The present disclosure describes material surface treatment systems and methods for grafting a coded substance (e.g., a molecular code) to a material through a surface treatment process. In some examples, the material is subjected to a plasma discharge containing the molecular code, which is grafted onto the material at the molecular level thereby having little or no impact on the properties of the treated material.

A device for holding a plurality of workpieces, which each include a circumferential wall structure surrounding an interior, includes a plurality of rotatable holding elements for holding the workpieces. The holding elements are configured to secure the workpieces. The workpieces can be stents and the method of coating can be deposition, particularly plasma enhanced chemical vapor deposition. The holding elements can include at least one connecting element which facilitates electrical charging of the holding elements and hence workpieces when connected to the holding elements by being connected to a charging unit.

Introduced here is a plasma polymerization apparatus. Example embodiments include a reaction chamber in a shape substantially symmetrical to a central axis. Some examples further include a rotation rack in the reaction chamber. The rotation rack may be operable to rotate relative to the reaction chamber about the central axis of the reaction chamber. Examples may further include reactive species discharge mechanisms positioned around a perimeter of the reaction chamber and configured to disperse reactive species into the reaction chamber in a substantially symmetrical manner from the outer perimeter of the reaction chamber toward the central axis of the reaction chamber, such that the reactive species form a polymeric coating on surfaces of the one or more substrates during said dispersion of the reactive species, and a collecting tube positioned along the central axis of the reaction chamber and having an air pressure lower than the reaction chamber.

The invention relates to a pro-biofilm coating applied by means of cold atmospheric plasma polymerization of a precursor on a substrate. The coating has a roughness such that it promotes the creation of more than 100% biofilm on the substrate, where the 100% of biofilm is the one as produced on the same substrate being devoid of said pro-biofilm coating. The invention also relates to a method of producing said pro-biofilm coating and a substrate coated with same.

Methods of modifying medical devices and medical devices are disclosed. One embodiment of a method of modifying a medical device includes functionalizing a surface of the medical device using cold plasma. One embodiment of a medical device is obtained by a method of modifying a device that includes functionalizing a surface of the medical device using cold plasma.

A method includes using a sealing element to dynamically seal a sealing body in the presence of a lubricant. The sealing element has an elastomeric base body and a plasma coating. The coating includes the elements carbon, oxygen, silicon, and hydrogen. The coating has the following properties at least at the surface: the amount ratio C:Si (at %/at %) is >5, the amount ratio O:Si (at %/at %) is >3, and the surface energy is <50 mN/m. In an embodiment, the coating includes the element fluorine.

A substrate processing method includes forming a pre-coat film on an in-chamber part disposed in a chamber, and subsequently processing one or more substrates. The forming a pre-coat film includes forming a first film on the in-chamber part without using plasma or by using a first plasma generated under a condition that sputtering is suppressed on the in-chamber part, and forming a second film on a surface of the first film by using a second plasma.

The present invention discloses an organic polymer film and a manufacturing method thereof. The organic polymer film is mainly manufactured by the following steps. Firstly, the step (A) provides a xylene precursor and a substrate, and the step (B) places the substrate inside of a plasma equipment. After that, the step (C) evacuates the plasma equipment while introducing a carrier gas which carries vapor of the xylene precursor, and the step (D) turns on a pulse power supply system of the plasma equipment, generating a short pulse for plasma ignition. Finally, the step (E) forms the organic polymer film on the substrate. In the aforementioned steps, the frequency of the short pulse plasma is between 1 Hz˜10,000 Hz, and the pulse period of the short pulse plasma is between 1 μs˜60 μs.

Methods and apparatus for preparing a protective coating are described. In one example aspect, an apparatus for preparing a protective coating includes a chamber, a substrate positioned within the chamber configured to hold at least a target object, an inlet pipe configured to direct a monomer vapor into the chamber, and one or more electrodes configured to perform a chemical vapor deposition process to produce a multi-layer coating. The chemical vapor deposition process comprises multiple cycles, each cycle comprising a pretreatment phase and a coating phase to produce a layer of the multi-layer coating.

Examples of a susceptor for supporting a substrate includes a base metal formed of aluminum or a material containing aluminum, an anodized layer covering a surface of the base metal and having cracks therein, and a CF coating of polymer provided in the cracks such that the exposure of the base metal is avoided.