A substrate accommodating device accommodating a substrate transferred by a transfer device having an end effector configured to hold a substrate and a member including a consumable part disposed in a substrate processing apparatus for processing the substrate includes a container. A first opening through which the end effector holding the substrate passes is formed on a sidewall of the container. A recess into which front ends of the end effector are inserted is formed on an inner surface of the container facing the first opening.

A remote arm for a manipulator is disclosed, which has a boom tube having a distal end and housing a mechanical communication chain. A floating gearbox assembly is coupled to the boom tube and has an outer framework rigidly coupled to the distal end of the boom tube. An inner framework is retained by the outer framework and is rotatable relative to the outer framework. A drive gear is disposed in the inner framework, which is in mechanical communication with the mechanical communication chain. A wrist joint has a wrist joint housing and an output gear is disposed in the wrist joint housing, where the wrist joint housing is configured to detachably couple to the outer framework. The output gear is configured to mechanically communicate with the drive gear when the wrist joint housing is coupled to the outer framework.

A disposable isolator including a bottom, a flexible peripheral wall defining a clean and sterile inner volume, a first pair of joining parts forming a first tight junction at the bottom, this first pair including an inner part placed inside the inner volume and suitable for positioning containers, and an outer part placed outside the inner volume and suitable for cooperating by shape matching with a positioning cavity provided on a support table, and a second pair of joining parts forming a second tight junction at the peripheral wall and including an outer part suitable for being connected to a robot, and an inner part suitable for being connected to a manipulating tool, the first and second pairs being designed so that the robot applies the manipulating tool on the containers positioned on the support table.

Provided is a cell treatment apparatus that includes: an isolator; a disposal box that includes a storage part; and a decontamination unit, wherein the disposal box includes: a first opening and closing device that is configured to allow the isolator and the storage part to be communicated with each other at the time of disposal of the waste product and allow them to be shut off from each other after the putting-in of the waste product and before the disposal of the same; and a second opening and closing device that is configured to allow the storage part and the outside to be communicated with each other at the time of disposal of the waste product, which has been put into the storage part, and allow them to be shut off from each other after the disposal of the waste product.

The transport device provided in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction, the transport device comprising: a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber; a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall; and a mobile buffer configured to: hold the substrate; and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position, wherein the movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.

A clean room single-axis robot in which a dust collection system is used includes a transfer unit installed inside a clean room to transfer an assembly part in the forward/backward direction and an elevating unit installed on one side of the transfer unit to transfer an assembly part in the upward/downward direction. The transfer unit includes a horizontal profile, first covers, a first guide unit, a driving belt, a plurality of rollers, and a forward/backward movement unit. A dust collection system of the transfer unit has an open structure, and is configured to suction the air accommodated inside the horizontal profile, collect dust contained in the air, and then discharge the air.

A holding device for holding a carrier or a component in a vacuum chamber is described. The holding device includes one or more electric controllable holding elements, a housing for at least partially housing the one or more electric controllable holding elements, the housing having a reception for the one or more electric controllable holding elements, a sealing for providing an air-tight sealing between the housing and the one or more electric controllable holding elements being arranged in the reception; and an air-tight connection for an electric supply line for the one or more electric controllable holding elements. Further, a method of producing a holding device, an apparatus for handling a carrier in a vacuum chamber, and a vacuum deposition system are described.

The invention relates to a sealing and guiding system for a packaging machine having a processing zone and an activation zone adjacent each other. The system has a separating wall, for separating the processing zone from the activation zone; at least a movement actuating element, which develops from the activation zone to the processing zone, crossing the separating wall and that has a longitudinal developing axis; movement actuating means, arranged in the activation zone, for moving the movement actuating element at least along a first direction transverse to the respective axis.

The arrangement for the contamination-free introduction of a sterile object (3) from a vessel (2), which has been closed by means of a semipermeable cover (23), into a working chamber (90), which is surrounded by a wall (91), of a containment (9) firstly comprises a portal unit (7) having an access flange (71) which is arranged in the wall (91) and which forms a passage (75) from the outside into the working chamber (90), and a door (5) which sealingly closes the passage (75) and which, in order to be opened, can be moved into the working chamber (90). The arrangement furthermore comprises a vessel receptacle (6) having a repository (60) for holding a vessel (2) that has been introduced into the vessel receptacle (6), an opening for the introduction of the vessel (2) into the repository (60), and a flange (61) for interacting with the access flange (71). The arrangement furthermore includes a decontamination unit (4) which is designed to, when the door (5) has been closed, the vessel receptacle (6) has been docked to the access flange (71) and the vessel (2) has been stored in the vessel receptacle (6), decontaminate an outer surface, facing toward the door (5), of the cover (23). Based on this arrangement, a method for introduction is also disclosed.

An autoteach enclosure system includes a plurality of surfaces that at least partially enclose an interior volume of the autoteach enclosure system. The autoteach enclosure system further includes an autoteach pin at least partially disposed within the interior volume. The autoteach pin is a scannable feature having a fixed position within the autoteach enclosure system. The autoteach enclosure system further includes a front interface coupled to one or more of the plurality of surfaces to interface the autoteach enclosure system with a substantially vertical portion of a load port of a wafer processing system. The autoteach pin enables an autoteach operation of a robot arm of the wafer processing system. The autoteach operation is an operation to automatically teach the fixed position within the autoteach enclosure system to the robot arm of the wafer processing system.