In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device (100) comprises a plurality of fluid heating sections (1) connected to each other and each having a flow path or a fluid accommodating portion inside, heaters (10) configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (13, 13′) disposed between adjacent fluid heating sections.

Various embodiments include an exemplary design of an apparatus and related process to reduce or eliminate de-gassing from a liquid precursor during dispensing of the liquid precursor under vacuum. In one embodiment, the apparatus includes a liquid-flow controller configured to be coupled to a liquid-supply vessel containing the liquid precursor, and at least one valve hydraulically coupled downstream of and to the liquid-flow controller by a liquid line. The at least one valve is to be opened and closed to maintain a minimum pressure that is sufficiently high enough to reduce or prevent degassing of the liquid precursor throughout the liquid line. An atomizer is hydraulically coupled downstream of and to the at least one valve. The atomizer can produce droplets of the liquid precursor and is further to be coupled on a downstream side to a vacuum source. Other methods and apparatuses are disclosed.

A composite material for floating on a contaminated water source, including: A) a polymeric structure having a network of interconnected porous channels; and B) a carbonous material dispersed within the polymeric structure, the carbonous material has a functionalized surface. The composite material has a density of less than 1 g/cm.sup.3, and the contaminated water source contains a low-boiling-point contaminant. The polymeric structure draws contaminated water from the contaminated water source into the polymeric structure via capillary action, and the functionalized surface removes the low-boiling point contaminant from the contaminated water. A method of purifying water using the composite material as mentioned herein and a kit for harvesting purified water including the composite material as mentioned herein.

Provided is a vaporizer capable of reducing the occurrence of bumping in a vaporization space and thereby minimizing the pressure fluctuations therein, when a method not using an atomizer is employed. A vaporizer (1) includes a tank body (10), a porous member (30) disposed in the vaporizer (1) and heated, a supply tube (40) configured to supply a liquid material (L) to the porous member (30), and a gas discharge passage (7) configured to discharge a source gas (G) produced by vaporizing the liquid material (L) to the outside. An outlet (41) of the supply tube (40) is disposed in contact with or in close proximity to the porous member (30). When the outlet (41) is disposed in close proximity to the porous member (30), a separation distance (H) between the outlet (41) and the porous member (30) is not greater than a distance from the outlet (41) to a bottom of a droplet of the liquid material (L) formed and suspended at the outlet (41) by surface tension.

The present disclosure provides a method for stably supplying a highly pure n-butylamine gas having a constant composition. The present disclosure is a composition supply method including: a filling step of filling a container with a composition containing n-butylamine in an amount of 99.5% by volume or more and isobutylamine in an amount of 0.001% by volume or more and 0.5% by volume or less; a warming step of warming the container filled with the composition to 50° C. or higher; and a gas supply step of supplying a gas containing n-butylamine and isobutylamine from the warmed container to a predetermined device.

Methods for the gas-phase delivery of gases, such as process gases, from the gas phase of a multicomponent source liquid are provided. The methods are generally directed to the generation of process gases having mass flow rates which are proportional to the input power delivered to the multicomponent source liquid containers. The methods may be used to deliver process gases to critical process applications.

Methods and apparatus for vaporizing liquid from a liquid source into the surrounding environment, are disclosed, where the apparatus comprises at least one manifold comprising at least one liquid port formed by a through-hole and at least one ridge structure, wherein the liquid port is in fluid communication with the liquid source and the one ridge structure. At least one vaporization port is included in a planar structure connecting a first side of the structure to a second side, in fluid communication with the at least one ridge structure and the surrounding environment, wherein fluid flow through the liquid and vaporization ports is substantially perpendicular to the plane of the structure, and the ridge structures are substantially parallel to the plane of the structure. At least one heating element is present that is in thermal communication to the at least one vaporization port and at least one ridge structure.

Provided are a precursor supply unit, a substrate processing system, and a method of fabricating a semiconductor device using the same. The precursor supply unit may include an outer container, an inner container provided in the outer container and used to store a precursor source, a gas injection line having an injection port, which is provided below the inner container and in the outer container and is used to provide a carrier gas into the outer container, and a gas exhaust line having an exhaust port, which is provided below the inner container and in the outer container and is used to exhaust the carrier gas in the outer container and a precursor produced from the precursor source.

A multilayer thin film evaporator for steam heating includes a housing. A three-layer evaporation cylindrical core arranged in a nested manner with one layer placed inside the other is configured inside the housing. A limiting plate is configured to fix the three-layer evaporation cylindrical core. A feeding tube, a heating medium inlet tube, and a heating medium outlet tube are sequentially fixed under the limiting plate in a crosswise manner. A rotary rack spindle passing through a center of the three-layer evaporation cylindrical core, a rotary rack fixed on the rotary rack spindle and capable of rotating with the rotary rack spindle, and a motor component connected to a top end of the rotary rack spindle and capable of driving the rotary rack spindle to rotate are further provided.

A novel method, composition and storage and delivery container for using antimony-containing dopant materials are provided. The composition is selected with sufficient vapor pressure to flow at a steady, sufficient and sustained flow rate into an arc chamber as part of an ion implant process. The antimony-containing material is represented by a non-carbon containing chemical formula, thereby reducing or eliminating the introduction of carbon-based deposits into the ion chamber. The composition is stored in a storage and delivery vessel under stable conditions, which includes a moisture-free environment that does not contain trace amounts of moisture. The storage and delivery container is specifically designed to allow delivery of high purity, vapor phase antimony-containing dopant material at a steady, sufficient and sustained flow rate.