A substrate processing method includes a first processing liquid supplying step of supplying a first processing liquid to an upper surface of the substrate, a holding layer forming step of solidifying or curing the first processing liquid to form a particle holding layer on the upper surface of the substrate, a holding layer removing step of peeling and removing the particle holding layer from the upper surface of the substrate, a liquid film forming step of forming, after removing the particle holding layer from the substrate, a liquid film of the second processing liquid, a solidifying step of cooling the liquid film to a temperature not more than a melting point of the sublimable substance to make the liquid film solidify on the substrate and form a solid film, and a sublimating step of sublimating and thereby removing the solid film from the substrate.

A coating system (1) is provided which includes an ultrasonic sprayer (3) capable of spraying a coating fluid onto a target surface (5). A convective or infrared heater (21) is associated with the sprayer and is operable to heat the spray (23) produced by the sprayer (3).

A coating system (1) is provided which includes an ultrasonic sprayer (3) capable of spraying a coating fluid onto a target surface (5). A convective or infrared heater (21) is associated with the sprayer and is operable to heat the spray (23) produced by the sprayer (3).

An apparatus, according to an exemplary aspect of the present disclosure includes, among other things, a housing and a plunger moveable between a retracted position within the housing and an extended position to spray fluid on a vehicle component. A heater is mounted for movement with the plunger. A method according to an exemplary aspect of the present disclosure includes, among other things, molding a heater element and a body having an internal channel extending between a fluid inlet and a fluid outlet together to form a plunger configured to spray fluid out of the fluid outlet.

The invention relates to a humidifier configured to humidify an aerosol, the humidifier comprising a first water compartment (100) containing water used to humidify the aerosol; a second water compartment (300) containing water used to humidify the aerosol; an intermediate chamber (200) located between the first and the second water compartment (100, 300), the intermediate chamber (200) comprising an aerosol inlet (210) and an aerosol outlet (220) and providing first boundary surfaces of a passageway (230) through which the aerosol to be humidified passes; a first layer (10) permeable to water vapour and impermeable to liquid water, which is located between the first water compartment (100) and the intermediate chamber (200), wherein a section of the first layer provides a second boundary surface of the passageway; a second layer (20) permeable to water vapour and impermeable to liquid water, which is located between the second water compartment (300) and the intermediate chamber (200), wherein a section of the second layer provides a third boundary surface of the passageway (230) opposed to the second boundary surface.

The invention relates to a humidifier configured to humidify an aerosol, the humidifier comprising a first water compartment (100) containing water used to humidify the aerosol; a second water compartment (300) containing water used to humidify the aerosol; an intermediate chamber (200) located between the first and the second water compartment (100, 300), the intermediate chamber (200) comprising an aerosol inlet (210) and an aerosol outlet (220) and providing first boundary surfaces of a passageway (230) through which the aerosol to be humidified passes; a first layer (10) permeable to water vapour and impermeable to liquid water, which is located between the first water compartment (100) and the intermediate chamber (200), wherein a section of the first layer provides a second boundary surface of the passageway; a second layer (20) permeable to water vapour and impermeable to liquid water, which is located between the second water compartment (300) and the intermediate chamber (200), wherein a section of the second layer provides a third boundary surface of the passageway (230) opposed to the second boundary surface.

A pulsed waterjet apparatus includes a water pump for generating a pressurized waterjet, an ultrasonic signal generator for generating an ultrasonic signal and an ultrasonic nozzle that includes an ultrasonic transducer for converting the ultrasonic signal into vibrations that pulse the pressurized waterjet to generate a pulsed waterjet, an exit orifice through which the pulsed waterjet exits, and an inflow inlet axially aligned with the exit orifice.

A pulsed waterjet apparatus includes a water pump for generating a pressurized waterjet, an ultrasonic signal generator for generating an ultrasonic signal and an ultrasonic nozzle that includes an ultrasonic transducer for converting the ultrasonic signal into vibrations that pulse the pressurized waterjet to generate a pulsed waterjet, an exit orifice through which the pulsed waterjet exits, and an inflow inlet axially aligned with the exit orifice.

This exchanger (100) includes: substantially parallel and vertical membranes (30), permeable to vapor and impermeable to a liquid, these membranes delimiting zones, each of said zones belonging alternately to a first type of zone and to a second type of zone; the zones of said first type including in the upper portion a spray nozzle (20) configured to vaporize a liquid along a plane (R) substantially parallel to the membranes, and in the lower portion a first collector (50), independent and separated from the zones of the second type, a first pipe (10) supplying the spray nozzles (20) of the zones (Z20) of said first type with a liquid.

This exchanger (100) includes: substantially parallel and vertical membranes (30), permeable to vapor and impermeable to a liquid, these membranes delimiting zones, each of said zones belonging alternately to a first type of zone and to a second type of zone; the zones of said first type including in the upper portion a spray nozzle (20) configured to vaporize a liquid along a plane (R) substantially parallel to the membranes, and in the lower portion a first collector (50), independent and separated from the zones of the second type, a first pipe (10) supplying the spray nozzles (20) of the zones (Z20) of said first type with a liquid.