An apparatus for pyrolysis of a mixed plastic stream that contains polyvinyl chloride (PVC) is provided in which the chloride from PVC is removed from an initial melting reactor that heats the mixed plastic stream to a sufficient temperature to produce HCl but at a low enough temperature to avoid production of organochlorides. Chloride is primarily removed in a vapor stream from the initial melting reactor, while additional chloride removal may be removed downstream from the melting reactor by the use of sorbent addition to the pyrolysis reactor and by subsequent adsorbent beds.

Provided is a gas adsorption sheet for a secondary battery, which contains gas adsorbent particles excellent in gas adsorption property, and allows the gas adsorption performance of the gas adsorbent particles to be sufficiently exhibited. According to one embodiment of the present invention, there is provided a gas adsorption sheet for a secondary battery, including: a heat-resistant base material; and a gas adsorption layer arranged on at least one surface of the heat-resistant base material, wherein the gas adsorption layer contains: a binder resin; and gas adsorbent particles each of which is formed of an inorganic porous material having pores, and is capable of adsorbing a gas.

Implementations of the present disclosure relate to systems and techniques for abating F-gases present in the effluent of semiconductor manufacturing processes. In one implementation, a water and oxygen delivery system for a plasma abatement system is provided. The water and oxygen delivery system comprises a housing that includes a floor and a plurality of sidewalls that define an enclosed region. The water and oxygen delivery system further comprises a cylindrical water tank positioned on the floor, wherein a longitudinal axis of the cylindrical water tank is parallel to a plane defined by the floor and a length of the water tank is 1.5 times or greater than the diameter of the cylindrical water tank. The water and oxygen delivery system further comprises a flow control system positioned within the housing above the cylindrical water tank.

Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.

An inlet assembly for a an abatement burner includes: an inlet conduit operable to convey an effluent gas stream to be treated from an inlet aperture via a bore to an outlet aperture for treatment; and a lance conduit operable to convey a fuel gas from a gas inlet aperture via a gas bore to a gas outlet aperture positioned within the bore for mixing with the effluent gas stream, a cross-sectional area of the gas bore increasing towards the gas outlet aperture. In this way, the expansion caused by the increasing cross-sectional area of the gas bore enhances the mixing of the fuel gas with the effluent gas stream which provides for improved destruction and removal efficiencies (DRE), which enables the inlet assembly to be operated with reduced quantities of fuel gas, while still maintaining required levels of DRE.

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.

The present invention relates to a method of concentrating an aqueous solution by low pressure under a zero osmotic pressure difference condition, and more particularly to a method of concentrating a solute-containing aqueous solution by low pressure under a zero osmotic pressure difference condition. When the method of the present invention is used, there are advantages in that energy consumption is low, and an aqueous solution can be concentrated until it can reach the maximum solute concentration or a solute concentration of 100%, without having to use an extraction solvent. In addition, there is an advantage in that the need to use a separate osmotic pressure draw solution is eliminated.

A piping apparatus includes an exhaust pipe providing a passage through which the exhaust gas discharged, and a harmful gas treatment device positioned between a rear end of the vacuum pump and a front end of the exhaust pipe or positioned on the exhaust pipe, wherein the harmful gas treatment device includes a heating means for increasing the temperature of the exhaust gas so as to prevent a sublimable component, from among components included in the exhaust gas, from being sublimated and accumulated inside the exhaust pipe, and the heating means is positioned on a section including a sublimation condition occurrence point, at which a sublimation condition of the sublimable component occurs, and an upstream side of the sublimation condition occurrence point on the exhaust pipe, and the sublimation condition is a temperature condition for the pressure of the sublimable component.

An inlet assembly for a burner includes a manifold having an inlet aperture and a coaxially aligned outlet aperture, the manifold having a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying an effluent gas from an inlet pipe coupleable with the inlet aperture to the outlet aperture for delivery to a combustion chamber of the burner. A nozzle bore scraper is housed within the nozzle bore. An actuator is operable to reciprocate the nozzle bore scraper relative to the nozzle bore, the nozzle bore scraper reciprocating along the longitudinal axis within the nozzle bore between a rest position and an actuated position to reduce effluent gas deposits within the nozzle bore.