A fluid controller heating apparatus includes a cylindrical heater unit that surrounds a portion of an opening-and-closing valve to be heated, and a heat insulation jacket that surrounds the heater unit. The heater unit includes a pair of heat-transfer members to which plate-shaped heaters are fixed, respectively. The heat-transfer members are mounted so as to hold the opening-and-closing valve therebetween from both sides and are capable of being coupled to each other with a screw member. The heat insulation jacket is a cylindrical integrated product.

Provided is a substrate treatment apparatus including a housing, a supporting unit located inside the housing and supporting a substrate, a nozzle unit supplying chemicals to the substrate disposed on the supporting unit, and a chemical supplying unit supplying the chemicals to the nozzle unit. Herein, the chemical supplying unit includes a chemical supply source, a first tank and a second tank storing the chemicals, a chemical supplying line supplying the chemicals from the chemical supply source to the first tank and the second tank, a chemical discharge line supplying the chemicals from the first tank and the second tank to the nozzle unit, a circulation line allowing the chemicals to circulate through the first tank and the second tank, respectively, a member installed on the circulation line, and a controller controlling the member.

A flow-through fluid heater comprises: a high thermal conductivity conduit-defining body shaped to provide a conduit that extends between an inlet port and an outlet port; one or more heating elements connected to the body for providing heat to the body, thereby permitting the body to provide heat to fluid flowing through the conduit; a temperature sensor connected to sense a measured temperature indicative of a temperature of the fluid in a vicinity of the temperature sensor; one or more flow rate sensors for sensing a measured flow rate of the fluid through the conduit; and a controller connected to receive signals from the temperature sensor and the flow rate sensors, the controller configured to control an amount of heat energy imparted to the fluid during a period that the fluid is resident in the conduit between the inlet port and the outlet port based at least in part on the measured temperature and the measured flow rate.

A mixing valve that includes a housing having a first outlet, a second outlet, and a mixing chamber; a first flow control valve for controlling flow through the first outlet to the mixing chamber; and a second flow control valve for controlling flow through the second outlet to the mixing chamber; wherein the housing has a length dimension, a width dimension, and a thickness dimension, and the largest of these dimensions is no more than approximately 65 millimeters.

A method including configuring a valve so that an operating force to actuate the valve when in an open position is substantially independent of water flow. The valve includes a first valve member assembly comprising a spool having a connector portion; a first valve member mounted on the spool at a first location and configured to seat against a first valve outlet in a closed position of the valve; and a second valve member mounted on the spool at a second location spaced apart from the first location and configured to seat against a second valve outlet in the closed position of the valve. The method also includes controlling the valve to output a flow of the water having a desired flow rate by moving the spool in a linear direction with a portion of a stepper motor coupled directly to the connector portion of the spool.

A plumbing fitting having a body and a housing located in the body that includes a first inlet for receiving the first fluid, a second inlet for receiving the second fluid, and a mixing chamber. The plumbing fitting includes a first flow control valve operatively coupled to the housing; a second flow control valve operatively coupled to the housing; and an actuator assembly configured to move the first flow control valve relative to the housing to control flow of the first fluid from the first inlet to the mixing chamber, such that the first fluid exerts substantially no net force on the first flow control valve, and configured to move the second flow control valve relative to the housing to control flow of the second fluid from the second inlet to the mixing chamber, such that the second fluid exerts substantially no net force on the second flow control valve.

A water delivery device that includes a body having a cold water inlet, a hot water inlet, and an outlet; a mixing valve in the body, and a touchscreen user interface on a surface of the body. The mixing valve includes a housing having a mixing chamber that is fluidly connected to the outlet, a first flow control valve moveably disposed in the housing to control a cold water flow from the cold water inlet to the mixing chamber, and a second flow control valve moveably disposed in the housing to control a hot water flow from the hot water inlet to the mixing chamber. The touchscreen user interface allows a user to control a temperature and/or a flow rate of water from the outlet by controlling the first and second flow control valves.

A mixing valve having a housing and first and second flow control valves. The housing has a mixing chamber, a first outlet, and a second outlet. The first flow control valve controls fluid flow through the first outlet to the mixing chamber, and the second flow control valve controls fluid flow through the second outlet to the mixing chamber. The first and second outlets each have a size so that the mixing valve has a flow coefficient of approximately 2.5 in a mid-open position of both flow control valves, and the housing has a length dimension, a width dimension, and a thickness dimension, and the largest of these dimensions is no more than approximately 65 millimeters.

A plumbing component includes a valve provided within a portion of the plumbing component and configured to control the flow of water through the plumbing component. The valve includes a body and at least one waterway within the body. An electric heater extends through at least a portion of the body of the valve and is configured to heat at least a portion of the body to an elevated temperature sufficient to kill organisms within the waterway.

A shower head that includes a movable handset, a mixing valve, and an electric heater. The movable handset includes a stem configured to detachably engage a shower head dock, and a spray head coupled to the stem and configured to discharge water. The mixing valve is disposed within the movable handset and includes a housing including a waterway located therein for water to flow through, a first flow control valve located within the housing and configured to control the flow of hot water to the spray head, and a second flow control valve located within the housing and configured to control the flow of cold water to the spray head. The electric heater is disposed within the movable handset and configured to heat at least part of the housing to an elevated temperature sufficient to kill organisms within the waterway.