A retention knob for use with a tool holder that is less prone to distorting a tapered tool holder surface, especially if it is over-tightened. The retention knob includes a knob head, a flange engageable with an end of a tool holder shank, a pilot segment receivable by the counter bore defined by said tool holder shank and a threaded segment spaced from said flange by an undercut segment. The threaded segment is configured so that it has a length that is substantially the minimum length required to achieve maximum thread holding strength. The undercut segment is configured to space the threaded segment from its head so that a distal end of the threaded segment is substantially near the bottom of the tapered bore forming part of the tool holder. With the disclosed construction, an upper portion of the threaded tool holder bore is not engaged by the threaded segment. The threaded segment has balanced threads which is achieved by locating the lead-in of the thread 180 from the lead-out of the thread. Chamfer angles at the lead-in and lead-out of the threaded segment are controlled to be the same or substantially similar.

A centering device for centrally chucking a rotary tool includes a socket on a mandrel of a tool holder. A tool arrangement includes a tool holder that has a mandrel, and including a rotary tool that is placed on the tool holder and includes a socket. In order to create a universal centering device that is easy to manufacture and can be used for a multitude of internal chucking units, and create a tool arrangement in which the rotary tool can be centered with high accuracy on the internal chucking unit, the centering device is designed as a closed centering ring which can be inserted between the rotary tool and the mandrel and which has an elastically deformable contour, and such a centering device is disposed between the mandrel and the rotary tool in the tool arrangement.

A processing apparatus for processing a substrate chucked by a chuck installed on a stage includes: a conveying unit configured to convey the substrate to the chuck; a robot configured to selectively convey, to the stage, a pressing member capable of pressing the substrate to reduce a warp of the substrate chucked by the chuck and a cleaning member capable of cleaning a chuck surface; and a controller configured to cause the robot holding the pressing member to execute pressing processing for correcting the warp of the substrate and cause the robot holding the cleaning member to execute cleaning processing of the chuck surface.

A chuck for testing an integrated circuit includes an upper conductive layer having a lower surface and an upper surface suitable to support a device under test. An upper insulating layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper conductive layer, and a lower surface. A middle conductive layer has an upper surface at least in partial face-to-face contact with the lower surface of the upper insulating layer, and a lower surface.

Methods and apparatus for bonding an electrostatic chuck to a component of a substrate support are provided herein. In some embodiments, an adhesive for bonding components of a substrate support may include a matrix of silicon-based polymeric material having a filler dispersed therein. The silicon based polymeric material may be a polydimethylsiloxane (PDMS) structure having a molecular weight with a low molecular weight (LMW) content D3-D10 of less than about 500 ppm. In some embodiments, the filler may comprise between about 50 to about 70 percent by volume of the adhesive layer. In some embodiments, the filler may comprise particles of aluminum oxide (Al.sub.2O.sub.3), aluminum nitride (AlN), yttrium oxide (Y.sub.2O.sub.3), or combinations thereof. In some embodiments, the filler may comprise particles having a diameter of about 10 nanometers to about 10 microns.

A collet adaptor 20 including a work piece clamp mechanism 29. The collet adaptor 20 is rotatable about a first axis A and the work piece clamp mechanism 29 is mounted within the collet adaptor 20 for rotation with the collect adaptor 20. The clamp mechanism 29 is also mounted for movement laterally to the first axis A during rotation of the collet adaptor 29. The clamp mechanism 29 can also be mounted within the collect adaptor 20 for rotational movement lateral to the first axis A during rotation of the collect adaptor 20.

A tool attachment has: (i) a drive shaft driven rotationally; (ii) a locking section for locking on a mounting interface of a hand-held machine tool, the machine tool including a tool holder having a receiving member for receiving an insert tool and a first locking sleeve preloaded by a first spring element in an axial direction pointing away from the hand-held machine tool; and (iii) an actuating element configured to shift, upon mounting the tool attachment on the hand-held machine tool, the first locking sleeve against a spring force applied by the first spring element, in the direction of the hand-held machine tool.

A power tool includes a clamp shaft for clamping a tool accessory to the power tool and a clamp shaft holding mechanism for selectively locking the clamp shaft to hold the clamp shaft in a position that secures the tool accessory on the power tool. The power tool also includes a lever for shifting the clamp shaft holding mechanism between clamped and unclamped states. The lever is configured such that when an operator grasps the lever and moves it toward a position for releasing the tool accessory, the lever and the operator's hand move away from the tool accessory.

A tool holder assembly easy to assemble and disassemble has a chuck and a clamping unit. The chuck has a base portion, a nut positioning portion, and an annular groove between the above two portions. An arc surface is formed on a periphery of the nut positioning portion by cutting. The clamping nut is hollow, surrounds an interior space, and has an inner protruding edge to form an eccentric circle in the interior space. A vertex of the arc surface defines a tangent line to further define a tangent circle and a shifting distance being substantially equal to an eccentric distance of the eccentric circle. When mounting the chuck through the clamping nut, the arc surface allows the inner protruding edge to pass by for not obstructing the nut positioning portion, which improves efficiency and convenience of assembly.