The invention discloses an electrochemical mechanical polishing/planarization equipment for processing a polishing surface of a conductive wafer substrate, which includes a power supply; a polishing table with conductivity; a polishing pad including an insulating active layer and having holes where a conductive chemical liquid is accommodated; a polishing head having conductivity and being attached to the back of the polishing surface. The power supply, the polishing table, the chemical liquid, the conductive wafer substrate, and the polishing head in sequence form a conductive loop, and an electrochemical reaction layer is formed on the polishing surface of the conductive wafer substrate. The polishing head drives the wafer substrate to move relative to the polishing pad, and to implement a mechanical polishing or a chemical mechanical polishing of the electrochemical reaction layer.

Disclosed are a multi-channel electrochemical machining device and method for a blisk, and relate to the technical field of blisk electrochemical machining. The multi-channel electrochemical machining device for a blisk comprises an electrolytic bath used for accommodating an electrolyte, a blisk workpiece, a tube electrode and a top cover plate. The top cover plate is located above the blisk workpiece. An electrolysis chamber used for the tube electrode to electrolyze the blisk workpiece is formed between the lower surface of the top cover plate and the surface of the blisk workpiece. The electrolysis chamber communicates with the electrolytic bath. A drainage seam communicating the electrolysis chamber and the electrolytic bath along the axial direction of the blisk workpiece is formed in the upper surface of the top cover plate.

Disclosed are a multi-channel electrochemical machining device and method for a blisk, and relate to the technical field of blisk electrochemical machining. The multi-channel electrochemical machining device for a blisk comprises an electrolytic bath used for accommodating an electrolyte, a blisk workpiece, a tube electrode and a top cover plate. The top cover plate is located above the blisk workpiece. An electrolysis chamber used for the tube electrode to electrolyze the blisk workpiece is formed between the lower surface of the top cover plate and the surface of the blisk workpiece. The electrolysis chamber communicates with the electrolytic bath. A drainage seam communicating the electrolysis chamber and the electrolytic bath along the axial direction of the blisk workpiece is formed in the upper surface of the top cover plate.

A system for forming a nozzle inlet of a nozzle includes a nozzle body and an electro-chemical machining (ECM) assembly. The nozzle body includes an external surface. The nozzle body forms a nozzle orifice and a manifold passage. The nozzle orifice extends through the nozzle body between and to a nozzle inlet and a nozzle outlet. The nozzle inlet is disposed at the manifold passage. The nozzle outlet is disposed at the external surface. The ECM assembly is installed on the nozzle body. The ECM assembly includes a machining tool and a flexible line. The machining tool is disposed at the nozzle inlet. The flexible line is attached to the machining tool. The flexible line extends through the nozzle outlet from the machining tool to an exterior of the nozzle body.

A system for forming a nozzle inlet of a nozzle includes a nozzle body and an electro-chemical machining (ECM) assembly. The nozzle body includes an external surface. The nozzle body forms a nozzle orifice and a manifold passage. The nozzle orifice extends through the nozzle body between and to a nozzle inlet and a nozzle outlet. The nozzle inlet is disposed at the manifold passage. The nozzle outlet is disposed at the external surface. The ECM assembly is installed on the nozzle body. The ECM assembly includes a machining tool and a flexible line. The machining tool is disposed at the nozzle inlet. The flexible line is attached to the machining tool. The flexible line extends through the nozzle outlet from the machining tool to an exterior of the nozzle body.

An electrode assembly for electrochemically machining a cavity of a component is disclosed. The electrode assembly comprises: an electrode, a mounting body, and an urging means. The electrode comprises a plurality of conductive elements, including an outermost conductive element. The mounting body is coupled to the electrode and engageable with the component to align the electrode within the cavity. The urging means is configured to transition the electrode from a movable configuration to a conforming configuration. In the movable configuration the conductive elements are moveable relative to one another. In the conforming configuration adjacent conductive elements align to define a substantially continuous outer electrode surface.

An electrode assembly for electrochemically machining a cavity of a component is disclosed. The electrode assembly comprises: an electrode, a mounting body, and an urging means. The electrode comprises a plurality of conductive elements, including an outermost conductive element. The mounting body is coupled to the electrode and engageable with the component to align the electrode within the cavity. The urging means is configured to transition the electrode from a movable configuration to a conforming configuration. In the movable configuration the conductive elements are moveable relative to one another. In the conforming configuration adjacent conductive elements align to define a substantially continuous outer electrode surface.

Tooling (10) for making slots in a multistage disk (1) by electrochemical machining. The tooling comprises first and second rings (20) arranged coaxially about a disk axis and configured to act as cathodes, each ring having an inside periphery with a plurality of radial machining projections. The first and second rings (20) are rigidly secured relative to each other. A method of making slots in a multistage disk by electrochemical machining using such a tool.

Tooling (10) for making slots in a multistage disk (1) by electrochemical machining. The tooling comprises first and second rings (20) arranged coaxially about a disk axis and configured to act as cathodes, each ring having an inside periphery with a plurality of radial machining projections. The first and second rings (20) are rigidly secured relative to each other. A method of making slots in a multistage disk by electrochemical machining using such a tool.

A wire electric discharge machine has a function of estimating the time for replacement of a filter based on a use situation for the machine. A time Tr during which the filter is serviceable is calculated according to an equation, Tr=|(PdPn)/P|, based on a fluid pressure variation amount P, a current filter fluid pressure Pn, and a filter life pressure. A remaining available time Td for the filter which takes into account the operation rate of the machine is calculated according to an equation, Td=Tr/W.