A coolant processing apparatus removes sludge from a coolant discharged from a machine tool. The coolant processing apparatus includes a first reservoir and a second reservoir provided in a tank for retaining the coolant. The first reservoir includes a flow path in which the discharged coolant flows, and a portion downstream of the flow path to retain the coolant such that the sludge remains in the first reservoir. The flow path has at least one bend to bend a flow of the coolant at least once in a horizontal direction. The second reservoir retains the coolant flowing out from the first reservoir. A boundary wall is provided between the first and second reservoirs, at a location downstream of the at least one bend of the flow path, and has such a height that allows a supernatant of the coolant in the first reservoir to flow into the second reservoir.

A trap system adapted to trap polyimide or other vapors exiting from a process chamber. The vapors are routed from the process chamber through a heated exit line at low pressure and then cooled, resulting in condensation at a selected location. The condensed vapors accumulate in a liquid trap. A method of condensing polymer vapors in vacuum exit lines of process chambers, where the flow which may have vaporized polymer vapor is cooled to enhance condensation at a chosen location. The liquid trap can be emptied and replaced, resulting in the removal of the condensed liquid. The chamber exit lines are protected from condensation build up.

A film forming apparatus according to an embodiment includes a reaction chamber; a first pipe having first end portion and second end portion, the first end portion being connected to the reaction chamber, the first pipe extending in a first direction, and having a first opening area in cross-section perpendicular to the first direction; a second pipe disposed such that the first pipe is provided between the reaction chamber and the second pipe, the second pipe having third end portion and fourth end portion, and the second pipe extending in a second direction different from the first direction; a narrow portion provided in the first pipe and having a second opening area smaller than the first opening area in cross-section perpendicular to the first direction; and a liquid storage portion located on an imaginary straight line extending from a center of the second end portion in the first direction.

The present application relates to the technical field of semiconductor manufacturing equipment, and provides a dust collection device. The dust collection device includes: an air inlet channel, a dust settling channel extending along a preset path, an airflow rotation channel surrounding the settling channel, an air outlet channel and a collection chamber, where one end of the airflow rotation channel is communicated with the dust settling channel, and the other end of the airflow rotation channel is communicated with the air outlet channel; an upstream end of the dust settling channel is communicated with the air inlet channel, and a downstream end of the dust settling channel is communicated with the collection chamber; and the height of the dust settling channel gradually decreases in an extension direction of the preset path. Dust in the airflow rotation channel can easily settle under the action of a centrifugal force when moving along the airflow rotation channel, and the other end of the airflow rotation channel is communicated with the air outlet channel to discharge air.

A method of supplying a processing solution includes shutting off a feed line supplying the processing solution to a chemical filter, installing a dry chemical filter in a filter housing of the chemical filter, closing an output line from the filter housing to a nozzle configured to dispense the processing solution (either before or after installing the dry chemical filter), applying a vacuum to the filter housing while the feed line remains shut, and opening the feed line while locking in the vacuum within the filter housing. Shutting off the feed line and closing the output line may be accomplished by closing respective valves. Before installing the dry filter, a valve to the vacuum may be closed. The method may be performed by a processor executing a program stored in a non-transitory computer-readable medium.

Provided is a dust collection method using a dust collection device. The dust collection device includes: a main body provided in a tubular shape; an exhaust tube provided so as to extend outside from midstream inside the main body through one end of the main body, the exhaust tube cooperating with a suction device to suck air inside the main body; a supply nozzle for supplying a liquid to inside of the main body; a recovery unit for recovering the liquid from the main body; and a pump for returning the liquid from the recovery unit to the supply nozzle. The dust collection method includes: a step of forming a rotating airflow by means of suction with the suction device, the rotating airflow progressing while spiraling along an inner wall surface of the main body; a step of supplying the liquid from the supply nozzle; a step of spreading out the liquid with the rotating airflow on the inner wall surface thereby to continuously form a liquid catcher, the liquid catcher rotating as a film of the liquid; and a step of separating smoke and/or dust to outside by centrifugal force due to the rotating airflow and capturing the smoke and/or dust with the liquid catcher, the smoke and/or dust being contained in air introduced to the inside of the main body.

An oil-water separation device that efficiently separates and discharges oil from a mixed liquid includes a first chamber and a second chamber separated in a separation container, a first discharge port and a second discharge port formed in the first chamber and the second chamber, respectively, on a side surface of the separation container, a partition plate configured to separate the first chamber and the second chamber, the partition plate including a lower partition plate erected on a bottom surface of the separation container and an upper partition plate including a guide section that inclines from the first chamber toward the second chamber above the lower partition plate, and a communication section between the lower partition plate and the upper partition plate configured to connect the first chamber and the second chamber to each other.

A method for recycling and filtering rolling oil implemented for a rolling mill M requiring a rolling oil nominal flow rate comprised between 4000 l/min and 30000 l/min in an oil recycling and filtering plant having a circuit including, successively, according to the flow direction of the oil: a dirty oil tank, collecting the rolling oils coming from the rolling mill, a filtering system including several oil filtering devices configured to perform an oil filtering in parallel, a clean oil tank from which the rolling mill is fed with rolling oil at the nominal flow rate. The unclogged muds undergo a secondary treatment by continuous and turbulence-free decantation, thanks to a feed-in of the decanter with mud regulated by a pump.

Provided is an easy and clean processing machine. The processing machine includes a processing chamber having a discharge port; a tank having an inflow port with a gap from the discharge port; a drawer to be stowed in the processing chamber and pulled out rearward from the processing chamber, the drawer including a front plate, a pair of side plates, and a bottom plate including a filter disposed in a front portion, a guide including a stopper; and a slider including a latch portion to collide with the stopper to stop the drawer at an intermediate position. The discharge port is located above the bottom plate, and the filter is located above the inflow port when the drawer is located at the intermediate position.

A mobile system and method for separating lubricants from swarf material streams provides on-site recovery of lubricants in an efficient, effective, sustainable and economic manner. The system thus reduces the need to transport relatively large volumes of swarf and lubricant material stream to a remote location for disposal. The system includes swarf of various types, for example, aluminum, steel, precious metals, plastic, etc. mixed with various water based or oil based lubricants. A trailer or motor vehicle containing a power supply, a basket centrifuge(s) connected to the power supply for powered operation thereof, a live bottom conveyor for supplying swarf to the centrifuges, a portable feed hopper with attached augers for supplying swarf to the live bottom conveyor, a bag liner to filter the extracted lubricant as it exits the basket, a crane for lifting the bag liner out of the basket, a container to accumulate the dried swarf, a container to accumulate the extracted lubricant.