Methods and apparatus for reducing the formation of insoluble deposits in semiconductor electrochemical plating equipment or a surface thereof during electrochemical plating, including: removing electrochemical plating equipment or a surface thereof from an electroplating solution, wherein residual electroplating solution is disposed atop the electrochemical plating equipment or a surface thereof, and wherein the residual electroplating solution has a first pH; contacting the residual electroplating solution with a rinse agent having a second pH similar to the first pH to form a rinsate; and removing the rinsate from the electrochemical plating equipment or a surface thereof.

Method that allows surfaces in interior spaces or technical equipments to be cleaned, characterised in that it comprises at least the following step: —the targeted atomization on the surfaces of a liquid with spores of benign bacteria on all or certain types of surfaces by means of an electrically and/or pneumatically powered atomizer, while the space remains accessible to people and animals, with the purpose of speeding up the cleaning of interior spaces and of technical equipments, lowering the cleaning frequency, and lowering the dust deposit.

Method that allows surfaces in interior spaces or technical equipments to be cleaned, characterised in that it comprises at least the following step: —the targeted atomization on the surfaces of a liquid with spores of benign bacteria on all or certain types of surfaces by means of an electrically and/or pneumatically powered atomizer, while the space remains accessible to people and animals, with the purpose of speeding up the cleaning of interior spaces and of technical equipments, lowering the cleaning frequency, and lowering the dust deposit.

A turbine engine including a stationary component having a probe opening, a plurality of rotor blades rotatable relative to the stationary component, and a sensor assembly disposed within the probe opening. The sensor assembly includes a sensor and a shutter mechanism having a shutter frame with a sensing window and at least one leaf member coupled to the shutter frame. The sensor assembly includes an actuator including a rotatable member having a receiving slot and a stator having a stopper member within the receiving slot. The rotatable member rotates relative to the stator over a range of motion defined relative to the stopper member, and the rotatable member is coupled to the at least one leaf member such that rotating the rotatable member in a first direction uncovers the sensing window, and such that counter-rotating the rotatable member in a second direction covers the sensing window with the at least one leaf member. Selectively covering the sensor when not in use protects the sensor from exposure to harsh conditions, extending its operative life.

The invention relates to a paper making machine (1) comprising a forming section (2) in which a fibrous web (W) can be formed, a drying section (5) in which a formed fibrous web (W) can be dried; and a reel-up (11) on which a dried fibrous web (W) can be wound into a roll (12). The paper making machine (1) is arranged to carry a fibrous web (W) in the machine direction (MD) along a predetermined path (P) and the paper making machine (1) has at least one water jet cutting device (17, 18, 19) arranged to cut the fibrous web (W) that is moving in the machine direction (MD) such that the fibrous web (W) is divided into at least one waste part (23a, 23b, 30) and a remaining part (24, 29). The paper making machine (1) is arranged to direct the at least one waste part (23a, 23b, 30) away from the predetermined path (P) and to convey the remaining part (24, 29) further in the machine direction (MD) along the predetermined path (P). The paper making machine (1) further comprises a blowing device (20, 21, 22) arranged to blow gas or air against the water jet cutting device (17, 18, 19) in a direction toward the remaining part of the fibrous web (24, 29) such that fiber particles that have been released by the cutting action of the water jet cutting device (17, 18, 19) are blown onto the surface (25) of the remaining part (24, 29) of the fibrous web (W) and follow the remaining part (24, 29) of the fibrous web along the predetermined path (P). The invention also relates to a method in which gas or air is blown in a direction toward the remaining part of the web such that fiber particles that have been released by the cutting action of the water jet cutting device (17, 18, 19) are blown onto the surface (25) of the remaining part (24, 29) of the fibrous web (W). The stream of air or gas is given a shape which is circular cylindrical or conical and expanding in the direction in which the stream moves.

The invention relates to a paper making machine (1) comprising a forming section (2) in which a fibrous web (W) can be formed, a drying section (5) in which a formed fibrous web (W) can be dried; and a reel-up (11) on which a dried fibrous web (W) can be wound into a roll (12). The paper making machine (1) is arranged to carry a fibrous web (W) in the machine direction (MD) along a predetermined path (P) and the paper making machine (1) has at least one water jet cutting device (17, 18, 19) arranged to cut the fibrous web (W) that is moving in the machine direction (MD) such that the fibrous web (W) is divided into at least one waste part (23a, 23b, 30) and a remaining part (24, 29). The paper making machine (1) is arranged to direct the at least one waste part (23a, 23b, 30) away from the predetermined path (P) and to convey the remaining part (24, 29) further in the machine direction (MD) along the predetermined path (P). The paper making machine (1) further comprises a blowing device (20, 21, 22) arranged to blow gas or air against the water jet cutting device (17, 18, 19) in a direction toward the remaining part of the fibrous web (24, 29) such that fiber particles that have been released by the cutting action of the water jet cutting device (17, 18, 19) are blown onto the surface (25) of the remaining part (24, 29) of the fibrous web (W) and follow the remaining part (24, 29) of the fibrous web along the predetermined path (P). The invention also relates to a method in which gas or air is blown in a direction toward the remaining part of the web such that fiber particles that have been released by the cutting action of the water jet cutting device (17, 18, 19) are blown onto the surface (25) of the remaining part (24, 29) of the fibrous web (W). The stream of air or gas is given a shape which is circular cylindrical or conical and expanding in the direction in which the stream moves.

The invention provides a light guide element comprising a light guide and a layer element, wherein the light guide comprises a light guide face and wherein the layer element comprises an optical layer, wherein said optical layer is in contact with at least part of the light guide face, wherein the optical layer has a first index of refraction (n1) smaller than the refractive index of seawater, wherein the light guide comprises a UV radiation transmissive light guide material.

Provided is a load port apparatus including: a mounting unit on which a pod housing a housed object is mounted; a frame portion provided to stand adjacent to the mounting unit and having a frame opening to which a main opening of the pod is connected; a door engageable with a lid for the main opening of the pod for opening and closing the frame opening and the main opening; a door drive mechanism which drives the door; an inner gas exhaust unit provided below an inner side of the frame opening to exhaust a gas from an inside of a mini environment connected to the pod through the main opening and the frame opening; and a corrosive gas detection sensor arranged between the frame opening and the inner gas exhaust unit or in an exhaust flow path of the inner gas exhaust unit.

Provided is a load port apparatus including: a mounting unit on which a pod housing a housed object is mounted; a frame portion provided to stand adjacent to the mounting unit and having a frame opening to which a main opening of the pod is connected; a door engageable with a lid for the main opening of the pod for opening and closing the frame opening and the main opening; a door drive mechanism which drives the door; an inner gas exhaust unit provided below an inner side of the frame opening to exhaust a gas from an inside of a mini environment connected to the pod through the main opening and the frame opening; and a corrosive gas detection sensor arranged between the frame opening and the inner gas exhaust unit or in an exhaust flow path of the inner gas exhaust unit.

Method comprising: supplying electricity to at least one wave transducer (25) for synthesising an ultrasonic surface wave propagating in a medium (10) to a body (15) arranged on one side of the medium, at least one portion of the electrical supply energy being converted into heat by the transducer, the electrical energy supplied to the transducer being sufficient for the heat and the energy of the ultrasonic surface wave to cause: —the body to melt when the body is in the solid state, and/or—the body to be maintained in the liquid state when the temperature of the medium is below the solidification temperature of the body.