B81B3/0062

TRIAXIAL MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED PERFORMANCES

A MEMS gyroscope has a structure with a main extension in a horizontal plane formed by first and second horizontal axes. The gyroscope includes a first driving mass that performs a translation driving movement along the second horizontal axis of the horizontal plane, and a first sensing mass, having an anchoring element arranged centrally with respect to the first sensing mass and connected to the anchoring element by an elastic arrangement. The first sensing mass is coupled to the first driving mass by an elastic coupling element and performs a rotation movement in the horizontal plane around the anchoring element, dragged by the first driving mass, and a sensing movement of rotation outside the horizontal plane around a rotation axis defined by the elastic arrangement, in response to an angular velocity around the first horizontal axis. The rotation axis extends along the second horizontal axis, parallel to the driving movement.

Image capture at varying optical powers

An imaging device includes an image pixel array and a plurality of micro-electro-mechanical systems (MEMS) Alvarez tunable lenses disposed over regions of the imaging pixels. The MEMS Alvarez tunable lenses are configured to be adjusted to varying optical powers to focus image light to the plurality of imaging pixels at varying focus depths. Processing logic is configured to drive the plurality of MEMS Alvarez tunable lenses to provide varying optical powers to focus the image light to the imaging pixels during a plurality of image captures with the imaging pixels.