An imprint apparatus includes a processing unit that forms a pattern of an imprint material on a substrate by using a mold, a chamber that accommodates this processing unit and includes a first gate to which a first containment unit that contains the substrate before being processed by the processing unit is connected and a second gate to which a second containment unit that contains the substrate after being processed by the processing unit is connected, and a control unit that prohibits opening of the first gate until a predetermined time elapses since the substrate on which the pattern is formed by the processing unit is contained in the second containment unit and the second gate is closed.

An imprint device that can simply detect an abnormality such as dirt of a mold chuck is provided. The imprint device includes a holding mechanism configured to hold a mold, a mold shape correcting mechanism configured to modify a shape of the mold, a mold shape measuring unit configured to measure the shape of the mold, and a determination unit configured to determine whether there is dirt on a mold holding surface of the holding mechanism or the mold based on mold modification characteristics which are measured by the mold shape measuring unit with respect to target mold modification values in the mold shape correcting mechanism.

A molding apparatus that molds a composition on a substrate with a mold includes a mold holding unit configured to hold the mold, a substrate holding unit configured to hold the substrate, a first elastic member configured to apply a first elastic force to the mold holding unit in a direction away from the substrate holding unit, and a control unit configured to cause the mold holding unit to move in the direction away from the substrate holding unit in a case where the control unit determines that an abnormality has occurred.

A method of controlling a control apparatus for controlling a forming apparatus operable to form a layer of a formable material on a substrate is provided. The method includes acquiring data that specifies a drop amount and a drop position on the substrate of each of droplets, calculating a spread of each of the droplets assuming that a spread shape of each of the droplets is a polygon, and calculating a surface area of an overlapping region in which a region of a droplet that spreads into the polygon and a region of a recessed portion in the mold to be filled with the formable material overlap, and correcting, based on a result of the calculation, the data so that the recessed portion is filled with the formable material.

The present invention provides an imprint method of forming a pattern of an imprint material on a shot region of a substrate using a mold, the method comprising: supplying the imprint material onto the shot region so as to arrange droplets of the imprint material in arrangement patterns different from each other between a first partial region and a second partial region adjacent to each other in the shot region; performing alignment between the mold and the shot region after it is started to bring the mold and the imprint material into contact with each other; performing preliminary curing of irradiating the imprint material on the shot region with light to increase a viscoelasticity of the imprint material before the alignment is completed; and performing main curing of curing the imprint material on the shot region after the alignment is completed.

A planarization apparatus that planarizes a composition on a substrate using a mold includes a substrate holding unit configured to hold the substrate, a mold holding unit configured to hold the mold, a drive unit configured to drive the substrate holding unit and the mold holding unit, a pressing member configured to press a part of the mold which is in contact with the substrate with a composition interposed therebetween to separate the substrate from the mold, and a control unit configured to control a position of the pressing member to a predetermined position.

A method is disclosed for copying a surface texture of a surface carrier object to an air tight thermoplastic surface layer of an interior cladding component of a vehicle, by fixing the airtight thermoplastic surface layer inside the pressure chamber such that the airtight thermoplastic surface layer divides the pressure chamber into a first and second pressure chamber section by positioning the surface carrier object inside the pressure chamber with a positioning device in the vicinity of the airtight thermoplastic surface layer with the surface texture facing the airtight thermoplastic surface layer. By applying a pressure difference between the first and second pressure chamber section, the airtight thermoplastic surface layer is pressed on the surface carrier object, thereby copying a surface texture of a surface carrier object to an airtight thermoplastic surface layer. An interior cladding component of a vehicle, comprising an airtight thermoplastic surface layer is also disclosed.

[Object] To provide a device for the production of a thin plate-like laminate having a film-like resin layer in which a concave/convex shape can stably be formed with high accuracy on the film-like resin layer laminated on a thin plate-like substrate.

[Achieving Means] There are provided a setting device 31 for creating a mold retention structure 100 in which molds 110 are arranged on both surface sides of a workpiece 85, a heating device 41 which heats the molds to a thermal deformation temperature of a film-like resin composition 84, a compression roller device 51 in which the mold retention structure, after heating of the molds, is introduced between two compression rollers 52, 54 and outer surfaces of the molds are compressed by, rotating the compression rollers to integrally thennocompression-bond the film-like resin composition and a substrate 81 to form a thin plate-like laminate 80 having a film-like resin layer 82, and an extraction device 61 which extracts the molds from the mold retention structure after compression.

A template and a template blank are used for imprint lithography transferring a transfer pattern in a concave and convex structure to a resin on a transfer substrate, in which a first step structure is formed on a main surface of a base, a second step structure is formed on the first step structure, and an outside region of the second step structure on an upper surface of the first step structure is covered with a light shielding film to solve the above problem.

To provide an information processing device, or the like that can reduce cost and time required for adjusting a profile of imprinting of an imprinting device, the information processing device for performing simulation of the imprinting with the imprinting device includes a curvature acquisition unit that acquires a change of a curvature of a pattern part in a vicinity of an outer circumference of a contact surface when the pattern part is brought in contact with an imprinting material in the imprinting, and a profile adjustment unit that adjusts a profile of the imprinting of the pattern part such that the curvature does not fall below a predetermined threshold.