The invention relates to a method for creating elevations (21) in a workpiece (1) by forming techniques. In a first step, depressions (11, 12) are created, with dimensions that differ from dimensions of depressions (20) to be created between the elevations (21). In a second step, the elevations (21) are created from regions (13) between the depressions (11, 12). The invention also relates to an apparatus for implementing the method and to a product thereby created.

Provided is a cylindrical sputtering target made of a metal material, which has reduced particles. The sputtering target includes at least a target material, wherein the target material comprises one or more metal elements, the target material has a crystal grain size of 50 m or less, and the target material has an oxygen concentration of 1000 ppm by mass or less.