A honing machine using a robot to load gears into a loadbox at a loadbox station. The loadbox moves downstream to a position over an empty pallet in a pallet load station where the gears are released into the empty pallet. A series of downstream machining stations performing a series of honing operations on the bores of the gears in a series of pallets. A removal mechanism removing the honed gears simultaneously from the pallet at a pallet unload station. An overhead gripper on a movable gantry grips the empty pallet at the unload station and returns the pallet to the pallet load station where the pallet is reloaded with additional gears from the loadbox. The honing machine can continuously hone gears using only one pallet at each machining station and one pallet at the pallet loading station.

Provided is a grinding method capable of preventing variation in the outer diameter of a processed object 1 at the completion of grinding regardless of change in the amount of elastic deformation of the processed object 1 based on the change in the cutting ability of a grindstone 4. The outer diameter D of the processed object 1 during grinding is measured by gauge heads 5 in process. Plural target values D.sub.i that differ from each other are set for the outer diameter D of the processed object 1, and first threshold values are set for the rate of change of the outer diameter D of the processed object for each of these target values D.sub.i. Spark out is started when the outer diameter D of the processed object 1 becomes equal to a target value D.sub.i and the absolute value of the rate of change v is greater than a first threshold value that corresponds to the target value D.sub.i.

Provided is a grinding method capable of preventing variation in the outer diameter of a processed object 1 at the completion of grinding regardless of change in the amount of elastic deformation of the processed object 1 based on the change in the cutting ability of a grindstone 4. The outer diameter D of the processed object 1 during grinding is measured by gauge heads 5 in process. Plural target values D.sub.i that differ from each other are set for the outer diameter D of the processed object 1, and first threshold values are set for the rate of change of the outer diameter D of the processed object for each of these target values D.sub.i. Spark out is started when the outer diameter D of the processed object 1 becomes equal to a target value D.sub.i and the absolute value of the rate of change v is greater than a first threshold value that corresponds to the target value D.sub.i.

A substrate processing apparatus includes a polisher configured to polish a substrate using a polishing liquid, a first cleaner configured to clean the substrate polished by the polisher using sulfuric acid and hydrogen peroxide water, a second cleaner configured to clean the substrate cleaned by the first cleaner using a basic chemical liquid and hydrogen peroxide water, and a drier configured to dry the substrate cleaned by the second cleaner.

A substrate processing apparatus includes a polisher configured to polish a substrate using a polishing liquid, a first cleaner configured to clean the substrate polished by the polisher using sulfuric acid and hydrogen peroxide water, a second cleaner configured to clean the substrate cleaned by the first cleaner using a basic chemical liquid and hydrogen peroxide water, and a drier configured to dry the substrate cleaned by the second cleaner.

A cylindrical workpiece with a helical axial groove allowing for centerless grinding which has an angular overlap around the outer circumference on the body of the workpiece. The angular overlap ensures continuous tangential contact with the grinding wheels as the workpiece is rotated.

A multi-angle automated polishing system comprises a workbench, a holding unit, a polishing unit, and a control unit. The holding unit comprises a holding component for holding an object, a transverse drive configured to drive the holding component to move transversely along the plane of the workbench, a translational drive configured to drive the holding component to move translationally along the plane of the workbench, and a rotary drive configured to drive the holding component to rotate transversely along the plane of the workbench. The holding unit further comprises a rotating unit and a rotating drive configured to drive the rotating unit to rotate. The polishing unit comprises a polishing component and a polishing drive configured to drive the polishing unit in operation. The control unit is connected to the transverse drive, the rotary drive, the rotating drive, and the polishing drive.

A honing assembly, a sanding assembly and a turning machine for performing an operation on a workpiece. The turning machine may include a rotatable machine housing operable to rotate around the workpiece; a first attachment including a first portion engageable with and operable to remove material from a workpiece, the first attachment having a first configuration, such as a honing attachment; and a second attachment including a second portion engageable with and operable to remove material from a workpiece, the second attachment having a second configuration, such as a sanding attachment, different than the first configuration, each of the first attachment and the second attachment being selectively supportable one at a time by the machine housing to operate on a workpiece.

A honing assembly, a sanding assembly and a turning machine for performing an operation on a workpiece. The turning machine may include a rotatable machine housing operable to rotate around the workpiece; a first attachment including a first portion engageable with and operable to remove material from a workpiece, the first attachment having a first configuration, such as a honing attachment; and a second attachment including a second portion engageable with and operable to remove material from a workpiece, the second attachment having a second configuration, such as a sanding attachment, different than the first configuration, each of the first attachment and the second attachment being selectively supportable one at a time by the machine housing to operate on a workpiece.

The present disclosure relates to a grinding machine. More particularly, the present disclosure relates to a centerless grinding machine comprising a damping device. The present disclosure also relates to a spindle for a grinding machine, and to a damping device for a spindle of a grinding machine, particularly for a grinding spindle or regulator spindle of a centerless grinding machine, wherein the damping device comprises at least one damping unit including an auxiliary mass section, an elastic section and a damping section, which are integrated in the spindle, and which jointly define a damped vibratory system for increasing the dynamic stiffness of the spindle.