A work seating detection device including a detection hole formed to discharge air from a work seating face of a chuck, a detection flow path connecting an air supply source supplying compressed air and the detection hole, a pressure switch detecting a secondary-side pressure of a throttle portion formed in the detection flow path, and a pressure regulator adjusting the secondary-side pressure is provided. An adjustment flow path branching on a secondary side of the throttle portion is formed in the detection flow path, an on-off valve is disposed at the adjustment flow path, an adjustment block provided with an adjustment face pressing an adjustment gauge is integrally formed in a tip portion, and an adjustment hole having the same size as the detection hole and communicating with the adjustment flow path is formed in the adjustment block for an opening portion to be positioned in the adjustment face.

An apparatus and an associated method. The apparatus includes a chuck, an array of three or more ultrasonic sensors, a ceramic ring surrounding the chuck, and a controller connected to the ultrasonic sensors. The chuck is configured to removeably hold a substrate for processing. Each ultrasonic sensor may send a respective ultrasonic sound wave to a respective preselected peripheral region of the substrate and receive a respective return ultrasonic sound wave from the preselected peripheral region. The controller may compare a measured position of the substrate on the chuck to a specified placement of the substrate on the chuck based on a measured elapsed time between sending the ultrasonic sound wave and receiving the return ultrasonic sound wave for each ultrasonic sensor. The method compares a measured position of the substrate on the chuck to a specified position on the chuck.

A live tool system having a live tool and a collar surrounding a rotating shaft or a rotating cutting tool of the live tool. The collar houses at least one sensor capable of monitoring an operating condition proximate to the cutting tool during a cutting operation. Example operating conditions including temperature and vibration. The system also includes a wireless transmitter in communication with the at least one sensor for transmitting a signal for use by a machining center controller.

The invention relates to a machine tool apparatus having a spindle (2), with a base flange (4) provided for attachment to the spindle (2) as part of a clamping tool quick-change tooling system (1), which further comprises an exchangeable flange (5), which is connectable to the chucking tool (3). Line sections (46) for data and/or energy transfer are arranged in the spindle (2), the base flange (4), the exchangeable flange (5) and the chucking tool (6), whereby coupling members (47) for connecting the line sections (46) to form a single line (FIG. 11) are provided on adjacent components in the transfer chain.

The invention relates to a device controlling a chuck of a machine tool and an auxiliary equipment thereof, thereby facilitating a setup work. Gripping and releasing of a work are confirmed by registering a work gripping position and a work releasing position of a chuck, a kind of a used chuck, and a gripping direction of a work in an external memory device every product type of the work, transferring the work gripping position and the work releasing position in correspondence to the product type to a controller of a machine tool displaying them on a display of an operator control panel, detecting a position of an operation rod opening and closing a claw of the chuck by a stroke sensor, referring to the gripping position of the work, and detecting conformity of the detecting position and set values of the work gripping position and the work releasing position.

The invention relates to a clamping chuck for clamping pallets furnished with a clamping spigot. The clamping chuck has a locating opening for the clamping spigot and a clamping device for clamping the clamping spigot in the locating opening. A plurality of sensors are arranged on the clamping chuck, by means of which the clamping force actions on the clamping spigot may be determined as well as other values. The clamping chuck is equipped with a transmitter for wireless transmission of parameters detected by means of the one or more sensors.

A workpiece is conveyed from a first fixed point to a second fixed point by a conveyor in a chucked state. A phase of the workpiece that is being conveyed by the conveyor is detected by a detector. The workpiece conveyed to the second fixed point by the conveyor is seated on a seating part. A workpiece seating phase of the seating part is adjusted by an adjustor to the phase of the workpiece detected by the detector.

An apparatus and an associated method. The apparatus includes a chuck, an array of three or more ultrasonic sensors, a ceramic ring surrounding the chuck, and a controller connected to the ultrasonic sensors. The chuck is configured to removeably hold a substrate for processing. Each ultrasonic sensor may send a respective ultrasonic sound wave to a respective preselected peripheral region of the substrate and receive a respective return ultrasonic sound wave from the preselected peripheral region. The controller may compare a measured position of the substrate on the chuck to a specified placement of the substrate on the chuck based on a measured elapsed time between sending the ultrasonic sound wave and receiving the return ultrasonic sound wave for each ultrasonic sensor. The method compares a measured position of the substrate on the chuck to a specified position on the chuck.

A chuck, a system including a chuck and a method for making a semiconductor device are disclosed. In one embodiment the chuck includes a first conductive region configured to be capacitively coupled to a first RF power generator, a second conductive region configured to be capacitively coupled to a second RF power generator and an insulation region that electrically insulates the first conductive region from the second conductive region.

An apparatus and an associated method. The apparatus includes a chuck in a process chamber, an array of three or more ultrasonic sensors in the process chamber, a ceramic ring surrounding the chuck, and a controller connected to the ultrasonic sensors. The chuck is configured to removeably hold a substrate for processing. Each ultrasonic sensor may send a respective ultrasonic sound wave to a respective preselected peripheral region of the substrate and receive a respective return ultrasonic sound wave from the preselected peripheral region. The controller may compare a measured position of the substrate on the chuck to a specified placement of the substrate on the chuck based on a measured elapsed time between sending the ultrasonic sound wave and receiving the return ultrasonic sound wave for each ultrasonic sensor. The method compares a measured position of the substrate on the chuck to a specified position on the chuck.