The present invention provides an energy-efficient method and apparatus that can achieve exhaust gas abatement with a minimum use of diluent nitrogen gas. More specifically, the present invention is directed to a method and apparatus for exhaust gas abatement under reduced pressure, in which an exhaust gas supplied from an exhaust gas source via a vacuum pump is decomposed by heat of a high-temperature plasma under a reduced pressure.

An object of the present invention is to provide a chemical liquid purification method which makes it possible to obtain a chemical liquid having excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid. The chemical liquid purification method according to an embodiment of the present invention is a chemical liquid purification method including obtaining a chemical liquid by purifying a substance to be purified containing an organic solvent, in which a content of the stabilizer in the substance to be purified with respect to the total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm.

An object of the present invention is to provide a chemical liquid purification method which makes it possible to obtain a chemical liquid having excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid. The chemical liquid purification method according to an embodiment of the present invention is a chemical liquid purification method including obtaining a chemical liquid by purifying a substance to be purified containing an organic solvent, in which a content of the stabilizer in the substance to be purified with respect to the total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm.

An object of the present invention is to provide a chemical liquid purification method which makes it possible to obtain a chemical liquid having excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid. The chemical liquid purification method according to an embodiment of the present invention is a chemical liquid purification method including obtaining a chemical liquid by purifying a substance to be purified containing an organic solvent, in which a content of the stabilizer in the substance to be purified with respect to the total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm.

An object of the present invention is to provide a chemical liquid purification method which makes it possible to obtain a chemical liquid having excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid. The chemical liquid purification method according to an embodiment of the present invention is a chemical liquid purification method including obtaining a chemical liquid by purifying a substance to be purified containing an organic solvent, in which a content of the stabilizer in the substance to be purified with respect to the total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm.

A catalyst for catalytic oxidation-deoxidation method of unsaturated hydrocarbon-containing gas has a carrier, an active component, a first co-agent component, and a second co-agent component loaded on the carrier respectively. The active component is one or more selected from the group consisting of oxides of Pt, Pd, Ru, Rh, Ag and Ir. The first co-agent component has one or more selected from the group consisting of a rare earth metal element, a group IVB metal element and a group VIII metal element; and the second co-agent component has one or more alkali metal element and alkaline earth metal element. The deoxidation method using the catalyst eliminates the need to add a reducing gas such as H.sub.2, allows hydrocarbons to react directly with oxygen to produce CO.sub.2 and H.sub.2O, achieves the goal of deoxidating a hydrocarbon-containing tail gas, and can prevent the generation of carbon deposits.

A catalyst for catalytic oxidation-deoxidation method of unsaturated hydrocarbon-containing gas has a carrier, an active component, a first co-agent component, and a second co-agent component loaded on the carrier respectively. The active component is one or more selected from the group consisting of oxides of Pt, Pd, Ru, Rh, Ag and Ir. The first co-agent component has one or more selected from the group consisting of a rare earth metal element, a group IVB metal element and a group VIII metal element; and the second co-agent component has one or more alkali metal element and alkaline earth metal element. The deoxidation method using the catalyst eliminates the need to add a reducing gas such as H.sub.2, allows hydrocarbons to react directly with oxygen to produce CO.sub.2 and H.sub.2O, achieves the goal of deoxidating a hydrocarbon-containing tail gas, and can prevent the generation of carbon deposits.

A method includes forming a reaction bed containing feed agglomerates in a reaction chamber by heating the feed agglomerates. Individual feed agglomerates initially contain particles of a gypsum source and of a silicon source approximately homogeneously distributed throughout the individual agglomerates. The gypsum and silicon in the feed agglomerates react during the heating in the reaction chamber and, thereby, form processed agglomerates that contain silicates of calcium and an increased amount of amorphous silicon compared to the feed agglomerates before the heating. The method includes generating off gas from the reaction bed, the off gas containing oxides of sulfur, and removing the processed agglomerates from the reaction chamber.

A method includes forming a reaction bed containing feed agglomerates in a reaction chamber by heating the feed agglomerates. Individual feed agglomerates initially contain particles of a gypsum source and of a silicon source approximately homogeneously distributed throughout the individual agglomerates. The gypsum and silicon in the feed agglomerates react during the heating in the reaction chamber and, thereby, form processed agglomerates that contain silicates of calcium and an increased amount of amorphous silicon compared to the feed agglomerates before the heating. The method includes generating off gas from the reaction bed, the off gas containing oxides of sulfur, and removing the processed agglomerates from the reaction chamber.

A device and method of simultaneously removing flammable gases and nitrous oxide are provided. The device includes a thermal oxidation chamber, a high-temperature resistant dust filter, and a catalyst chamber. The thermal oxidation chamber is configured to receive an exhaust gas from a process tool. The exhaust gas includes flammable gases and nitrous oxide. The thermal oxidation chamber has a first exhaust pipe to emit nitrous oxide and dust generated after the exhaust gas is thermally oxidized. The high-temperature resistant dust filter receives dust and nitrous oxide from the first exhaust pipe, wherein the high-temperature resistant dust filter has a filter fiber net and a second exhaust pipe, and the second exhaust pipe is configured to emit nitrous oxide. The catalyst chamber receives nitrous oxide from the second exhaust pipe, wherein the catalyst chamber has a nitrous oxide decomposition catalyst to decompose nitrous oxide into nitrogen and oxygen.