B23H7/26

Methods of thinning and structuring semiconductor wafers by electrical discharge machining

A method of structuring and/or thinning a semiconductor wafer having a plurality of functional chip sites includes forming one or more semiconductor devices in a device region of each functional chip site at a frontside of the semiconductor wafer, and forming an electrode at one of the frontside or a backside of the semiconductor wafer. The side of the semiconductor wafer at which the electrode is formed is structured by applying voltage pulses between the electrode and a tool electrode positioned above the semiconductor wafer as part of an electrical discharge machining (EDM) process before the electrode is removed by the EDM process, and between the tool electrode and an intrinsic conductive layer formed on the side of the semiconductor wafer being structured after the electrode is removed by the EDM process.

SINGLE-PIECE PANEL STRUCTURE HAVING TRUSS WITH ALIGNED OPENINGS
20200116976 · 2020-04-16 ·

A rigid panel structure made from a single piece of continuous, unitary material, includes a front plate, a back plate, and a truss structure between the plates. The truss structure includes angled non-perpendicular struts, perhaps coupled with perpendicular struts, that define a series of openings between the struts, with the openings aligned with one another in at least two different directions. The structure may be formed using electrical discharge machining (EDM), with material removed by EDM in at least two directions to create the openings between the struts of the truss structure.

SINGLE-PIECE PANEL STRUCTURE HAVING TRUSS WITH ALIGNED OPENINGS
20200116976 · 2020-04-16 ·

A rigid panel structure made from a single piece of continuous, unitary material, includes a front plate, a back plate, and a truss structure between the plates. The truss structure includes angled non-perpendicular struts, perhaps coupled with perpendicular struts, that define a series of openings between the struts, with the openings aligned with one another in at least two different directions. The structure may be formed using electrical discharge machining (EDM), with material removed by EDM in at least two directions to create the openings between the struts of the truss structure.

METHOD OF MACHINING GAS TURBINE ENGINE COMPONENTS
20200108458 · 2020-04-09 ·

A method of forming a gas turbine engine component including an airfoil and at least one shroud includes the steps of (1) machining a gas path surface of the at least one shroud utilizing a non-electrochemical machining (ECM) process, and (2) then utilizing ECM on at least the airfoil.

METHOD OF MACHINING GAS TURBINE ENGINE COMPONENTS
20200108458 · 2020-04-09 ·

A method of forming a gas turbine engine component including an airfoil and at least one shroud includes the steps of (1) machining a gas path surface of the at least one shroud utilizing a non-electrochemical machining (ECM) process, and (2) then utilizing ECM on at least the airfoil.

ELECTRODE HOLDER
20200108457 · 2020-04-09 ·

The present disclosure concerns an electrode holder (100, 200) for electrical discharge machining, the electrode holder (100) comprising: a frame (103) having a first end (104) and an opposing second end (105); and a cartridge (110, 200) moveably mounted to the frame (103) and having a resilient sealing member (201) with a series of holes (308) each configured to receive a first end of one of a plurality of tubular electrodes (102, 301), the cartridge (110, 200) having an inlet for receiving a pressurised supply of dielectric fluid for transmission to each of the tubular electrodes (102, 301), wherein a cross-section of the resilient sealing member (201) in a plane parallel to a longitudinal direction of the tubular electrodes (102, 301) has a narrow central portion (305) between broader outer portions (306, 307).

Fixing device, wire eroding machine or laser system, and wire eroding or lasing method
10569350 · 2020-02-25 · ·

A fixing device (1) for fixing workpieces, to fix substantially rod-shaped workpieces and workpieces to be machined by wire erosion or lasing, including a support apparatus (20) with a plurality of shaped elements (21) for accommodating and supporting a plurality of workpieces in the correspondingly formed shaped elements (21), and for positioning and fixing the workpieces in at least one translatory degree of freedom (22) in the shaped elements (21), wherein the fixing device (1) has a clamping apparatus (50) by means of which pressure force (52) can be applied to a plurality of workpieces accommodated in the shaped elements (21) so that the workpieces are fixed in the clamping apparatus (50) at least in a friction lock due to the applied pressure force, and wherein the support apparatus (20) as shaped elements (21) includes a plurality of passages (30) through which the workpieces can be guided.

Machining system and tool holding apparatus thereof

A machining system for electromachining a workpiece that in one embodiment includes a machine tool, a cutting tool for performing the eletromachining, and a tool holding apparatus for conductively holding the cutting tool and coupled to the machine tool. The tool holding apparatus includes a holding element for holding the cutting tool and at least one solution releasing element. The solution releasing element is used to receive machining solution and release the machining solution onto a predetermined area of the cutting tool through at least one group of channels. Each group of channels includes at least two channels configured to respectively release the machining solution onto at least two adjacent sections in the predetermined area of the cutting tool.

Machining system and tool holding apparatus thereof

A machining system for electromachining a workpiece that in one embodiment includes a machine tool, a cutting tool for performing the eletromachining, and a tool holding apparatus for conductively holding the cutting tool and coupled to the machine tool. The tool holding apparatus includes a holding element for holding the cutting tool and at least one solution releasing element. The solution releasing element is used to receive machining solution and release the machining solution onto a predetermined area of the cutting tool through at least one group of channels. Each group of channels includes at least two channels configured to respectively release the machining solution onto at least two adjacent sections in the predetermined area of the cutting tool.

METHOD FOR THE PRODUCTION OF DRILL HOLES IN DIFFICULT TO MACHINE MATERIALS

The present invention relates to a method for the production of drill holes in difficult to machine materials, in which a removal of material takes place in order to produce a drill hole by electrochemical erosion of material by an electrode that is moved in the longitudinal direction of the drill hole being produced in the direction onto the material to be processed at a feed rate, wherein the drilling has at least two steps, wherein, in the first step, the electrochemical processing takes place, and wherein, in a second step, the further processing of the drill hole to the final diameter takes place by machining processing or by erosion or by an electrochemical processing.