An apparatus and method for cleaning milking stalls on a platform of a rotary parlour. The rotary parlour includes a robotic manipulation device configured to perform a primary task; a holding device configured to hold the end portion of the hose member in a predetermined parking position, and a control unit. When it is time to clean a milking stall on the platform, the control unit activates the robotic manipulation device such that, instead of performing a primary task, the robotic manipulation device performs an additional task in which the robotic manipulation device grips the end portion of a hose member and moves the end portion from a parking position to a number of cleaning positions from which liquid jets are sprayed from the outlet opening of the end portion against predetermined surfaces to be cleaned in the milking stall.

A device for handling substrates within a semiconductor manufacturing plant having substrate processing equipments, substrate storage means, substrate transport means, and a manufacturing execution system (MES) functionally related with the substrate processing equipments, the substrate storage means and the substrate transport means, including at least one substrate storage and transport box that is transported by the transport means and stored in the storage means; at least one gas analysis device of the gases forming the internal atmosphere of the substrate storage and transport box, which produces analysis signals representative of the quantity of the critical gas that is likely to generate molecular contamination, which is present in the storage and transport box; and an execution device which pilots the transport means and the storage means, with the execution device comprising instructions for detecting a molecular decontamination need as a function of analysis signals emitted by the gas analysis device.

A substrate processing apparatus includes a driving magnet that is disposed correspondingly to a movable pin and that has a predetermined polar direction with respect to a radial direction of a rotary table, a pressing magnet that has a magnetic pole that gives an attractive magnetic force or a repulsive magnetic force between the driving magnet and the pressing magnet and that presses a support portion against a peripheral edge of a substrate by urging the support portion toward a contact position by means of the attractive magnetic force or the repulsive magnetic force, and a pressing-force changing unit that changes a magnitude of a pressing force against the peripheral edge of the substrate pressed by the support portion while keeping the magnitude higher than zero in response to rotation of the rotary table.

A substrate processing apparatus includes a driving magnet that is disposed correspondingly to a movable pin and that has a predetermined polar direction with respect to a radial direction of a rotary table, a pressing magnet that has a magnetic pole that gives an attractive magnetic force or a repulsive magnetic force between the driving magnet and the pressing magnet and that presses a support portion against a peripheral edge of a substrate by urging the support portion toward a contact position by means of the attractive magnetic force or the repulsive magnetic force, and a pressing-force changing unit that changes a magnitude of a pressing force against the peripheral edge of the substrate pressed by the support portion while keeping the magnitude higher than zero in response to rotation of the rotary table.

A method of controlling an automatic cleaner in which the automatic cleaner is moved with a side brush assembly in a first operation type, a corner is determined during the movement of the automatic cleaner, the first operation type of the side brush assembly is changed to a second operation type to clean the corner when the corner is determined, whether the corner is cleaned is determined, and the second operation type of the side brush assembly is returned to the first operation type when the corner is cleaned.

A substrate dry cleaning apparatus, a substrate dry cleaning system, and a method of cleaning a substrate are disclosed. The substrate dry cleaning system includes a substrate support and a reactive species generator. The reactive species generator includes a first conduit defining a first flow channel that extends to an outlet of the first conduit, the outlet of the first conduit facing the substrate support, a first electrode, a second electrode facing the first electrode, the first flow channel disposed between the first electrode and the second electrode, a first inert wall disposed between the first electrode and the first flow channel, and a second inert wall disposed between the second electrode and the first flow channel.

A substrate dry cleaning apparatus, a substrate dry cleaning system, and a method of cleaning a substrate are disclosed. The substrate dry cleaning system includes a substrate support and a reactive species generator. The reactive species generator includes a first conduit defining a first flow channel that extends to an outlet of the first conduit, the outlet of the first conduit facing the substrate support, a first electrode, a second electrode facing the first electrode, the first flow channel disposed between the first electrode and the second electrode, a first inert wall disposed between the first electrode and the first flow channel, and a second inert wall disposed between the second electrode and the first flow channel.

The present invention provides a metal cavity inwall decoking method, comprising: a. Process sealed compression to the metal cavity; b. Process rapid decompression to the metal cavity.

The present invention makes such substance as hydrocarbon volatiles, moisture and so on inside the coke gasify quickly because of fierce change of pressure differential by compressing and then decompressing the metal cavity rapidly, which makes the coke crush and fall off from the inwall of metal cavity and finally finish the decoking work. The decoking method claimed in the present invention is simply and convenient to operate, and can greatly increase the decoking efficiency.

The present invention provides a metal cavity inwall decoking method, comprising: a. Process sealed compression to the metal cavity; b. Process rapid decompression to the metal cavity.

The present invention makes such substance as hydrocarbon volatiles, moisture and so on inside the coke gasify quickly because of fierce change of pressure differential by compressing and then decompressing the metal cavity rapidly, which makes the coke crush and fall off from the inwall of metal cavity and finally finish the decoking work. The decoking method claimed in the present invention is simply and convenient to operate, and can greatly increase the decoking efficiency.

The present invention includes a device cleaner, and method of use, for cleaning a device port, particularly a medical device port, that may be inserted into the device port cleaner for cleaning and/or disinfecting.