A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape memory alloy. The shape memory alloy and the reflective coating form a bi-layer cantilever beam having a first end anchored to the substrate, and a second end released from the substrate. The second end of the cantilever beam articulates between a deflection configuration away from the substrate and a non-deflection configuration towards the substrate based on a thermal phase change in the shape memory alloy.

A microelectromechanical system (MEMS) actuator device includes a substrate; a shape memory alloy over the substrate; and a reflective coating on the shape memory alloy. The shape memory alloy and the reflective coating form a bi-layer cantilever beam having a first end anchored to the substrate, and a second end released from the substrate. The second end of the cantilever beam articulates between a deflection configuration away from the substrate and a non-deflection configuration towards the substrate based on a thermal phase change in the shape memory alloy.

Embodiments of the disclosure provide a micro shutter array, an optical sensing system, and an optical sensing method. The optical sensing system includes a laser emitter configured to sequentially emit a series of optical signals and a steering device configured to direct the series of optical signals in different directions towards an environment surrounding the optical sensing system. The optical sensing system further includes a receiver configured to receive the series of optical signals returning from the environment. The receiver includes a micro shutter array disposed in a light path of the returning optical signals and configured to sequentially open only a portion of the micro shutter array at a specified location at each time point, to allow the returned series of optical signals to sequentially pass through the micro shutter array. The receiver further includes a photodetector configured to receive the optical signals sequentially passed through the micro shutter array.

Embodiments of the disclosure provide a micro shutter array, an optical sensing system, and an optical sensing method. The optical sensing system includes a laser emitter configured to sequentially emit a series of optical signals and a steering device configured to direct the series of optical signals in different directions towards an environment surrounding the optical sensing system. The optical sensing system further includes a receiver configured to receive the series of optical signals returning from the environment. The receiver includes a micro shutter array disposed in a light path of the returning optical signals and configured to sequentially open only a portion of the micro shutter array at a specified location at each time point, to allow the returned series of optical signals to sequentially pass through the micro shutter array. The receiver further includes a photodetector configured to receive the optical signals sequentially passed through the micro shutter array.

A method comprising determining a concentration of one or more components of a wellbore servicing fluid during a wellbore servicing operation; and adjusting or maintaining a composition of the wellbore servicing fluid being introduced into a wellbore and/or an operational parameter of the wellbore servicing operation based on the determining of the concentration of the one or more components, wherein the determining of the concentration of the one or more components comprises contacting a sample of the wellbore servicing fluid with a microelectromechanical system (MEMS) device to provide a sample response indicative of the concentration of the one or more components.

A method comprising determining a concentration of one or more components of a wellbore servicing fluid during a wellbore servicing operation; and adjusting or maintaining a composition of the wellbore servicing fluid being introduced into a wellbore and/or an operational parameter of the wellbore servicing operation based on the determining of the concentration of the one or more components, wherein the determining of the concentration of the one or more components comprises contacting a sample of the wellbore servicing fluid with a microelectromechanical system (MEMS) device to provide a sample response indicative of the concentration of the one or more components.

Embodiments of the application provide a MEMS chip and an electrical packaging method for a MEMS chip. The MEMS chip includes a MEMS device layer, a first isolating layer located under the MEMS device layer, and a first conducting layer located under the first isolating layer. At the first isolating layer, there are a corresponding quantity of first conductive through holes in locations corresponding to conductive structures in a first region and in locations corresponding to electrodes in a second region. At the first conducting layer, there are M electrodes spaced apart from one another, and the M electrodes are respectively connected to M of the first conductive through holes. At the first conducting layer, electrodes in locations corresponding to at least some of the conductive structures in the first region are electrically connected in a one-to-one correspondence to electrodes in locations corresponding to at least some of the electrodes in the second region.

A MEMS sensor including a diaphragm, a base surface area of the diaphragm being delimited with the aid of a peripheral wall structure, and the base surface area including at least two subareas, of which at least one of the subareas is deflectably situated, and the at least two subareas being separated from one another with the aid of at least one separating structure or being delimited by the latter. The separating structure includes at least one fluid through-opening for the passage of fluid.

Methods, apparatuses and methods of manufacture are described for a MEMS mirror array with reduced crosstalk. The MEMS mirror array has a plurality of reflective surfaces wherein each reflective surface has a resonant frequency, and further wherein adjacent reflective surfaces do not have the same resonant frequency.

Methods, apparatuses and methods of manufacture are described for a MEMS mirror array with reduced crosstalk. The MEMS mirror array has a plurality of reflective surfaces wherein each reflective surface has a resonant frequency, and further wherein adjacent reflective surfaces do not have the same resonant frequency.