Embodiments disclosed herein generally relate to a system, method, and apparatus for controlling substrate outgassing such that hazardous gasses are eliminated from a surface of a substrate after a III-V epitaxial growth process or an etch clean process, and prior to additional processing. An oxygen containing gas is flowed to a substrate in a load lock chamber, and subsequently a non-reactive gas is flowed to the substrate in the load lock chamber. As such, hazardous gases and outgassing residuals are decreased and/or removed from the substrate such that further processing may be performed.

A fluid dispensing device (100) for controlling the atmosphere of a work zone (20) has a first connection stage (103), which is provided with an intake chamber (105), intended to receive the incoming fluid (101) and an evacuation chamber (106) intended to collect the outgoing fluid (102) and separated from the intake chamber (105) by a first partitioning structure (110), then a second dispensing stage (104), which comprises, according to an alternation of injection angular segments (A111) and of extraction angular segments (A112) defined by a second partitioning structure (114), a plurality of injection cells (111) which communicate with the intake chamber (105) and which are coupled respectively to several injection points (46) provided in the work zone (20), and plurality of extraction cells (112) which communicate with the evacuation chamber (106) and which are coupled respectively to several extraction points (47) provided in the work zone (20).

A sensor-based motion control fugitive dust suppression system comprises: a laser pointer provided on a frame to conduct a setting operation such that directions of a plurality of mist spray injection nozzles provided on a blast pipe located inside the frame correspond to the front end of a chisel of a hydraulic breaker; a data logger for collecting, from a sensor provided at the crushing apparatus, location source information for a hitting impact point of the hitting part; a location information processing unit analyzing the location source information collected from the data logger so as to generate the location information on the hitting impact point of the hitting part; and a system control unit for outputting a control signal so as to control a driving unit rotating the blast pipe in a vertical or horizontal direction, according to the location source information.

The invention relates to a flow cabinet system for cleaning at least one object, the system comprising: a cabinet having walls enclosing a volume; tubing for the supply of compressed gas as well as a plurality of handheld cleaning tools within the volume for removing, by means of the supplied compressed gas, powder from the at least one object; and an extraction unit comprising tubing for extracting powder-laden gas from the volume through a gas outlet located near one of the left and right side walls and the back wall.

The cabinet further comprises a gas inlet in the back wall near the other of the left and right side walls and the back wall so as to define an overall flow that is substantially horizontal and transverse to the operator.

An open fume capture and exhaust work station for a laboratory classroom having an air exhaust system that provides unobstructed sight lines for students at the station of the other students and of a classroom instructor. The work station includes an upper table surface providing a plurality of individual work surfaces, a fume extractor extending upwardly from a middle portion of the table surface to an elevation below the student sight lines, a pair of elongated air outlet openings adjacent to opposed sides of the table for directing fan generated opposed airflows to the extractor which defines opposed upstanding air inlet faces and communicates those faces with the air exhaust system creating a pressure drop within the extractor that captures the opposed inwardly airflows and pull the airflows over the individual work surfaces and into said extractor, capturing and removing emissions from spills and experiments on those work surfaces.

The present invention relates to a method of cleaning relays. The method includes: a loading step by placing a relay on a feeding platform of a machine and directing a laser processing head of the machine to allow emission of laser light towards the relay; and a surface treatment step by activating the laser processing head to perform laser surface treatment on a portion of the relay to be treated. The present invention provides operators with a fast, time-saving, and efficient method for processing a large number of relays requiring surface treatment. It aims to improve upon the conventional electrolytic surface treatment techniques that are labor-intensive, time-consuming, and may have certain impacts on human health and the environment.

An object is to provide a suction method and a suction device which depressurize the pressure of the surface of a target installed in an open system to a critical pressure or less and which thereby can suck it and a laser processing device and a laser processing method using these. In a state where a predetermined operating distance is apart from a target installed in an open system and a suction port, the pressure of an inside of a pressure reduction chamber communicating with the suction port is set equal to or less than a critical pressure at which the speed of a gas sucked from the suction port is brought into a critical state; the jet speed of the gas in a jetting port from which the gas is jetted toward the target is set more than a Mach number of 0.2, the Mach number being obtained by dividing a jet speed of the gas by the sound speed of the gas jetted from the jetting port, the gas is jetted from the jetting port and is sucked by the suction port; a swirl flow is formed so as to surround the suction port between the surface of the target and the suction port; and thus the pressure of a central region of the swirl flow from the suction port to the surface of the target is reduced to the critical pressure or less and suction is performed.

Embodiments of improved gas cabinets and associated methods are provided herein to reduce diffusion of process gas outside of a gas cabinet. In the disclosed embodiments, a gas cabinet is provided with: (a) an exhausted enclosure for housing at least one gas vessel (containing a process gas) and associated gas distribution components within an interior of the enclosure, (b) an air intake vent for drawing ambient air from outside of the exhausted enclosure into an interior of the exhausted enclosure, and (c) an air plenum that is mounted within the interior of the exhausted enclosure directly behind the air intake vent for increasing the airflow path length from the outside of the exhausted enclosure into the interior of the enclosure. By increasing the airflow path length, the air plenum provided within the gas cabinet reduces the diffusion of process gas outside of the exhausted enclosure.

A device for dispersing foul gaseous effluent emissions released diffusely by sources located close to the ground, in particular by wastewater treatment ponds (10, 11, 12), includes: at least two auxiliary air or gas injectors (5a1, 5b1; 5a2, 5b2; 5a3, 5b3) oriented upwards and installed in opposing zones on the periphery of each foul gaseous effluent source, such as to disperse the gaseous effluents; separate supply elements (8.1, 13a1,13b1; 8.2, 13a2, 13b2; 8.3, 13a3, 13b3) for the injectors; and wind-direction-sensitive control elements for ensuring that at least the injector(s) best located to disperse and/or lift the gaseous effluent plume are supplied.

A soot-exhausting device is provided with a left and a right upright plate. A front end of the left upright plate is bended and extended to form a first upright plate and a left deflection plate. The upper part of the free end of the left deflection plate is bended rightwardly to form a left top plate. A front end of the right upright plate is bended and extended to form a second upright plate and a right deflection plate. The upper part of the free end of the right deflection plate is bended leftwardly to form a right top plate. The bottom of the air-extraction hood is provided with a left and a right air blow groove that are respectively in elongate shape and parallel to top side of the left and the right top plate and located at the rear end of each top side.