A method for operating an electronic device manufacturing system is provided that includes introducing an inert gas into a process tool vacuum pump at a first flow rate while the process tool is operating in a process mode, and introducing the inert gas into the process tool vacuum pump at a second flow rate while the process tool is operating in a chamber clean mode. Numerous other embodiments are provided.

A method for operating an electronic device manufacturing system is provided that includes introducing an inert gas into a process tool vacuum pump at a first flow rate while the process tool is operating in a process mode, and introducing the inert gas into the process tool vacuum pump at a second flow rate while the process tool is operating in a chamber clean mode. Numerous other embodiments are provided.

An improved cluster-supporting catalyst has heteroatom-removed zeolite particles, and catalyst metal clusters supported within the pores of the heteroatom-removed zeolite particles. A method for producing a cluster-supporting catalyst includes the following steps: providing a dispersion liquid containing a dispersion medium and the heteroatom-removed zeolite particles dispersed in the dispersion medium; and in the dispersion liquid, forming catalyst metal clusters having a positive charge, and supporting the catalyst metal clusters within the pores of the heteroatom-removed zeolite particles through an electrostatic interaction.

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.

An efficient long-service-life blowing method include the steps of introducing vanadium extraction converter flue gas and decarburization converter flue gas into an oxygen combustor; obtaining first-purity CO.sub.2—N.sub.2 mixed gas through the vanadium extraction converter flue gas; obtaining second-purity CO.sub.2—N.sub.2 mixed gas through the decarburization converter flue gas; obtaining O.sub.2—CO.sub.2—N.sub.2 mixed gas through the decarburization converter flue gas; obtaining first-purity CO.sub.2 gas through the second-purity CO.sub.2—N.sub.2 mixed gas; and using the first-purity CO.sub.2—N.sub.2 mixed gas for bottom blowing of the vanadium extraction converter, using the second-purity CO.sub.2—N.sub.2 mixed gas as a carrier gas for blowing iron ore powder into the vanadium extraction converter, and using the O.sub.2—CO.sub.2—N.sub.2 mixed gas and the first-purity CO.sub.2 gas as a carrier gas for bottom blowing of the decarburization converter and bottom injecting of lime powder into the decarburization converter.

An efficient long-service-life blowing method include the steps of introducing vanadium extraction converter flue gas and decarburization converter flue gas into an oxygen combustor; obtaining first-purity CO.sub.2—N.sub.2 mixed gas through the vanadium extraction converter flue gas; obtaining second-purity CO.sub.2—N.sub.2 mixed gas through the decarburization converter flue gas; obtaining O.sub.2—CO.sub.2—N.sub.2 mixed gas through the decarburization converter flue gas; obtaining first-purity CO.sub.2 gas through the second-purity CO.sub.2—N.sub.2 mixed gas; and using the first-purity CO.sub.2—N.sub.2 mixed gas for bottom blowing of the vanadium extraction converter, using the second-purity CO.sub.2—N.sub.2 mixed gas as a carrier gas for blowing iron ore powder into the vanadium extraction converter, and using the O.sub.2—CO.sub.2—N.sub.2 mixed gas and the first-purity CO.sub.2 gas as a carrier gas for bottom blowing of the decarburization converter and bottom injecting of lime powder into the decarburization converter.

In a method for treating combustible and/or reactive particles (34) which have been separated from a gas stream (32) by means of a separation device (36) an oxidizing agent is supplied to an atmosphere surrounding the particles (34) so as to cause a passivating oxidation of at least a part of the particles (34). A content of the oxidizing agent in the atmosphere surrounding the particles (34) is detected and the supply of the oxidizing agent to the atmosphere surrounding the particles (34) is controlled in dependence on the detected content of the oxidizing agent in the atmosphere surrounding the particles (34).

In a method for treating combustible and/or reactive particles (34) which have been separated from a gas stream (32) by means of a separation device (36) an oxidizing agent is supplied to an atmosphere surrounding the particles (34) so as to cause a passivating oxidation of at least a part of the particles (34). A content of the oxidizing agent in the atmosphere surrounding the particles (34) is detected and the supply of the oxidizing agent to the atmosphere surrounding the particles (34) is controlled in dependence on the detected content of the oxidizing agent in the atmosphere surrounding the particles (34).

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.