B24D7/14

Endpointing detection for chemical mechanical polishing based on spectrometry

A method of detecting a polishing endpoint includes storing a plurality of library spectra, measuring a sequence of spectra from the substrate in-situ during polishing, and for each measured spectrum of the sequence of spectra, finding a best matching library spectrum from the plurality of library spectra to generate a sequence of best matching library spectra. Each library spectrum has a stored associated value representing a degree of progress through a polishing process, and the stored associated value for the best matching library spectrum is determined for each best matching library spectrum to generate a sequence of values representing a progression of polishing of the substrate. The sequence of values is compared to a target value, and a polishing endpoint is triggered when the sequence of values reaches the target value.

DISK-SHAPED TOOL AND METHOD FOR MACHINING WORKPIECES, CUTTING DEVICE, AND USE OF A CUTTING, GRINDING AND POLISHING DISK TO PRODUCE A SURF ACE STRUCTURE ON A WORKPIECE
20220009014 · 2022-01-13 ·

The invention relates to a disk-shaped cutting tool, to a radial cutting method for machining axially elongated workpieces, to a cutting device and to a use of a disk-shaped cutting tool. A disk-shaped cutting tool according to the invention has defined flexibility and a defined impact. In a radial cutting process according to the invention, lateral deflection of the axially stationary rotating tool brings the tool, by means of the at least one laterally applied grinding and polishing surface, into axial effective contact with the workpiece to be machined. In a cutting device according to the invention, the cutting tool can be moved only radially to machine the workpiece. A use according to the invention of a disk-shaped tool serves the purpose of specimen preparation and subsequent surface analysis on a workpiece cut to length.

CUTTING TOOL AND METHOD FOR MANUFACTURING OPTICAL FIBER PREFORM

A cutting tool includes: a shank part; and a cutting part provided at one end of the shank part. The cutting part includes a first region provided at one end of the cutting tool, and a second region located closer to a center of the cutting tool than the first region. Abrasive grains adhere to the first region and the second region. An average grain diameter of the abrasive grains in the second region is smaller than an average grain diameter of the abrasive grains in the first region.

Abrasive article and method of making the same

Various embodiments disclosed relate to an abrasive article. The abrasive article includes a first major surface and an opposed second major surface. Each major surface contacts a peripheral side surface. A central axis extends through the first and second major surfaces. A first layer of abrasive particles is dispersed within the abrasive article according to a first predetermined pattern. Further a second layer of abrasive particles spaced apart from the first layer of abrasive particles and is dispersed within the abrasive article along a according to a second predetermined pattern. A binder material retains the first and second layers of abrasive particles in the abrasive article. A portion of the binder material is located between the first and second layers of abrasive particles. That portion of the binder material is substantially continuous.

Abrasive article and method of making the same

Various embodiments disclosed relate to an abrasive article. The abrasive article includes a first major surface and an opposed second major surface. Each major surface contacts a peripheral side surface. A central axis extends through the first and second major surfaces. A first layer of abrasive particles is dispersed within the abrasive article according to a first predetermined pattern. Further a second layer of abrasive particles spaced apart from the first layer of abrasive particles and is dispersed within the abrasive article along a according to a second predetermined pattern. A binder material retains the first and second layers of abrasive particles in the abrasive article. A portion of the binder material is located between the first and second layers of abrasive particles. That portion of the binder material is substantially continuous.

Dynamic regulation of contact pressures in a blade sharpening system
11833704 · 2023-12-05 · ·

Dynamic regulation of contact pressures in a blade sharpening system is provided. An example multiphase grinding wheel has a grinding face with one or more abrasive concentric rings for sharpening the cutting blade of the log saw machine, and one or more padded concentric rings consisting of fiber padding. Sharpening with the multiphase grinding wheel improves cut quality, increases blade life, removes glues and varnishes from the cutting blade, reduces blade deformation, and hones the edge of the cutting blade. A pneumatic tensioning system uses air bladders to apply dynamic cushioning and processor-controlled contact pressure between the grinding wheels and the cutting blade during sharpening. The fiber-padded grinding wheels and the air bladder tensioner provide improved sharpness of the cutting blade and longer life for the mechanical components.

Dynamic regulation of contact pressures in a blade sharpening system
11833704 · 2023-12-05 · ·

Dynamic regulation of contact pressures in a blade sharpening system is provided. An example multiphase grinding wheel has a grinding face with one or more abrasive concentric rings for sharpening the cutting blade of the log saw machine, and one or more padded concentric rings consisting of fiber padding. Sharpening with the multiphase grinding wheel improves cut quality, increases blade life, removes glues and varnishes from the cutting blade, reduces blade deformation, and hones the edge of the cutting blade. A pneumatic tensioning system uses air bladders to apply dynamic cushioning and processor-controlled contact pressure between the grinding wheels and the cutting blade during sharpening. The fiber-padded grinding wheels and the air bladder tensioner provide improved sharpness of the cutting blade and longer life for the mechanical components.

ENDPOINT DETECTION FOR CHEMICAL MECHANICAL POLISHING BASED ON SPECTROMETRY

A method of detecting a polishing endpoint includes storing a plurality of library spectra, measuring a sequence of spectra from the substrate in-situ during polishing, and for each measured spectrum of the sequence of spectra, finding a best matching library spectrum from the plurality of library spectra to generate a sequence of best matching library spectra. Each library spectrum has a stored associated value representing a degree of progress through a polishing process, and the stored associated value for the best matching library spectrum is determined for each best matching library spectrum to generate a sequence of values representing a progression of polishing of the substrate. The sequence of values is compared to a target value, and a polishing endpoint is triggered when the sequence of values reaches the target value.

ENDPOINT DETECTION FOR CHEMICAL MECHANICAL POLISHING BASED ON SPECTROMETRY

A method of detecting a polishing endpoint includes storing a plurality of library spectra, measuring a sequence of spectra from the substrate in-situ during polishing, and for each measured spectrum of the sequence of spectra, finding a best matching library spectrum from the plurality of library spectra to generate a sequence of best matching library spectra. Each library spectrum has a stored associated value representing a degree of progress through a polishing process, and the stored associated value for the best matching library spectrum is determined for each best matching library spectrum to generate a sequence of values representing a progression of polishing of the substrate. The sequence of values is compared to a target value, and a polishing endpoint is triggered when the sequence of values reaches the target value.

ABRASIVE ARTICLES HAVING A PLURALITY OF PORTIONS AND METHODS FOR FORMING SAME

An abrasive article can include a body including a plurality of portions including a first abrasive portion and a second abrasive portion. The first abrasive portion can include a vitreous bond material and abrasive particles contained within the bond material. The second abrasive particles can include an organic bond material and abrasive particles contained within the bond material. The body can have a burst speed of at least 65 m/s. In an embodiment, the abrasive article can include an interior portion coupled to the first and second abrasive portions. In another embodiment, the interior portion can optionally include abrasive particles or a filler material.