Patent classifications
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GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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TECHNICAL SUBJECTS COVERED BY FORMER USPC
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TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Y10S977/877

Safe separation for nano imprinting
11020894 · 2021-06-01 · ·

Control of lateral strain and lateral strain ratio (d.sub.t/d.sub.b) between template and substrate through the selection of template and/or substrate thicknesses (T.sub.t and/or T.sub.b), control of template and/or substrate back pressure (P.sub.t and/or P.sub.b), and/or selection of material stiffness are described.

Safe Separation for Nano Imprinting
20190061228 · 2019-02-28 ·

Control of lateral strain and lateral strain ratio (d.sub.t/d.sub.b) between template and substrate through the selection of template and/or substrate thicknesses (T.sub.t and/or T.sub.b), control of template and/or substrate back pressure (P.sub.t and/or P.sub.b), and/or selection of material stiffness are described.