Cleaning articles including a heat engine incorporated therein. The cleaning article may include a substrate (e.g., a non-woven wipe) including one or more layers. The heat engine may be in the wipe or pad, and includes a reactive metal oxide which upon contact with water, reacts to produce heat. The cleaning article may thus produce water vapor and/or steam upon activation of the heat engine. A venting structure may be provided adjacent to or surrounding the heat engine that includes an impermeable material (e.g., impermeable to water and/or air or other gas), which includes one or more vents through the impermeable material. The venting structure directs water vapor and/or steam to a desired face of the cleaning article, away from the user. A heat barrier layer may insulate a user's hand from the generated heat, and/or a handle may be attachable to the pad.

A cleaning device is provided that includes a housing, a cleaning head, a flexible pouch, a cleaning element, and a spray nozzle. The housing defines an internal cavity having a power source in selective electrical communication with a pump. The flexible pouch is removably stored in the housing and includes a cleaning fluid therein. The pouch forms a fluid and air tight connection with an inlet of the pump. The cleaning element is connected to the cleaning head and has a first spray opening. The spray nozzle is in fluid communication with an outlet of the pump. The spray nozzle is positioned on the cleaning head so as to spray the cleaning fluid from the flexible pouch through the first opening onto a surface being cleaned.

Disclosed are various systems that allow for plasma delivery from a central location in a multi-station processing chamber to be redirected to different processing stations within the chamber. Such systems may include a deflector plate that is mounted to a wafer indexer such that the deflector plate is centered on the wafer indexer. In other implementations, such systems may include a deflector plate that is mounted in a fixed relationship with a ceiling of the processing chamber.

Disclosed are various systems that allow for plasma delivery from a central location in a multi-station processing chamber to be redirected to different processing stations within the chamber. Such systems may include a deflector plate that is mounted to a wafer indexer such that the deflector plate is centered on the wafer indexer. In other implementations, such systems may include a deflector plate that is mounted in a fixed relationship with a ceiling of the processing chamber.

A substrate processing apparatus includes a processor configured to process a substrate with a processing liquid. The processor has a holder configured to hold the substrate horizontally. The holder includes a first holder configured to come into contact with a center of a bottom surface of the substrate. The processor has a rotation driver configured to rotate the first holder around a vertical rotation axis. The substrate processing apparatus includes a charging member configured to charge a second substrate prepared separately from the substrate; and a controller configured to perform bringing the second substrate charged by the charging member into contact with the first holder.

A substrate processing apparatus includes a processor configured to process a substrate with a processing liquid. The processor has a holder configured to hold the substrate horizontally. The holder includes a first holder configured to come into contact with a center of a bottom surface of the substrate. The processor has a rotation driver configured to rotate the first holder around a vertical rotation axis. The substrate processing apparatus includes a charging member configured to charge a second substrate prepared separately from the substrate; and a controller configured to perform bringing the second substrate charged by the charging member into contact with the first holder.

A system for cleaning, rinsing, drying, and polishing a vehicle surface having a robotic arm, a brush, a control system, wireless communication circuitry, and an electrical power source where the brush is mounted on the robotic arm, and the robotic arm is mounted on a vehicle and articulates about multiple axes and moves the brush over the vehicle surface, and the motor spins the brush, the movements based on a coordinate data set transmitted to the control system for operation on a specific vehicle type, make and model.

An automated maintenance system for solar components is disclosed. The system includes a condensate reservoir, a wiping element, a motor, and a fluid delivery element. The fluid delivery element is configured to transport a fluid from the condensate reservoir to a solar component, and the motor is configured to operate the wiping element via a controller. The system is designed to clean solar components automatically, without the need for manual intervention. The system is efficient, cost-effective, and environmentally friendly.

An automated maintenance system for solar components is disclosed. The system includes a condensate reservoir, a wiping element, a motor, and a fluid delivery element. The fluid delivery element is configured to transport a fluid from the condensate reservoir to a solar component, and the motor is configured to operate the wiping element via a controller. The system is designed to clean solar components automatically, without the need for manual intervention. The system is efficient, cost-effective, and environmentally friendly.