An abrasive disc mounting assembly for attaching an abrasive disc to a rotary motor drive. The assembly includes a backing pad with a front face and a rear surface. A tapered recess is formed in the front face and extends into the backing pad, the recess having a flat base at its inward end. A hole is formed in the recess and extends through the backing pad from the base to the rear surface. The hole is centered within the recess. A grinder spindle is sized to fit within the hole. The spindle has threads formed on one end. The assembly also includes a nut with a shape that is complementary to the shape of the recess so that the nut seats within the recess. The recess and nut include anti-rotational features that prevent one from rotating relative to the other as the nut seats within the recess.

An abrasive disc mounting assembly for attaching an abrasive disc to a rotary motor drive. The assembly includes a backing pad with a front face and a rear surface. A tapered recess is formed in the front face and extends into the backing pad, the recess having a flat base at its inward end. A hole is formed in the recess and extends through the backing pad from the base to the rear surface. The hole is centered within the recess. A grinder spindle is sized to fit within the hole. The spindle has threads formed on one end. The assembly also includes a nut with a shape that is complementary to the shape of the recess so that the nut seats within the recess. The recess and nut include anti-rotational features that prevent one from rotating relative to the other as the nut seats within the recess.

An operation control unit includes a storage device storing a program which includes commands of: obtaining a correlation between a supply position of the polishing liquid in the radial direction of the polishing pad using the liquid injection nozzle and an average polishing rate of the substrate and an distribution of the polishing rate within the substrate; determining a movable range of the liquid injection nozzle according to a predetermined range of an allowable average polishing rate and the correlation between the supply position of the polishing liquid and the average polishing rate; determining an optimal supply position of the polishing liquid from the correlation between the supply position of the polishing liquid and the distribution of the polishing rate within the substrate within the determined movable range of the liquid injection nozzle; and moving the liquid injection nozzle to the determined supply position to polish the substrate.

An operation control unit includes a storage device storing a program which includes commands of: obtaining a correlation between a supply position of the polishing liquid in the radial direction of the polishing pad using the liquid injection nozzle and an average polishing rate of the substrate and an distribution of the polishing rate within the substrate; determining a movable range of the liquid injection nozzle according to a predetermined range of an allowable average polishing rate and the correlation between the supply position of the polishing liquid and the average polishing rate; determining an optimal supply position of the polishing liquid from the correlation between the supply position of the polishing liquid and the distribution of the polishing rate within the substrate within the determined movable range of the liquid injection nozzle; and moving the liquid injection nozzle to the determined supply position to polish the substrate.

An accessory includes an attachment member, a fastener, a locking member, and an eccentric member. The attachment member has a central axis, which is perpendicular to a first surface of the attachment member. The fastener is connected to at least the attachment member. The locking member is movable into at least (a) a locked position in which the locking member is engaged with the attachment member such that the attachment member is configured to rotate about the central axis, and (b) an unlocked position in which the locking member is disengaged from the attachment member such that the attachment member is configured to rotate about an eccentric axis. The eccentric axis is offset from the central axis. The eccentric member includes a first slot that receives the locking member, a second slot that receives the driving shaft, and a third slot that receives the fastener. The second slot of the eccentric member is structured to align with the central axis of the attachment member. The third slot of the eccentric member is structured to align with the eccentric axis of the attachment member.

An accessory includes an attachment member, a fastener, a locking member, and an eccentric member. The attachment member has a central axis, which is perpendicular to a first surface of the attachment member. The fastener is connected to at least the attachment member. The locking member is movable into at least (a) a locked position in which the locking member is engaged with the attachment member such that the attachment member is configured to rotate about the central axis, and (b) an unlocked position in which the locking member is disengaged from the attachment member such that the attachment member is configured to rotate about an eccentric axis. The eccentric axis is offset from the central axis. The eccentric member includes a first slot that receives the locking member, a second slot that receives the driving shaft, and a third slot that receives the fastener. The second slot of the eccentric member is structured to align with the central axis of the attachment member. The third slot of the eccentric member is structured to align with the eccentric axis of the attachment member.

In general, a Buffing Pad Centering System (BPCS) for centering a back plate having an edge and a front surface is described. In an example of an implementation of the BPCS, the BPCS may include a centering ring having a top boundary and a bottom boundary and a buffing pad attached to the bottom boundary of the centering ring, where the centering ring is centered on the buffing pad. The centering ring may include a cylindrical vertical member extending between the top boundary and bottom boundary, where the cylindrical vertical member has an inner cylindrical surface and an outer cylindrical surface, and where the inner cylindrical surface is capable of snuggly receiving the back plate.

In general, a Buffing Pad Centering System (BPCS) for centering a back plate having an edge and a front surface is described. In an example of an implementation of the BPCS, the BPCS may include a centering ring having a top boundary and a bottom boundary and a buffing pad attached to the bottom boundary of the centering ring, where the centering ring is centered on the buffing pad. The centering ring may include a cylindrical vertical member extending between the top boundary and bottom boundary, where the cylindrical vertical member has an inner cylindrical surface and an outer cylindrical surface, and where the inner cylindrical surface is capable of snuggly receiving the back plate.

The subject of the present invention is a rotationally drivable rotary tool device and in particular a rotary brush tool. The invention is equipped, in its basic construction, with a tool holder (1, 2) having at least one drive-side clamping element (1) and a tool-side clamping element (2). The two clamping elements (1, 2) are connected releasably together and receive a rotary tool (5, 6). Furthermore, the two clamping elements (1, 2) ensure that the rotary tool (5, 6) is held. According to the invention, the tool-side clamping element (2) and the rotary tool (5, 6) define a structural unit (2, 5, 6). To this end, the clamping element (2) in question is configured as a holding cage (2) that encloses the rotary tool (5, 6) radially and axially at least in part.

The subject of the present invention is a rotationally drivable rotary tool device and in particular a rotary brush tool. The invention is equipped, in its basic construction, with a tool holder (1, 2) having at least one drive-side clamping element (1) and a tool-side clamping element (2). The two clamping elements (1, 2) are connected releasably together and receive a rotary tool (5, 6). Furthermore, the two clamping elements (1, 2) ensure that the rotary tool (5, 6) is held. According to the invention, the tool-side clamping element (2) and the rotary tool (5, 6) define a structural unit (2, 5, 6). To this end, the clamping element (2) in question is configured as a holding cage (2) that encloses the rotary tool (5, 6) radially and axially at least in part.