A grinding machine includes a machine bed on which a workpiece spindle with a workpiece holder and a tool spindle with a tool holder are arranged. A workpiece held in the workpiece spindle, relative to a tool held in the tool holder, is displaceable along an X-axis running in a first direction parallel to the surface of the machine bed, is displaceable along a Y-axis, running in a second direction parallel to the surface of the machine bed, is displaceable along a Z-axis running perpendicular to the surface of the machine bed, is rotatable about an A-axis running parallel to the surface of the machine bed, and is rotatable about a C-axis running perpendicular to the surface of the machine bed. The tool spindle is completely kinematically separated from the workpiece spindle. Movements along the X-axis, about the A-axis and about the C-axis being carried out by the workpiece spindle.

A grinding method includes an oblique grinding step of rotating a grinding wheel about the central axis of a second shaft, tilting the second shaft to a first shaft of a rotatable chuck table such that the bottom of a first portion of the grinding wheel that is positioned above an outer circumferential portion of the chuck table is higher than the bottom of a second portion of the grinding wheel that is positioned above a central portion of the chuck table, and then moving the grinding wheel and the chuck table relatively closer to each other along a direction parallel to the first shaft, thereby forming a disk-shaped recess in the reverse side of the workpiece, and a tilt changing and grinding step of grinding the reverse side of the workpiece while gradually changing a tilt of the second shaft to orient parallel to the first shaft.

A grinding method includes an oblique grinding step of rotating a grinding wheel about the central axis of a second shaft, tilting the second shaft to a first shaft of a rotatable chuck table such that the bottom of a first portion of the grinding wheel that is positioned above an outer circumferential portion of the chuck table is higher than the bottom of a second portion of the grinding wheel that is positioned above a central portion of the chuck table, and then moving the grinding wheel and the chuck table relatively closer to each other along a direction parallel to the first shaft, thereby forming a disk-shaped recess in the reverse side of the workpiece, and a tilt changing and grinding step of grinding the reverse side of the workpiece while gradually changing a tilt of the second shaft to orient parallel to the first shaft.

A servo driven compliant mechanism is provided. The servo driven compliant mechanism includes a holder, a first pivot, a grinding tool, a posture sensor, a displacement sensor, an inner frame, and a first servomotor. The first pivot is perpendicular to an axial direction of the grinding tool. The posture sensor is used for sensing a posture of the grinding tool and sending a posture signal to be transformed into a torque compensation value for an effect of gravity. The displacement sensor is used for sensing a displacement of the grinding tool along the first pivot. The grinding tool is disposed in the inner frame, and the first pivot is movably disposed in the inner frame. The first servomotor is disposed in the inner frame and drives the grinding tool to rotate along the first pivot according to the torque compensation value and the displacement.

A magnetic field assisted vibratory finishing device for a minute structure and a finishing method is provided. The device includes a rotating shaft, a workpiece clamping device, a magnetic field generating device, a vibration assisting device, a three-axis precision displacement platform and a base. The magnetic field generating device includes a baffle plate, magnetic poles and a magnetic pole groove. The vibration assisting device includes a housing, guide fixing rods, a vibration motor, a vibration connecting plate, and compression springs. The workpiece clamping device clamps parts of structural shapes, and the frequency controller can control the motion mode of the magnetic field generating device during the finishing processing, thereby controlling the motion track of grinding material.

A magnetic field assisted vibratory finishing device for a minute structure and a finishing method is provided. The device includes a rotating shaft, a workpiece clamping device, a magnetic field generating device, a vibration assisting device, a three-axis precision displacement platform and a base. The magnetic field generating device includes a baffle plate, magnetic poles and a magnetic pole groove. The vibration assisting device includes a housing, guide fixing rods, a vibration motor, a vibration connecting plate, and compression springs. The workpiece clamping device clamps parts of structural shapes, and the frequency controller can control the motion mode of the magnetic field generating device during the finishing processing, thereby controlling the motion track of grinding material.

Provided is a local polishing technique suitable for corrective polishing. Press polishing is performed while supplying a polishing solution between a work and a work-polishing rotating tool locally pressed against the work, the polishing solution having abrasive grains composed of organic particles with an average particle size of 5 μm or more dispersed in a liquid. The rotating tool is made of an elastic material.

Provided is a local polishing technique suitable for corrective polishing. Press polishing is performed while supplying a polishing solution between a work and a work-polishing rotating tool locally pressed against the work, the polishing solution having abrasive grains composed of organic particles with an average particle size of 5 μm or more dispersed in a liquid. The rotating tool is made of an elastic material.

Provided is a balancing device for a rotating body including at least one unbalance detector to measure the unbalance of the rotating body; two balancing masses to be handled along a handling circumference so as to cancel the unbalance; a position sensor to detect the mutual position of the balancing masses; and a motor to independently handle each of the balancing masses as a function of their mutual position and unbalance.

A floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method are disclosed, an X-axis moving platform, a Y-axis moving platform, a Z-axis moving platform and a workpiece swinging platform in linkage control ensure normal lines of a tool and a workpiece are kept at an identical angle to realize sub-aperture processing; the ventilation main shaft acts air pressure on the ball spline's end portion to form an axial thrust to let the tool axially float; a dynamic balance among hydrodynamic pressure, air pressure and dynamic pressure is performed on the polishing liquid by rotation of the flexible tool; a tiny gap between the tool and workpiece is formed by elastic deformation of the flexible tool due to the dynamic pressure; a shearing force for removing materials is generated when the polishing liquid flows through the gap; a cavitation effect in the gap is formed by ultrasonic waves.