An ultrasonic spindle device with automatic tool changer is disclosed. The ultrasonic spindle device includes a housing member having an inner space along a longitudinal direction, a shaft member rotatably disposed in the inner space and having a hollow portion, an ultrasonic oscillation member disposed in the hollow portion and having a through hole, a drawbar member disposed in the hollow portion to move in a front-rear direction, a portion of the drawbar member being inserted into the through hole and passing through the ultrasonic oscillation member, a clamping member connected to a front end of the drawbar member and clamping a tool, a portion of the clamping member being disposed outside the housing member, a rotation means rotating the shaft member, and a cylinder member moving the drawbar member forward or backward along a longitudinal direction of the shaft member.

A magnetic field assisted vibratory finishing device for a minute structure and a finishing method is provided. The device includes a rotating shaft, a workpiece clamping device, a magnetic field generating device, a vibration assisting device, a three-axis precision displacement platform and a base. The magnetic field generating device includes a baffle plate, magnetic poles and a magnetic pole groove. The vibration assisting device includes a housing, guide fixing rods, a vibration motor, a vibration connecting plate, and compression springs. The workpiece clamping device clamps parts of structural shapes, and the frequency controller can control the motion mode of the magnetic field generating device during the finishing processing, thereby controlling the motion track of grinding material.

A magnetic field assisted vibratory finishing device for a minute structure and a finishing method is provided. The device includes a rotating shaft, a workpiece clamping device, a magnetic field generating device, a vibration assisting device, a three-axis precision displacement platform and a base. The magnetic field generating device includes a baffle plate, magnetic poles and a magnetic pole groove. The vibration assisting device includes a housing, guide fixing rods, a vibration motor, a vibration connecting plate, and compression springs. The workpiece clamping device clamps parts of structural shapes, and the frequency controller can control the motion mode of the magnetic field generating device during the finishing processing, thereby controlling the motion track of grinding material.

An ultrasonic vibration application tool equipped with a Langevin type ultrasonic vibrator which is suitably employable for ultrasonic processing devices and which efficiently generates ultrasonic vibration includes: a cylindrical housing having a contact face on a lower or bottom part of an inner surface thereof, and a lower screw part of an outer surface thereof; a bolted Langevin type ultrasonic vibrator comprising a front mass, a rear mass and a polarized piezoelectric element arranged between both masses, in which the front mass comprises a cylindrical tool-holder and a disc-shaped bulging part provided with a contact face for fitting to the contact face of the housing; and a ring-shaped counterweight having an upper screw part on an inner peripheral surface which is screwed with the screw part of the housing.

An ultrasonic vibration application tool equipped with a Langevin type ultrasonic vibrator which is suitably employable for ultrasonic processing devices and which efficiently generates ultrasonic vibration includes: a cylindrical housing having a contact face on a lower or bottom part of an inner surface thereof, and a lower screw part of an outer surface thereof; a bolted Langevin type ultrasonic vibrator comprising a front mass, a rear mass and a polarized piezoelectric element arranged between both masses, in which the front mass comprises a cylindrical tool-holder and a disc-shaped bulging part provided with a contact face for fitting to the contact face of the housing; and a ring-shaped counterweight having an upper screw part on an inner peripheral surface which is screwed with the screw part of the housing.

An ultrasonic roller burnishing system comprises a roller and a controller. The roller is configured to be pressed against a surface of a workpiece to a pressing depth, roll on the surface at a feed rate, and vibrate at an ultrasonic frequency under a back pressure. The roller is pressed and rolled by a motion unit which is driven by a drive motor. The vibrating of the roller is driven by an ultrasonic vibration unit with an input current inputted thereinto. The controller is configured to adjust at least one of the pressing depth, the back pressure, the input current and the feed rate based on an expected residual compressive stress and a real time output power of the drive motor, to generate a residual compressive stress in the workpiece which is in an expected range predetermined based on the expected residual compressive stress.

A floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method are disclosed, an X-axis moving platform, a Y-axis moving platform, a Z-axis moving platform and a workpiece swinging platform in linkage control ensure normal lines of a tool and a workpiece are kept at an identical angle to realize sub-aperture processing; the ventilation main shaft acts air pressure on the ball spline's end portion to form an axial thrust to let the tool axially float; a dynamic balance among hydrodynamic pressure, air pressure and dynamic pressure is performed on the polishing liquid by rotation of the flexible tool; a tiny gap between the tool and workpiece is formed by elastic deformation of the flexible tool due to the dynamic pressure; a shearing force for removing materials is generated when the polishing liquid flows through the gap; a cavitation effect in the gap is formed by ultrasonic waves.

A floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method are disclosed, an X-axis moving platform, a Y-axis moving platform, a Z-axis moving platform and a workpiece swinging platform in linkage control ensure normal lines of a tool and a workpiece are kept at an identical angle to realize sub-aperture processing; the ventilation main shaft acts air pressure on the ball spline's end portion to form an axial thrust to let the tool axially float; a dynamic balance among hydrodynamic pressure, air pressure and dynamic pressure is performed on the polishing liquid by rotation of the flexible tool; a tiny gap between the tool and workpiece is formed by elastic deformation of the flexible tool due to the dynamic pressure; a shearing force for removing materials is generated when the polishing liquid flows through the gap; a cavitation effect in the gap is formed by ultrasonic waves.

Methods for manufacturing a diffuser plate for a PECVD chamber are provided. The methods provide for applying a compliant abrasive medium to round the sharp edges at corners of the output holes on a contoured downstream side of a gas diffuser plate. By rounding the edges of the output holes reduces the flaking of deposited materials on the downstream side of the gas diffuser plate and reduces the amount of undesirable particles generated during the PECVD deposition process.

Methods for manufacturing a diffuser plate for a PECVD chamber are provided. The methods provide for applying a compliant abrasive medium to round the sharp edges at corners of the output holes on a contoured downstream side of a gas diffuser plate. By rounding the edges of the output holes reduces the flaking of deposited materials on the downstream side of the gas diffuser plate and reduces the amount of undesirable particles generated during the PECVD deposition process.