A fluid gasification, pumping and mixing equipment, for fluids contained in open or closed bodies, which allows to control the bubble size and the proportion of mixed gases, of a gas flow to be diffused into the fluid, which functions to generate a gas suction flow that allows active filling of cavitation zones created by the radial movement of a cavitation propeller, which can be used to suction at different depths without losing suction force or generate higher energy consumption.

A first water spray unit that sprays water into the gaseous mixture containing the flux component, a separation unit having an introduction port for introducing the gaseous mixture into which water is sprayed from the first water spray unit, and a second water spray unit that forms a precipitation flow inside of the separation unit. The separation unit uses a swirling flow to separate the flow component from the gaseous mixture.

A first water spray unit that sprays water into the gaseous mixture containing the flux component, a separation unit having an introduction port for introducing the gaseous mixture into which water is sprayed from the first water spray unit, and a second water spray unit that forms a precipitation flow inside of the separation unit. The separation unit uses a swirling flow to separate the flow component from the gaseous mixture.

A separator apparatus and method are disclosed. The separator apparatus comprises: an inlet operable to receive an effluent stream comprising a fluid and particles; a centrifugal separator comprising a radial fan and a centrifugal particle separator operable to separate at least some of the particles from the fluid; a fluid outlet for providing the fluid; and a particle outlet for providing the particles separated from the fluid. In this way, particles may be removed effectively from the fluid in the effluent stream without the need for an inconvenient electrostatic precipitator or other large particle separator. Instead, the apparatus provides for improved particle capture and removal within a smaller footprint. This provides for a more efficient and compact device.

A separator apparatus and method are disclosed. The separator apparatus comprises: an inlet operable to receive an effluent stream comprising a fluid and particles; a centrifugal separator comprising a radial fan and a centrifugal particle separator operable to separate at least some of the particles from the fluid; a fluid outlet for providing the fluid; and a particle outlet for providing the particles separated from the fluid. In this way, particles may be removed effectively from the fluid in the effluent stream without the need for an inconvenient electrostatic precipitator or other large particle separator. Instead, the apparatus provides for improved particle capture and removal within a smaller footprint. This provides for a more efficient and compact device.

A system and method in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid through an intake chamber into an expansion chamber and then through at least a portion of a waveform pattern present between at least two rotors and/or disks. In at least one embodiment, the waveform patterns include a plurality of hyperbolic waveforms axially aligned around a horizontal center of the system.

A system and method in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid through an intake chamber into an expansion chamber and then through at least a portion of a waveform pattern present between at least two rotors and/or disks. In at least one embodiment, the waveform patterns include a plurality of hyperbolic waveforms axially aligned around a horizontal center of the system.

A pair of waveform rotors and/or disks for use in a disk-pack turbine used, for example, in systems and methods in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid into an expansion chamber and then through at least a portion of a waveform pattern present between at least two rotors and/or disks. The rotors and/or disks having waveform patterns on at least one side.

A pair of waveform rotors and/or disks for use in a disk-pack turbine used, for example, in systems and methods in at least one embodiment for separating fluids including liquids and gases into subcomponents by passing the fluid into an expansion chamber and then through at least a portion of a waveform pattern present between at least two rotors and/or disks. The rotors and/or disks having waveform patterns on at least one side.

An abatement apparatus and method are disclosed. The abatement apparatus for treating an effluent stream from a semiconductor processing tool comprises: a first treatment stage operable to combust the effluent stream to provide a combusted effluent steam and to treat the combusted effluent stream with water to provide a first stage treated effluent stream comprising treated fluid together with combustion particles and water; and a second treatment stage operable to receive the first stage treated effluent stream at an inlet and to separate centrifugally at least some of the combustion particles and the water from the treated fluid which is provided at a treated fluid outlet as a second stage treated effluent stream. In this way, particles and water may be removed effectively from the combusted effluent stream without the need for an inconvenient electrostatic precipitator. Instead, the second treatment stage provides for improved particle capture within a smaller footprint. Also, utilising water helps to retain the particles separately from the treated fluid.