A valve with a shuttle for use in a flow management system is capable of bypassing a backflow.

A valve subassembly includes a main spool having a continuously adjustable main orifice and a control spool having adjustable first and second orifices. The control spool has first and second end positions and is acted upon by a first spring toward the first end position. A fluid flow path starts from a pump and runs to an actuator via the first orifice, first control point, second orifice, second control point, main orifice, and third control point. Pressure at the first control point acts on the control spool toward the second end position and pressure at the third control point acts toward the first end position. The second orifice is closed between the first end position and an intermediate position, and opens from the intermediate position to the second end position. The second orifice opening decreases from the intermediate position to the second end position from a nonzero value to zero.

In one embodiment, a gas supply line is connected to a chamber of a substrate processing apparatus. A vaporizer is connected to the gas supply line. A flow rate controller is connected to the gas supply line in parallel with the vaporizer through a secondary valve. A primary valve is provided on a primary side of the flow rate controller. A method of the embodiment includes supplying a processing gas to the chamber from the vaporizer through the gas supply line in a state in which the primary valve is closed, the secondary valve is opened, and an exhaust device is operated to set a pressure of the chamber to a predetermined pressure and determining a time-average value of a measurement value obtained by a pressure sensor of the flow rate controller while the supplying the processing gas is performed.

In one embodiment, a vaporizer is connected to a chamber of a substrate processing apparatus through a gas supply line and a gas introduction port. An exhaust device is connected to the gas supply line. The substrate processing apparatus includes a pressure sensor that obtains a measurement value of a pressure of the gas supply line. A method according to the embodiment includes supplying a processing gas to the chamber from the vaporizer through the gas supply line, and monitoring a change of the measurement value obtained by the pressure sensor in a state in which supply of the processing gas to the gas supply line is stopped.

A valve for an air brake system on a commercial vehicle comprises a body, an inlet port connected to the body and at least one delivery port connected to the body. The inlet port has a threaded portion distal to the body and a hex portion proximate to the body. The hex portion includes a frangible feature in substantially the mid-point of the hex portion such that the valve can easily be removed from an air brake reservoir when the valve is broken at the frangible feature.

An oilfield production string portion including a valve with a valve housing, a multiseal shuttle including a piston and a lid, the piston having a through hole and movable in the housing for enabling linear flow through the valve or for enabling non-linear flow through the valve.

A balancing valve includes four ports. While the pressures at a pair of balancing ports of a hydraulic balancing valve are equal, the valve maintains two other ports in a closed position. Upon a pressure differential between the balancing ports, fluid communication can occur between one of the balancing ports and either of the other ports based upon the direction of the pressure differential. A hydraulic ride control system utilizes the balancing valve together with other control valves to provide ride control functionality.

A valve subassembly includes a main spool having a continuously adjustable main orifice and a control spool having adjustable first and second orifices. The control spool has first and second end positions and is acted upon by a first spring toward the first end position. A fluid flow path starts from a pump and runs to an actuator via the first orifice, first control point, second orifice, second control point, main orifice, and third control point. Pressure at the first control point acts on the control spool toward the second end position and pressure at the third control point acts toward the first end position. The second orifice is closed between the first end position and an intermediate position, and opens from the intermediate position to the second end position. The second orifice opening decreases from the intermediate position to the second end position from a nonzero value to zero.

A pressure-type flow controller includes a main body provided with a fluid channel between a fluid inlet and a fluid outlet and an exhaust channel between the fluid channel and an exhaust outlet; a pressure control valve fixed to the fluid inlet of the main body for opening/closing the upstream side of the fluid channel; a pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the pressure control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; and an exhaust control valve for opening/closing the exhaust channel.

A valve with a shuttle for use in a flow management system is capable of bypassing a backflow.