A substrate processing apparatus includes a substrate rotator, a processing liquid supply, an anode and a cathode, and a controller. The substrate rotator is configured to hold and rotate a substrate. The processing liquid supply is configured to supply a processing liquid to the substrate held by the substrate rotator. The anode and the cathode are configured to apply a voltage to the processing liquid supplied from the processing liquid supply. The controller is configured to control the substrate rotator, the processing liquid supply, and the anode and the cathode. The controller allows, by contacting the anode and the cathode with the processing liquid independently, the processing liquid in contact with the anode and the processing liquid in contact with the cathode to be supplied to the substrate while being spaced apart from each other when the substrate is rotated.

EDM assemblies mount on a machining surface and discharge rotating sub-electrodes against the surface. The sub-electrodes can also revolve about another shared axis while discharging. Rotation and revolution may be achieved with planetary gears fixed with the sub-electrodes and meshing with a stationary sun gear. Several sub-electrodes can be used in a single assembly. Downward movement of the sub-electrodes from a central shaft on the mount allows several inches of the surface to be machined. Assemblies are usable in a nuclear reactor during a maintenance period to machine a hole for a replacement manway cover underwater in the flooded reactor. The differing rotational movements and vertical movement can be independently controlled with separate motors in the assembly. Power and controls may be provided remotely through an underwater connection.

A change device, a fine hole electric discharge machine, and an electrode change method that enable automatic and continuous machining of a large number of holes using electrodes of different diameters. A fine hole electric discharge machine including automatic electrode supply devices and a first change device is provided. The automatic electrode supply device includes an electrode cartridge storing a plurality of electrodes of a predetermined diameter and an electrode feeder device supplying the electrodes one by one from the electrode cartridge. The first change device includes a first magazine accommodating the automatic electrode supply devices in a detachable manner and a first transfer device transferring the automatic electrode supply device between the first magazine and a first chuck on a machining main spindle. The first magazine accommodates a plurality of automatic electrode supply devices storing the electrodes of different diameters.

A machining position correcting device is configured to be applied to an electrochemical machining device configured to make an electrolyte flow out of a distal end part of an electrode bar extending along an axis while rotating the electrode bar about the axis to electrochemically machine a material to be machined in a range from the distal end part of the electrode bar. The machining position correcting device includes a position detector configured to detect a rotational position of a feature point of the electrode bar.

A machining position correcting device is configured to be applied to an electrochemical machining device configured to make an electrolyte flow out of a distal end part of an electrode bar extending along an axis while rotating the electrode bar about the axis to electrochemically machine a material to be machined in a range from the distal end part of the electrode bar. The machining position correcting device includes a position detector configured to detect a rotational position of a feature point of the electrode bar.

A substrate processing apparatus includes a substrate rotator, a processing liquid supply, an anode and a cathode, and a controller. The substrate rotator is configured to hold and rotate a substrate. The processing liquid supply is configured to supply a processing liquid to the substrate held by the substrate rotator. The anode and the cathode are configured to apply a voltage to the processing liquid supplied from the processing liquid supply. The controller is configured to control the substrate rotator, the processing liquid supply, and the anode and the cathode. The controller allows, by contacting the anode and the cathode with the processing liquid independently, the processing liquid in contact with the anode and the processing liquid in contact with the cathode to be supplied to the substrate while being spaced apart from each other when the substrate is rotated.

The invention relates to a method and a device for electrochemically processing a material, which contains a hard phase and a binder phase. The method comprises preparing an aqueous, alkaline, complexing-agent-containing electrolyte and bringing the material to be processed into contact at least in part with the electrolyte and with a current source. In order to electrochemically oxidize the material, a pulsed electrical current is delivered to the material by means of the current source, the pulse sequence of the delivered electrical current being adjusted to the amount of the binder phase in the material to be processed. By means of the method and by means of the device, it is also possible to process materials having a high content of binder phase in such a way that matter can be removed from the material evenly (homogeneously), i.e. both from the hard phase and from the binder phase of the material.

An electrical machining method comprises machining a workpiece by an electrical machining device comprising an electrode; increasing a feedrate of the electrode at a first acceleration if a discharge current passing through the electrode and the workpiece is lower than a discharge current reference; and decreasing the feedrate of the electrode at a second acceleration if the discharge current is higher than the discharge current reference, wherein the second acceleration has an absolute value higher than that of the first acceleration.

An electrical machining method comprises machining a workpiece by an electrical machining device comprising an electrode; increasing a feedrate of the electrode at a first acceleration if a discharge current passing through the electrode and the workpiece is lower than a discharge current reference; and decreasing the feedrate of the electrode at a second acceleration if the discharge current is higher than the discharge current reference, wherein the second acceleration has an absolute value higher than that of the first acceleration.

A method for profile machining comprises: providing an electrode having an electrode axis, a free axial end with an end face, and a peripheral surface other than the end face; energizing the electrode and a workpiece having a thickness, with one of the workpiece and the electrode as an anode and the other as a cathode; and machining the workpiece with the peripheral surface of the electrode, during which the peripheral surface and the electrode axis of the electrode are across the workpiece in a thickness direction thereof. In addition, an embodiment of present invention relates to a component machined by the method.