A vacuum adjustment device having a coupling for coupling an active element and a drive unit is disclosed. The drive unit adjusts the coupling from a normal position into an active position, in which the active element provides its intended effect. A separating device separates the process atmosphere region (P) from an outer atmosphere region (A), wherein the drive unit is at least partially associated with the outer atmosphere region (A). The coupling has a locking element cooperating with a collet which are arranged for a relative position variation axially along or parallel to a receiving axis that the locking element is adjustable relative to the collet into an open position and into a closed position. The coupling provides an open changing state in the open position by the interaction of the collet with the locking element and a closed working state in the closed position.

A vacuum adjustment device having a coupling for coupling an active element and a drive unit is disclosed. The drive unit adjusts the coupling from a normal position into an active position, in which the active element provides its intended effect. A separating device separates the process atmosphere region (P) from an outer atmosphere region (A), wherein the drive unit is at least partially associated with the outer atmosphere region (A). The coupling has a locking element cooperating with a collet which are arranged for a relative position variation axially along or parallel to a receiving axis that the locking element is adjustable relative to the collet into an open position and into a closed position. The coupling provides an open changing state in the open position by the interaction of the collet with the locking element and a closed working state in the closed position.