Disclosed is a rocker type polishing apparatus and method for full-aperture deterministic polishing of a planar part. The apparatus includes a control system, a substrate, a lifting plate, a polishing module and a measuring module. The polishing module and the measuring module are arranged on the substrate. The lifting plate is arranged between the polishing module and the measuring module. The polishing module includes a rocker mechanism, a polishing pad surface dressing mechanism, a polishing pad surface profile measuring apparatus and a continuous polishing pad mechanism. Considering the specific surface profile of the planar part, the present invention makes the material removal rate distribution of the planar part and the surface profile of the planar part be in the normalized mirror symmetry relationship by controlling the material removal rate distribution on the surface of the planar part, thereby implementing the deterministic polishing of the planar part and ensuring the efficient convergence of the surface profile of the planar part in the polishing process. The present invention completes the high-precision polishing process by using the low-cost operation manner, thereby reducing the device cost.

Disclosed is a rocker type polishing apparatus and method for full-aperture deterministic polishing of a planar part. The apparatus includes a control system, a substrate, a lifting plate, a polishing module and a measuring module. The polishing module and the measuring module are arranged on the substrate. The lifting plate is arranged between the polishing module and the measuring module. The polishing module includes a rocker mechanism, a polishing pad surface dressing mechanism, a polishing pad surface profile measuring apparatus and a continuous polishing pad mechanism. Considering the specific surface profile of the planar part, the present invention makes the material removal rate distribution of the planar part and the surface profile of the planar part be in the normalized mirror symmetry relationship by controlling the material removal rate distribution on the surface of the planar part, thereby implementing the deterministic polishing of the planar part and ensuring the efficient convergence of the surface profile of the planar part in the polishing process. The present invention completes the high-precision polishing process by using the low-cost operation manner, thereby reducing the device cost.

A substrate processing apparatus includes a chuck configured to hold a substrate horizontally; a processing unit configured to press a processing tool against an outer periphery of the substrate held by the chuck to process the substrate; and a lower cup configured to collect a processing residue falling from the substrate over an entire circumference of the substrate. The lower cup is provided with a discharge opening through which the processing residue is discharged.

A substrate processing apparatus includes a chuck configured to hold a substrate horizontally; a processing unit configured to press a processing tool against an outer periphery of the substrate held by the chuck to process the substrate; and a lower cup configured to collect a processing residue falling from the substrate over an entire circumference of the substrate. The lower cup is provided with a discharge opening through which the processing residue is discharged.

The invention relates to a relief valve (100) for portable, industrial dust collectors. It has actuating means (102, 104) for actuating the valve (100) between a closed position and an open position. According to the invention, the valve further includes retaining means (107) for maintaining the valve in the open position. The invention also relates to a hose device for a cleaner of a dust collector a dust collector. The hose device is arranged such that it covers the bottom of the grid means in the cleaner when the dust collector operates and falls down when the vacuum in the dust collector is released. The invention further relates to a cleaner, to a dust collector, to a grinding machine and to a method for operating a dust collector. These are in conjunction with the relief valve and/or the hose device. The invention also relates to a dust collector with cleaner means (1, 2), a relief valve (100, 400) and an inlet valve (12) and synchronization means arranged to govern that the actuation of the inlet valve (100, 400) is synchronized with actuation of the relief valve (12).

A sludge drying apparatus includes a drying unit for drying sludge as it is transferred by a transfer belt. The drying unit includes a box that covers an upper surface of the transfer belt and extends in a direction of extension of the transfer belt, an air inlet formed at one end of the box, an air outlet formed at the other end of the box, a fan provided outside the box for sucking air in the box from the air outlet and thereby intaking outside air from the air inlet into the box, a dividing portion for dividing the air discharged from the fan into two parts, and a return inlet formed between the air inlet and the air outlet for returning one of the two parts of the air divided by the dividing portion into the box.

A sludge drying apparatus includes a drying unit for drying sludge as it is transferred by a transfer belt. The drying unit includes a box that covers an upper surface of the transfer belt and extends in a direction of extension of the transfer belt, an air inlet formed at one end of the box, an air outlet formed at the other end of the box, a fan provided outside the box for sucking air in the box from the air outlet and thereby intaking outside air from the air inlet into the box, a dividing portion for dividing the air discharged from the fan into two parts, and a return inlet formed between the air inlet and the air outlet for returning one of the two parts of the air divided by the dividing portion into the box.

Systems and methods for grinding are provided. In one embodiment, systems and methods for grinding are provided having a floating or self-adjusting dust collector or means. This allows the dust collector or guard to adjust its position relative its support member to allow for uninterrupted grinding operations as the grinding element(s) wear away. Biasing and guiding assemblies or means are provided that allow the dust collector/guard to be guided closer to its support structure to compensate for the grinding elements become smaller as they wear away during the grinding operation.

Systems and methods for grinding are provided. In one embodiment, systems and methods for grinding are provided having a floating or self-adjusting dust collector or means. This allows the dust collector or guard to adjust its position relative its support member to allow for uninterrupted grinding operations as the grinding element(s) wear away. Biasing and guiding assemblies or means are provided that allow the dust collector/guard to be guided closer to its support structure to compensate for the grinding elements become smaller as they wear away during the grinding operation.

A hose device may include a flexible hose device body having a first end configured to be attached to a cyclone and a second end with a free opening. The hose device may also include a plurality of weights affixed between the first end and the second end. When subjected to suction forces from a vacuum of the cyclone, the second end may be sucked upwards such that the plurality of weights hingedly swing toward the first end and the hose device body is in a retracted configuration. When released from the suction forces of the cyclone, the plurality of weights hingedly swing away from the first end and the hose device body extends downwards into an extended configuration by the gravity forces acting upon the weights, in the absence of the suction forces, to expand a size of the free opening.