The invention includes a gas supplier for discharging a gas into a space sandwiched between a substrate and a shielding plate by supplying the gas to a gas discharge nozzle provided in the shielding plate to form a flow of the gas from a central part toward a radially outer side of the substrate. This gas supplier is controlled such that a flow velocity of the gas into a discharge space at a peripheral edge part of the substrate becomes larger than zero.

In processing a peripheral edge part of a substrate by a processing liquid, upward scattered liquid droplets may be produced. Accordingly, in the invention, the processing liquid is caused to land on the peripheral edge part of the substrate from a discharge port while the discharge port is positioned to a bevel processing position lower than an eaves part of a cup in a vertical direction with the peripheral edge part of the substrate covered vertically from above by the eaves part. Thus, the eaves part collects upward scattered liquid droplets. As a result, the re-adhesion of the upward scattered liquid droplets to the substrate and the scattering thereof to a surrounding atmosphere are suppressed.

The invention includes an upper sealing member fixed near a ceiling wall of a processing chamber and a lower sealing member provided movably in a vertical direction below the upper sealing member. A sealed space is formed by moving down the lower sealing member to a lower limit position where an upper end part of the lower sealing member is aligned or partially overlapped with a lower end part of the upper sealing member in the vertical direction. On the other hand, a conveyance space for carrying the substrate to and from a substrate holder is formed by moving up the lower sealing member to a retracted position above the lower limit position.

A blower includes a main body which includes a housing and a fan disposed in the housing. The housing further defines an air discharge opening. The blower further includes an extension tube connected to the air discharge opening, the extension tube extending between a first end connected to the air discharge opening and a second end. The blower further includes a variable nozzle, the variable nozzle including a plurality of adjustable air control surfaces. The blower further includes a nozzle adjustment tube connected to the second end of the extension tube and at least partially surrounding the variable nozzle.

A foreign matter removal device (1) is configured to remove foreign matters on a lens (101) of an in-vehicle camera (100) attached to a vehicle so that the lens (101) of the in-vehicle camera (100) is exposed toward an outside of a body panel of the vehicle. The foreign matter removal device includes a single-cylinder type reciprocating pump (5) configured to generate high-pressure air and a nozzle (22) configured to inject the high-pressure air toward the lens (101). A volume of an internal space of the pump is 10 cm.sup.3 or less. Exhaust time (t1) per cycle required for exhausting the air in the internal space is 0.03 seconds or less.

A gas blowoff nozzle includes: a casing including a gas blowoff face that blows off gas; a gas supply port provided to one end of the casing and supplying gas along the longitudinal direction of the nozzle; and a pressure equalizing chamber communicating with the gas supply port and the gas blowoff face, and including a partition plate including a plurality of tubular bodies having orifices on both ends. In each of the tubular bodies, an angle θ that a wall surface on a side closer to the gas supply port forms with the partition plate is 55° to 120° as an interior angle in a sectional shape of each of the tubular bodies. A gas circulation hole is provided on a face of each of the tubular bodies that comes into contact with the partition plate, the gas circulation hole passing through the face and the partition plate.

A flow restrictor nozzle for a pressurized vessel of a nuclear reactor may comprise a nozzle body including an inlet face and an outlet face. The nozzle body may define a plurality of internal flow paths extending from the inlet face to the outlet face. Each of the plurality of internal flow paths may include a convergent section, a throat section, and a divergent section.

Implementations are described for maintaining helium/air mixture within a tube in an evacuated tube transportation system. A first implementation includes a set of helium tanks uniformly fitted along the tube length, where helium is injected with controlled valves that open or close to maintain the desired level of helium. An operations control center (OCC) receives helium concentration levels in the tube and instructs a controller in the tube to release helium into the tube when detected levels of helium is lower than the desired level of helium. Another implementation is described where a capsule traversing the tube may have a source of helium gas that can be released into the tube. A hybrid approach is also described where helium can be released from a source within the tube and from another source within the capsule.

A gas nozzle according to the present disclosure includes a supply hole having a tubular shape and configured to guide a gas and an injection hole connecting to the supply hole. The gas nozzle configured to inject the gas from the injection hole is made from ceramics or single crystal including an oxide, a fluoride, or an oxyfluoride of a rare earth element or an yttrium aluminum composite oxide as a primary component. An arithmetic mean roughness Ra of an inner circumferential surface forming the supply hole is smaller on an outflow side than on an inflow side of the gas.

A slit nozzle having a double-tube structure and a method for manufacturing a high-silicon steel strip having a small variation in Si concentration depending on the position in the width direction of the steel strip. The slit nozzle has a double-tube structure, in which a flow-control plate which closes a gap between an inner tube and an outer tube is disposed between an open end of the inner tube and an end of a delivery port, and in which an opening is formed in a plane in which the flow-control plate is disposed only in a range of the flow-control plate of 27.5° or more and 332.5° or less in terms of a central angle with respect to a reference line L1 passing through the axis of the outer tube and the central position in the width direction of the delivery port.