A gas treatment method includes: a process (a) of allowing gas to be treated in which a target substance to be treated is mixed with air to pass through inside a housing, the target substance to be treated exhibiting volatility at room temperature and belonging to at least one substance selected from a group consisting of carbon compounds, nitrogen compounds, and sulfur compounds; a process (b) of introducing ozone into a space through which the gas to be treated flows inside the housing at 200° C. or lower; a process (c) of stirring the gas to be treated after the process (b); and a process (d) of heating the gas to be treated to 300° C. or higher after executing the process (c).

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

The present disclosure provides an apparatus for trapping of a reaction by-product having a self regenerating function for a used inner collecting tower, and an object of the present disclosure is to provide the reaction by-product trapping apparatus configured such that the trapping apparatus positioned between a process chamber and a vacuum pump or between the vacuum pump and a scrubber stops operating during a semiconductor manufacturing process when a trapping reaction of trapping a reaction by-product reaches a saturated state during a trapping operation, and the trapping apparatus removes the reaction by-product produced in an inner collecting tower through a heating reaction, such that the inner collecting tower is regenerated to enable an additional trapping reaction to be performed.

Novel methods for pretreating a rare-gas-containing stream exiting an etch chamber followed by recovering the rare gas from the pre-treated, rare-gas containing stream are disclosed. More particularly, the invention relates to the pretreatment and recovery of a rare gas, such as xenon or krypton, from a nitrogen-based exhaust stream with specific gaseous impurities generated during an etch process that is performed as part of a semiconductor fabrication process.

A remedial pollution control system for treating volatile organic compounds that may include a vapor concentrator connected to a line that is laden with volatile organic compounds, the concentrator has an organic condensate output line and a vapor output line; a mixing chamber adapted to receive air provided from an air supply line, combustible fuel from an alternate fuel supply line, and a vapor stream from the vapor output line to produce a mixed fuel supplied to an internal combustion engine, a control mixing system with a controller for producing a proper air to fuel ratio in the mixed fuel supply, and power generated to operate other devices used to more efficiently abate volatile organic compounds and reduce greenhouse gas emissions.

A fluid delivery system for an exhaust aftertreatment system may include an outer housing, a pump, a filter assembly, an electric heating blanket, and a heater retention plate. The heater retention plate is shaped to correspond to the shapes of the pump and filter assembly. A lid of the outer housing contacts the heater retention plate and clamps the heating blanket between the heater retention plate and the pump and filter assembly so that the heating blanket takes the shapes of portions of the pump and filter assembly. The outer housing includes mounting flanges and reinforcement members extending from corresponding mounting flanges to corresponding sidewalls of the outer housing and forming a hollow space therebetween. The filter assembly includes compensation elements that contract in response to expansion of fluid within a pump housing due to freezing and expand in response to thawing of the fluid.

Sweep-based gas separation processes for reducing carbon dioxide emissions from gas-fired power plants. The invention involves at least two compression steps, a combustion step, a carbon dioxide capture step, a power generate step, and a sweep-based membrane separation step. One of the compression steps is used to produce a low-pressure, low-temperature compressed stream that is sent for treatment in the carbon dioxide capture step, thereby avoiding the need to expend large amounts of energy to cool an otherwise hot compressed stream from a typical compressor that produces a high-pressure stream, usually at 20-30 bar or more.

A water recovery device includes: an exhaust gas pipe that is connected to a combustion device; a water generation unit that generates water by cooling exhaust gas in the exhaust gas pipe to condense water vapor in the exhaust gas; and a water container that stores water generated by the water generation unit. The water generation unit includes: an acoustic-wave generator that generates acoustic waves by absorbing heat from the exhaust gas pipe and giving the heat to working fluid, which transmits acoustic waves by oscillating, to cause the working fluid to oscillate; a transmission pipe that is internally filled with the working fluid and transmits acoustic waves generated by the acoustic-wave generator; and a cold-heat generator that generates cold heat to supply the cold heat to the exhaust gas pipe by receiving acoustic waves transmitted through the transmission pipe and giving heat to the acoustic waves.

A low-humidity air supply device which supplies low-humidity air into a dry room includes an intake portion that is connected to an inside of the dry room and through which air in the dry room is taken in, a cooling unit that cools the air taken in through the intake portion, a dehumidification unit that dehumidifies the air cooled by the cooling unit, and a supply unit that is connected to the inside of the dry room and through which the air dehumidified by the dehumidification unit is supplied into the dry room, in which at least one of the intake portion, the cooling unit, the dehumidification unit, and the supply unit is composed of a duct having a box shape through which the air is able to pass, and the duct is a portion of a casing that constitutes an outermost layer of the low-humidity air supply device.

The present invention can separate waste gases according to whether they are corrosive or non-corrosive to perform pyrolysis treatment thereof individually, wherein powder fixed to a heating module and a chamber is removed to increase operation efficiency and equipment durability, and the collected powder can be externally discharged even during operation.