A transfer apparatus capable of suppressing dust generation and reducing the manufacturing cost thereof is provided.

In a transfer apparatus including a transfer unit which moves on a rail to transfer an object and an arm mechanism which transmits the power from a drive source to the transfer unit, the arm mechanism includes a rotatable driving arm with one end thereof connected to the drive source, a driven arm with one end thereof connected to the transfer unit, and a gear mechanism which connects the other end of the driven arm to the other end of the driving arm and transmits the rotation of the driving arm to the driven arm.

Described herein is a conveyance robot. In certain aspects, a conveyance robot can include a first link member configured to be rotatable about a first axis, a second link member configured to be rotatable about a second axis positioned at a predetermined distance relative to the first axis, a holding member configured to be capable of holding an article and rotating about a third axis positioned at a predetermined distance relative to the second axis, an ascending and descending drive unit for driving at least the holding member to ascend and descend. In certain aspects, an arm link mechanism can be included. The arm link mechanism can be constituted by connecting the first link member, the second link member, and the holding member in this order, and the ascending and descending drive unit is placed between the first link member and the holding member so as to form a part of the arm link mechanism.

There is provided a carrier device that has a linkage arm mechanism, in particular, a carrier device that cools the linkage arm mechanism and can reduce the impact of radiation heat from a work that is in a high temperature state. A carrier device is a carrier device that includes a linkage arm mechanism and a pivot shaft, and the linkage arm mechanism includes lower arms and upper arms, and one ends of which are respectively connected to the lower arms, and horizontal movement members that support a work that is connected to the other ends of the upper arms, and cooling plates are respectively arranged between the upper arms, and the horizontal movement members.

The invention relates to a system and a method for the multi-step processing of planar substrates, more particularly planar glass substrates, on a substrate carrier, wherein a plurality of mutually spatially separated processing stations are interconnected by means of a substrate-carrier conveying device, and wherein a substrate carrier is conveyed from one processing station to the next processing station by means of the substrate-carrier conveying device in order to subject a planar substrate laid on a substrate carrier to a plurality of processing steps in succession.

A factory transition system and a transition device thereof are provided. The transition device is provided for being disposed on a partition wall that separates two rooms from each other, and includes a chamber and a filtering module assembled to the chamber. The chamber has a transition channel formed therein. The transition channel has two entrances respectively arranged on two ends thereof. The chamber is configured to correspond in position to the communication opening of the partition through one of the two entrances. The filtering module is spatially communicated with the transition channel. The filtering module is configured to perform a ventilation and filtration process for continuously suctioning air from an external environment of the transition device into the transition channel after filtering the air.