A vacuum cup connected to a robotic arm for picking and placing items is disclosed. The vacuum cup includes one or more walls that defines (i) a first internal cavity and (ii) an opening to the first internal cavity, wherein the first internal cavity is defined at least in part by an interior surface adjacent to the opening to the first internal cavity, the interior surface defining an internal ridge positioned to mechanically engage a material drawn into the first internal cavity through the opening at an angle such that the mechanical engagement resists the material being removed from the first internal cavity via the opening. In response to the item being engaged and the suction system controlling the pressure within the first internal cavity to create a vacuum seal between the vacuum cup and the item, at least part of the item is caused to enter the first internal cavity at least during engagement of the vacuum seal.

A holding device in a lithography apparatus for transferring a pattern formed on a mold to a substrate, for attracting/holding the mold or substrate by a reduced pressure, comprising: a holding unit holding the mold or substrate, having concave portions forming spaces together with the mold or substrate; a first pressure mechanism to depressurize at least one first space among the spaces formed by the mold or substrate and the holding unit; a second pressure mechanism setting at least one second space among the spaces to a pressure different from the first space; a controller controlling the first and second pressure mechanisms such that the first and second spaces are adjacent to each other; a measuring unit measuring a flow rate of at least the first or second pressure mechanisms; and a determining unit determining an abnormality related to attracting/holding of the mold or substrate based on the flow rate.

A laser processing apparatus includes: a chuck table for holding a single-crystal SiC ingot on a holding surface thereof; a laser beam applying unit for applying a laser beam to the single-crystal SiC ingot held on the holding surface of the chuck table; and a camera unit configured to capture an image of the single-crystal SiC ingot held on the holding surface of the chuck table. The chuck table includes a porous material making up the holding surface and a glass frame made of a non-porous material and having a recess defined therein and receiving the porous material fitted therein, and a negative pressure transfer path for transferring a negative pressure to the porous material fitted in the recess.

An embodiment of the present invention simplifies the configuration of a suction positioning device. An embodiment of the present invention includes: an output rod (3) having an air discharge passage (11); a sleeve (4) which has a tapered outer circumferential surface (12) and is elastically deformable so as to have a reduced diameter; a transmission member (5) having a tapered inner circumferential surface (13); a plurality of balls (B) which are inserted between the tapered inner circumferential surface (13) and the tapered outer circumferential surface (12); and a suction pad (7) attached to the output rod (3) so as to communicate with the air discharge passage (11).

A vacuum cup connected to a robotic arm for picking and placing items is disclosed. The vacuum cup includes one or more walls that defines (i) a first internal cavity and (ii) an opening to the first internal cavity, wherein the first internal cavity is defined at least in part by an interior surface adjacent to the opening to the first internal cavity, the interior surface defining an internal ridge positioned to mechanically engage a material drawn into the first internal cavity through the opening at an angle such that the mechanical engagement resists the material being removed from the first internal cavity via the opening. In response to the item being engaged and the suction system controlling the pressure within the first internal cavity to create a vacuum seal between the vacuum cup and the item, at least part of the item is caused to enter the first internal cavity at least during engagement of the vacuum seal.

A system for laser processing includes a plate assembly having a first plate, a second plate secured to the first plate, and a pressure chamber located between the plates, a connector extending into and in fluid communication with the pressure chamber, and a fixture having a first end attached to the second plate of the plate assembly, a second end having surface having at least one opening and shaped to fit a part to be retained and laser processed, and a conduit extending therethrough in fluid communication with the pressure chamber and the at least one opening. During use, a pressure generated by a pump may be communicated to the conduit of the fixture through the pressure chamber to provide pressure (e.g., a suction effect) at the opening(s) to secure the part in place, e.g., with respect to another part, so they can be laser processed.

An apparatus for securing a substrate includes a detachable plate configured to reversibly attach to a base of a chuck. The base of the chuck includes one or more base-substrate vacuum inlet channels and one or more base-plate inlet channels. The detachable plate includes one or more first vacuum reservoirs and second vacuum reservoirs. The detachable plate is further configured to establish a fluidic connection between the one or more first vacuum reservoirs and the base-plate inlet channels for forming a first vacuum seal between the detachable plate and the base. The detachable plate further includes one or more pass-through channels for fluidic connection with the one or more second vacuum reservoirs for forming a second vacuum seal between the detachable plate and the substrate.

A method for unloading a substrate from a support table configured to support the substrate, the method including: supplying gas to a gap between a base surface of the support table and the substrate via a plurality of gas flow openings in the support table, wherein during an initial phase of unloading the gas is supplied through at least one gas flow opening in an outer region of the support table and not through any gas flow opening in a central region of the support table radially inward of the outer region, and during a subsequent phase of unloading the gas is supplied through at least one gas flow opening in the outer region and at least one gas flow opening in the central region.

A vacuum holder for articles, a combination of a vacuum holder and an article, a system for holding and conveying articles, and a method for holding and conveying articles are disclosed. The vacuum holder includes a main body having a surface and an air passageway leading to the surface, and a valve joined to the main body and in fluid communication with the air passageway. The vacuum holder includes an extensible skirt gasket with an opening therein. An article can be placed adjacent to the surface of the main body, and a vacuum can be drawn through the air passageway to hold the article to the vacuum holder. The valve maintains the vacuum between the article and the vacuum holder without being connected to a vacuum source, until it is desired to release the article from the vacuum holder.

Disclosed are a negative pressure driven sucking apparatus and a preparation method thereof. The sucking apparatus comprises a sucking disc body, wherein a negative pressure cavity is formed in the middle of the sucking disc body, and the negative pressure cavity is connected with a vacuum line, and the bottom of the negative pressure cavity having a flexible section, and an annular wedge-shaped microstructure is formed at the bottom of the body surrounding the flexible section. Stable loading and release processes of the annular wedge-shaped microstructure are realized.