A method of forming a compact includes removing material from a workpiece, transferring metallic dust released during the material removal into a conduit, operating a plurality of slide gates to selectively control movement of the dust from the conduit to either one of a primary collector and a back-up collector, drawing the dust through the conduit to a compactor, and compacting the dust in the compactor.

A substrate processing apparatus includes a first polishing chamber, a second polishing chamber, a dry polishing chamber and a loading chamber on a turntable. The dry polishing chamber includes a polishing device on the turntable, and a chamber cover including a cover plate, an interception filter at an intake port at the cover plate, and a particle barrier connected to the cover plate. The particle barrier faces the interception filter, and is between the polishing device and the interception filter.

A substrate processing apparatus includes a first polishing chamber, a second polishing chamber, a dry polishing chamber and a loading chamber on a turntable. The dry polishing chamber includes a polishing device on the turntable, and a chamber cover including a cover plate, an interception filter at an intake port at the cover plate, and a particle barrier connected to the cover plate. The particle barrier faces the interception filter, and is between the polishing device and the interception filter.

A grinding apparatus includes a chuck, a housing, a tool driving unit, a nozzle, a sensor and a sensor cover. The chuck is configured to hold a substrate. The housing accommodates the chuck therein. The tool driving unit is configured to drive a grinding tool pressed against the substrate within the housing. The nozzle is configured to supply a grinding liquid to the substrate within the housing. The sensor is disposed at an inside of the housing and is configured to detect a liquid level of a liquid collected within the housing. The sensor cover is located between the chuck and the sensor.

A grinding-type solar module recycling equipment having a platform, a grinding blade and a negative pressure collector. A solar module is placed on a solar module placement area of the platform and the grinding blade is controlled to touch and grind the solar module layer by layer. The powders ground from different layers of the solar module is separately and immediately recycled by the negative pressure suction head. Therefore, the powders do not fall around. The grinding-type solar module recycling equipment not only does not generate secondary pollutants, but also has high purity of powdered recycled materials, which is convenient for subsequent utilization.

A grinding-type solar module recycling equipment having a platform, a grinding blade and a negative pressure collector. A solar module is placed on a solar module placement area of the platform and the grinding blade is controlled to touch and grind the solar module layer by layer. The powders ground from different layers of the solar module is separately and immediately recycled by the negative pressure suction head. Therefore, the powders do not fall around. The grinding-type solar module recycling equipment not only does not generate secondary pollutants, but also has high purity of powdered recycled materials, which is convenient for subsequent utilization.

A derusting machine includes at least two derusting wheels; a driving mechanism; a support assembly; a dust hood; a plurality of suction nozzles disposed through the dust hood; a vacuum cleaner; and a pipe. The at least two derusting wheels are perpendicular to each other; each derusting wheel includes a plurality of wire wheels and a rotating wheel disposed between the plurality of wire wheels, and each the rotating wheel includes a carbide bit. The at least two derusting wheels are connected to the driving mechanism. The driving mechanism is disposed in or on the support assembly. The support assembly is a handle, a conveyor, or a support frame. The dust hood is attached to the at least two derusting wheels. The plurality of suction nozzles is connected to the vacuum cleaner through the pipe.

A derusting machine includes at least two derusting wheels; a driving mechanism; a support assembly; a dust hood; a plurality of suction nozzles disposed through the dust hood; a vacuum cleaner; and a pipe. The at least two derusting wheels are perpendicular to each other; each derusting wheel includes a plurality of wire wheels and a rotating wheel disposed between the plurality of wire wheels, and each the rotating wheel includes a carbide bit. The at least two derusting wheels are connected to the driving mechanism. The driving mechanism is disposed in or on the support assembly. The support assembly is a handle, a conveyor, or a support frame. The dust hood is attached to the at least two derusting wheels. The plurality of suction nozzles is connected to the vacuum cleaner through the pipe.

A grinding machine including a support pedestal that supports a drive motor that supports an abrasive wheel rotatably coupled to the drive motor; a motor drive operatively coupled to the drive motor; a safety controller operatively coupled with the drive motor and motor drive; an E-stop operatively coupled to the safety controller; a foot pedal switch operatively coupled to the safety controller; and a 480 volt alternating current 3 phase electrical power supply electrically coupled to the drive motor.

A grinding machine including a support pedestal that supports a drive motor that supports an abrasive wheel rotatably coupled to the drive motor; a motor drive operatively coupled to the drive motor; a safety controller operatively coupled with the drive motor and motor drive; an E-stop operatively coupled to the safety controller; a foot pedal switch operatively coupled to the safety controller; and a 480 volt alternating current 3 phase electrical power supply electrically coupled to the drive motor.