A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

A tank for accumulating oxygen enriched air from an oxygen concentration device is disclosed. The oxygen concentration device includes a canister including a nitrogen-adsorbent material. A compressor is coupled to the canister. The compressor compresses air for the canister to produce oxygen enriched air in a swing adsorption process. The tank includes a closed container for collecting oxygen enriched air produced in the canister. An inlet is coupled to the container. An outlet in the container allows a patient to inhale the collected oxygen enriched air. An adsorbent material within the container adsorbs oxygen enriched air added to the tank from the canister.

A stable, solid, externally dry particulate system for controlling humidity to a selected range comprising a hydrophobic silica component and a hydrophilic silica component where the hydrophobic component comprises about 4 to 10 wt. % hydrophobic nano silica particles and from about 96 to 90 wt. % of a mixture of a saturated solution of at least one soluble solid and undissolved at least one soluble solid, and the hydrophilic micro silica component comprises from about 20 to 40 wt. % hydrophilic silica particles and about 80 to 60 wt.% of the mixture of the saturated solution of at least one soluble solid and the undissolved at least one soluble solid. The saturated solution is made of at least one soluble solid dissolved into a polar liquid and has an equilibrium relative humidity when a saturated solution in the polar liquid.

A stable, solid, externally dry particulate system for controlling humidity to a selected range comprising a hydrophobic silica component and a hydrophilic silica component where the hydrophobic component comprises about 4 to 10 wt. % hydrophobic nano silica particles and from about 96 to 90 wt. % of a mixture of a saturated solution of at least one soluble solid and undissolved at least one soluble solid, and the hydrophilic micro silica component comprises from about 20 to 40 wt. % hydrophilic silica particles and about 80 to 60 wt.% of the mixture of the saturated solution of at least one soluble solid and the undissolved at least one soluble solid. The saturated solution is made of at least one soluble solid dissolved into a polar liquid and has an equilibrium relative humidity when a saturated solution in the polar liquid.

A method to purify a hydrocarbon gas with hydrogen sulfide as an impurity comprises: (a) charging a chamber with a bed of active-metal carbide of a predetermined mesh-size range; (b) conducting the hydrocarbon gas through the bed of active-metal carbide, forming additional hydrocarbon gas by reaction of the active-metal carbide and the hydrogen sulfide; and (c) filtering from the chamber the hydrocarbon gas without the hydrogen sulfide.

The present description provides low DBL bleed emission performance properties that allows the design of evaporative fuel emission control systems that are simpler and more compact than those possible by prior art by inclusion of a vent-side volume comprising a parallel passage adsorbent such as a carbon honeycomb with narrow channel width and low cell pitch.

Provided an air cleaning system, which includes: a first reactor which has a first inlet and a first outlet and in which a channel is formed; a first moisture adsorption filter and a first water-soluble gas pollutant adsorption filter that are provided inside the first reactor and are provided so that a gas passes therethrough sequentially while flowing along the channel from the first inlet to the first outlet; a plurality of first magnetrons that are provided at a lateral portion of the first reactor so as to correspond respectively to the first moisture adsorption filter and the first water-soluble gas pollutant adsorption filter and selectively apply microwaves to the first moisture adsorption filter and the first water-soluble gas pollutant adsorption filter; and a heat exchanger that receives hot air containing a water-soluble gas pollutant and moisture, both of which are desorbed from the first moisture adsorption filter and the first water-soluble gas pollutant adsorption filter and are discharged by the first outlet, condenses the moisture into water, and dissolves and discharges the water-soluble gas pollutant in the condensed water. According to the present invention, the air cleaning system can unify a dehumidifying process and a water-soluble gas pollutant removing process to simplify an air cleaning process, recover and recycle waste heat by introducing microwaves and the heat exchanger so as to contribute to energy saving, and be used semi-permanently without a need to periodically replace a filter.

A filter element (1) for use in a gas purification device (100) is disclosed. It comprises a substrate (10) and a filter layer (20) covering an exterior surface of the substrate (10). The substrate (10) comprises material for containing chemicals (30) effective to remove gas pollutants from a gas. The material of the filter layer (20) is hydrophilic to adsorb liquid solution adsorbents effective in removing gas pollutants from a gas, and the exterior surface of the substrate (10) covered by the filter layer (20) is hydrophobic.

A filter element (1) for use in a gas purification device (100) is disclosed. It comprises a substrate (10) and a filter layer (20) covering an exterior surface of the substrate (10). The substrate (10) comprises material for containing chemicals (30) effective to remove gas pollutants from a gas. The material of the filter layer (20) is hydrophilic to adsorb liquid solution adsorbents effective in removing gas pollutants from a gas, and the exterior surface of the substrate (10) covered by the filter layer (20) is hydrophobic.

A process is disclosed for the removal of hydrogen sulfide (H.sub.2S) from natural. This process provides for passing a natural gas feedstream comprising H.sub.2S though a regenerable adsorbent media which adsorbs H.sub.2S to provide an H.sub.2S-lean natural gas product and H.sub.2S. The regenerable adsorbent media of the present invention is a tertiary amine functionalized cross-linked macroporous polymeric adsorbent media.