A secondary air system for an aircraft engine comprises an air flow path communicating between a source of pressurized cooling air and an air consuming component. A filter is disposed in the air flow path upstream from the air consuming component. The filter has at least one of: openings of a size selected for capturing suspended particles; and a filter surface material for binding with chemical contaminants.

A secondary air system for an aircraft engine comprises an air flow path communicating between a source of pressurized cooling air and an air consuming component. A filter is disposed in the air flow path upstream from the air consuming component. The filter has at least one of: openings of a size selected for capturing suspended particles; and a filter surface material for binding with chemical contaminants.

A device and method of simultaneously removing flammable gases and nitrous oxide are provided. The device includes a thermal oxidation chamber, a high-temperature resistant dust filter, and a catalyst chamber. The thermal oxidation chamber is configured to receive an exhaust gas from a process tool. The exhaust gas includes flammable gases and nitrous oxide. The thermal oxidation chamber has a first exhaust pipe to emit nitrous oxide and dust generated after the exhaust gas is thermally oxidized. The high-temperature resistant dust filter receives dust and nitrous oxide from the first exhaust pipe, wherein the high-temperature resistant dust filter has a filter fiber net and a second exhaust pipe, and the second exhaust pipe is configured to emit nitrous oxide. The catalyst chamber receives nitrous oxide from the second exhaust pipe, wherein the catalyst chamber has a nitrous oxide decomposition catalyst to decompose nitrous oxide into nitrogen and oxygen.

An apparatus for treating gaseous pollutants includes a gas inlet part, a first treatment unit, a second treatment unit and a non-mechanical flow-guiding device. The gas inlet part includes a gas inlet chamber and at least one guide pipe. The guide pipe communicates with the gas inlet chamber and guides an effluent stream from a semiconductor process to the gas inlet chamber. The first treatment unit is coupled to a bottom end of the gas inlet part and is configured to abate the effluent stream. The non-mechanical flow-guiding device is coupled to the first treatment unit. The flow-guiding device is configured to guide the effluent stream to move toward an opening. The second treatment unit is coupled to the flow-guiding device via the opening, receives the effluent stream from the first treatment unit and further abates the effluent stream.

An apparatus for treating gaseous pollutants includes a gas inlet part, a first treatment unit, a second treatment unit and a non-mechanical flow-guiding device. The gas inlet part includes a gas inlet chamber and at least one guide pipe. The guide pipe communicates with the gas inlet chamber and guides an effluent stream from a semiconductor process to the gas inlet chamber. The first treatment unit is coupled to a bottom end of the gas inlet part and is configured to abate the effluent stream. The non-mechanical flow-guiding device is coupled to the first treatment unit. The flow-guiding device is configured to guide the effluent stream to move toward an opening. The second treatment unit is coupled to the flow-guiding device via the opening, receives the effluent stream from the first treatment unit and further abates the effluent stream.

An apparatus for trapping an exhaust material from a substrate-processing process includes: a cyclone configured to provide the exhaust material with a swirling flow, wherein the exhaust material is discharged from the substrate-processing process using a reaction gas; an atomization module for providing the cyclone with a mist to convert the exhaust material into a powder through a wet oxidation reaction, and a collector configured to collect the powder.

An apparatus for trapping an exhaust material from a substrate-processing process includes: a cyclone configured to provide the exhaust material with a swirling flow, wherein the exhaust material is discharged from the substrate-processing process using a reaction gas; an atomization module for providing the cyclone with a mist to convert the exhaust material into a powder through a wet oxidation reaction, and a collector configured to collect the powder.

A method is described for mixing gas and liquid for gravitational, physical and chemical collection of compounds or particles, based on decreasing of the compounds free mean path in a vessel, and comprising the steps of: gravitational depletion, involving abating compounds and liquid chemical solution drops with higher diameter than higher volume; physical deposition, involving the condensation of abated compounds on a wet surface of the vessel; chemical adsorption, involving chemical reaction between the abated compounds and the species in the liquid chemical solution.

A method is described for mixing gas and liquid for gravitational, physical and chemical collection of compounds or particles, based on decreasing of the compounds free mean path in a vessel, and comprising the steps of: gravitational depletion, involving abating compounds and liquid chemical solution drops with higher diameter than higher volume; physical deposition, involving the condensation of abated compounds on a wet surface of the vessel; chemical adsorption, involving chemical reaction between the abated compounds and the species in the liquid chemical solution.

Disclosed is an apparatus for preparing phosphoric acid from a fume exiting the kiln in a kiln phosphoric acid process, the apparatus comprises a hydration tower and an acid solution cyclical spraying system, a fume inlet of the fume exiting the kiln is disposed at a lower portion of the hydration tower, a fume outlet after hydration and absorption is disposed at the top, a spraying device is disposed in a cavity of the hydration tower above the fume inlet, a liquid inlet of the acid solution cyclical spraying system is disposed on a bottom of the hydration tower, a liquid outlet of the acid solution cyclical spraying system is connected to a liquid intake pipe of the spraying device. The present invention has the advantages of simple structure, reasonable layout, strong adaptability, high raw material utilization rate, reduced contaminant emissions, and high recovery rate of phosphoric acid etc.