A substrate transfer device includes a housing accommodating a carrier for storing a substrate, a carrier lifter moving the carrier in a vertical direction relative to an upper surface of the housing, a vertical stabilization unit connected to a lower part of the carrier lifter and reducing a vertical vibration of the carrier, a rotation stabilization unit connected to a lower part of the vertical stabilization unit and reducing rotation of the carrier, and a carrier holder connected to a lower part of the rotation stabilization unit. The carrier holder holds the carrier. The vertical stabilization unit includes an upper plate connected to the carrier lifter, a lower plate connected to the rotation stabilization unit, and a buffer disposed between the upper plate and the lower plate. The buffer contracts or relaxes to reduce the vertical vibration of the carrier.

A substrate transfer device includes a housing accommodating a carrier for storing a substrate, a carrier lifter moving the carrier in a vertical direction relative to an upper surface of the housing, a vertical stabilization unit connected to a lower part of the carrier lifter and reducing a vertical vibration of the carrier, a rotation stabilization unit connected to a lower part of the vertical stabilization unit and reducing rotation of the carrier, and a carrier holder connected to a lower part of the rotation stabilization unit. The carrier holder holds the carrier. The vertical stabilization unit includes an upper plate connected to the carrier lifter, a lower plate connected to the rotation stabilization unit, and a buffer disposed between the upper plate and the lower plate. The buffer contracts or relaxes to reduce the vertical vibration of the carrier.

An overhead hoist transfer (OHT) apparatus, a guiding device of the OHT apparatus, and a direction maintaining module of the OHT apparatus are provided. The direction maintaining module includes a main channel, a first retaining channel and a second retaining channel that are spaced apart from the main channel, a switch channel, and a switching mechanism connected to the switch channel. The switch channel is disposed among the main channel, the first channel, and the second channel. The switching mechanism is configured to drive the switch channel to move between a turning position and a straight position. When the switch channel is at the turning position, the switch channel connects the main channel and the first retaining channel. When the switch channel is at the straight position, the switch channel connects the main channel and the second retaining channel.

An overhead hoist transfer (OHT) apparatus, a guiding device of the OHT apparatus, and a direction maintaining module of the OHT apparatus are provided. The direction maintaining module includes a main channel, a first retaining channel and a second retaining channel that are spaced apart from the main channel, a switch channel, and a switching mechanism connected to the switch channel. The switch channel is disposed among the main channel, the first channel, and the second channel. The switching mechanism is configured to drive the switch channel to move between a turning position and a straight position. When the switch channel is at the turning position, the switch channel connects the main channel and the first retaining channel. When the switch channel is at the straight position, the switch channel connects the main channel and the second retaining channel.

An overhead hoist transfer (OHT) apparatus and a differential overhead trolley thereof are provided. The OHT apparatus includes a rail module and a differential overhead trolley. The rail module includes a main rail and a first rail, and defines a turning path extending from the main rail to the first rail. The differential overhead trolley is movably disposed on the rail module, and includes a walking mechanism and a carrying body that is hung on the rail module by being connected to the walking mechanism. The walking mechanism includes two differential wheels and a driving unit that is connected to the two differential wheels. When the differential overhead trolley is moved along the turning path, the driving unit is configured to drive the two differential wheels to move along the first rail by different rolling velocities.

An overhead hoist transfer (OHT) apparatus and a differential overhead trolley thereof are provided. The OHT apparatus includes a rail module and a differential overhead trolley. The rail module includes a main rail and a first rail, and defines a turning path extending from the main rail to the first rail. The differential overhead trolley is movably disposed on the rail module, and includes a walking mechanism and a carrying body that is hung on the rail module by being connected to the walking mechanism. The walking mechanism includes two differential wheels and a driving unit that is connected to the two differential wheels. When the differential overhead trolley is moved along the turning path, the driving unit is configured to drive the two differential wheels to move along the first rail by different rolling velocities.

Aspects of the present disclosure are directed toward apparatuses, systems, and methods for releasably connecting a first beam to a second beam. The apparatuses, systems, and methods may include a locking pin arranged on the first beam and configured to actuate between an unlocked position and a locked position and an arm coupled to the locking pin and extending parallel therewith. The apparatuses, systems, and methods may also include a sleeve arranged on the second beam and configured to receive the locking pin in the locked position to releasably secure the first beam to the second beam.

Aspects of the present disclosure are directed toward apparatuses, systems, and methods for releasably connecting a first beam to a second beam. The apparatuses, systems, and methods may include a locking pin arranged on the first beam and configured to actuate between an unlocked position and a locked position and an arm coupled to the locking pin and extending parallel therewith. The apparatuses, systems, and methods may also include a sleeve arranged on the second beam and configured to receive the locking pin in the locked position to releasably secure the first beam to the second beam.

Object is to provide a travel facility in which a travel member, that became incapable of traveling due to a cause other than a power supply failure, can be moved to another location on a travel path. A second travel member, provided separately from the first travel member, includes an external signal generating portion for generating an external travel control signal to be sent to a first travel actuator and a connecting portion which can transmit the external travel control signal. The first travel member includes a first connecting portion which can receive the external travel control signal and can transmit the external control signal to the first travel actuator. A connecting member for receiving and transmitting the external travel control signal is removably connected to, and between, the first connecting portion and the second connecting portion.

Object is to provide a travel facility in which a travel member, that became incapable of traveling due to a cause other than a power supply failure, can be moved to another location on a travel path. A second travel member, provided separately from the first travel member, includes an external signal generating portion for generating an external travel control signal to be sent to a first travel actuator and a connecting portion which can transmit the external travel control signal. The first travel member includes a first connecting portion which can receive the external travel control signal and can transmit the external control signal to the first travel actuator. A connecting member for receiving and transmitting the external travel control signal is removably connected to, and between, the first connecting portion and the second connecting portion.