apparatus for processing a substrate is disclosed. The apparatus includes a polishing section configured to polish a substrate, a transfer mechanism configured to transfer the substrate, and a cleaning section configured to clean and dry the polished substrate. The cleaning section has plural cleaning lines for cleaning plural substrates. The plural cleaning lines have plural cleaning modules and plural transfer robots for transferring the substrates.

A valve is mounted in a first bore in a first separable section of a transmission to block or allow fluid flow through the first bore to a second bore in a second transmission section depending on whether the first and second sections are joined together or separated. A movable portion of the valve is responsive to an actuator during relative movement of the transmission sections to shift between fluid flow open and fluid flow closed positions. The valve can include a valve housing fixed in the first bore and a carrying plunger biased to the fluid blocking position and responsive to the actuator for movement to the fluid flow open position. The valve forms a fluid flow path between the first and second bores across the gap between the facing surfaces of the joined transmission sections.

An assembly for use with a water meter includes: a housing including a meter portion integrally formed with a valve portion; and a valve positioned in the valve portion and in sealable communication with an inner surface of the housing, the valve defining a valve inlet portion and a valve outlet portion, the valve inlet portion defining a vertical portion and separated from the valve outlet portion by a top edge portion defined in the vertical portion, the valve inlet portion sealable from the valve outlet portion by a diaphragm assembly of the valve, the diaphragm assembly defining a water leak passthrough configured to allow passage of water from a first side of the diaphragm assembly to a second side of the diaphragm assembly opposite from the first side.

The invention provides methods for assessing one or more predetermined characteristics or properties of a microfluidic droplet within a microfluidic channel, and regulating one or more fluid flow rates within that channel to selectively alter the predetermined microdroplet characteristic or property using a feedback control.

A dispensing unit is provided having a circulation system for circulating a fluid in the dispensing unit is provided. The circulation system can include a circulation circuit, and a mechanism configured to circulate the fluid in the circulation circuit. By circulating the fluid, the fluid is counteracted from crystallizing. A method for circulating a fluid in a dispensing unit is also provided.

A hydraulic system for a hybrid module which is located between an engine and a transmission includes a parallel arrangement of a mechanical pump and an electric pump. Each pump is constructed and arranged to deliver oil to other portions of the hydraulic system depending on the operational mode. Three operational modes are described including an electric mode, a transition mode, and a cruise mode. Various monitoring and control features are incorporated into the hydraulic system.

A valve having a body having a first section and a second section; an extended flange attached to the second section of the body or disposed as an integral part of the second section of the body; an elongate bore extending through the body and having a proximal end and a distal end; a longitudinally displaceable plunger disposed in and extending along the bore, the plunger having a proximal end and a distal end and having a first position displaced toward the distal end of the bore and a second position displaced toward the proximal end of the bore; a diaphragm seal attached to the proximal end of the plunger and sealing the bore at the proximal end thereof; a gland seal sealing the bore at a location intermediate the diaphragm seal and the distal end of the bore; the plunger extending through and being sealingly secured to the gland seal; a fluid transfer opening in the bore between the diaphragm seal and the gland seal; longitudinal displacement of the plunger moving the diaphragm seal to open the bore, the gland seal stretching to accommodate the displacement of and maintain a seal about the plunger, a fluid flow path being established between the open proximal end of the bore and the fluid transfer opening, wherein longitudinal displacement of the plunger towards its first position moves the diaphragm to open the bore. The valve further comprises an extended flange having a surface that is approximately coplanar with a surface of the second position when the plunger is displaced toward the proximal end of the bore, creating a zero dead leg position

The invention provides methods for assessing one or more predetermined characteristics or properties of a microfluidic droplet within a microfluidic channel, and regulating one or more fluid flow rates within that channel to selectively alter the predetermined microdroplet characteristic or property using a feedback control.