An object of the present invention is to provide a chemical liquid purification method which makes it possible to obtain a chemical liquid having excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid. The chemical liquid purification method according to an embodiment of the present invention is a chemical liquid purification method including obtaining a chemical liquid by purifying a substance to be purified containing an organic solvent, in which a content of the stabilizer in the substance to be purified with respect to the total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm.

A method and apparatus for thermally processing a substrate is described. The apparatus includes a thermal processing chamber having an interior volume which includes a top portion and a side wall. The apparatus also include a getter assembly comprising a getter configured as a wire disposed in the top portion and extending into the interior volume proximal to the side wall.

A method and apparatus for thermally processing a substrate is described. The apparatus includes a thermal processing chamber having an interior volume which includes a top portion and a side wall. The apparatus also include a getter assembly comprising a getter configured as a wire disposed in the top portion and extending into the interior volume proximal to the side wall.

A method of removing cesium vapor from a cover gas stream in a nuclear reactor includes the steps of oxidizing the cesium vapor in the cover gas stream to yield cesium oxide particles and removing the cesium oxide particles using a particle filter. The method yields a filtered cover gas having zero to about 2% of the cesium vapor content of the initial cover gas stream, representing a reduction of at least about 98 percent.

A method of removing cesium vapor from a cover gas stream in a nuclear reactor includes the steps of oxidizing the cesium vapor in the cover gas stream to yield cesium oxide particles and removing the cesium oxide particles using a particle filter. The method yields a filtered cover gas having zero to about 2% of the cesium vapor content of the initial cover gas stream, representing a reduction of at least about 98 percent.

An exhaust purification system has a centrifuge filter, a first fan device, a second fan device, a pump, and an ozone generator. The centrifuge filter has a container having a waste gas treating area and a wastewater treating area. The first fan device communicates with and draws gas into the waste gas treating area. The second fan device communicates with and draws the gas out of the waste gas treating area. The pump communicates with and draws wastewater from the wastewater treating area. The ozone generator communicates with the pump and introduces ozone into the wastewater inside the pump. A part of the ozone dissolved in the wastewater is released to the waste gas treating area to react with the gas, and the other part of the ozone dissolved in the wastewater reacts with the wastewater.

An exhaust purification system has a centrifuge filter, a first fan device, a second fan device, a pump, and an ozone generator. The centrifuge filter has a container having a waste gas treating area and a wastewater treating area. The first fan device communicates with and draws gas into the waste gas treating area. The second fan device communicates with and draws the gas out of the waste gas treating area. The pump communicates with and draws wastewater from the wastewater treating area. The ozone generator communicates with the pump and introduces ozone into the wastewater inside the pump. A part of the ozone dissolved in the wastewater is released to the waste gas treating area to react with the gas, and the other part of the ozone dissolved in the wastewater reacts with the wastewater.

An aircraft fuel tank inerting system includes an inlet, an oxygen absorption unit, and a vent to discharge oxygen from the system. The inlet may be configured to be in fluid communication with a ullage of a fuel tank. In embodiments, the oxygen absorption unit is in communication with the inlet and includes a chamber, a temperature reversible oxygen absorption medium within said chamber, and a temperature controller for selectively heating or cooling the medium. The reversible oxygen absorption medium may be a medium which absorbs oxygen by chemisorption.

An aircraft fuel tank inerting system includes an inlet, an oxygen absorption unit, and a vent to discharge oxygen from the system. The inlet may be configured to be in fluid communication with a ullage of a fuel tank. In embodiments, the oxygen absorption unit is in communication with the inlet and includes a chamber, a temperature reversible oxygen absorption medium within said chamber, and a temperature controller for selectively heating or cooling the medium. The reversible oxygen absorption medium may be a medium which absorbs oxygen by chemisorption.

Methods of producing a treated gas by removing nitrogenous compounds are disclosed. Methods of recovering nitrogenous compounds from a gas stream are disclosed. Methods of producing a fertilizer product from organic waste are disclosed. The methods may include introducing a gas stream having nitrogenous compounds into a nitrogenous liquid containing a salt of ammonia to absorb the nitrogenous compounds in the liquid and produce a treated gas. The methods may also include controlling the pH of certain solutions or introducing an oxidant into certain solutions to produce nitrogen ions. Systems for removing nitrogenous compounds including a reaction subsystem, an oxidation control subsystem, a dissolved solids concentrator, and a recirculation line are also disclosed. The systems may be employed to remove nitrogenous compounds from a gas stream, recover the nitrogenous compounds from the gas stream, or produce a fertilizer product from the recovered nitrogenous compounds.