A laser gas purifying system is configured to purify emission gas emitted from an ArF excimer laser apparatus using laser gas including xenon gas and to supply the purified gas to the ArF excimer laser apparatus. The laser gas purifying system comprises a xenon trap configured to reduce xenon gas concentration in the emission gas, and a xenon-adding unit configured to add xenon gas to the emission gas passed through the xenon trap.

The present invention relates, in general, to the purification of boron trichloride (BCl.sub.3). More particularly, the invention relates to a process for minimizing silicon tetrachloride (SiCl.sub.4) formation in BCl.sub.3 production and/or the removal of SiCl.sub.4 in BCl.sub.3 product stream by preventing/minimizing the silicon source in the reaction chambers. In addition, a hydride material may be used to convert any SiCl.sub.4 present to SiH.sub.4 which is easier to remove. Lastly freeze separation would replace fractional distillation to remove SiCl.sub.4 from BCl.sub.3 that has been partially purified to remove light boilers.

A device of purifying a fluoride in a semiconductor process waste gas includes a reaction chamber formed in a waste gas treating tank, and a heat pipe disposed in the waste gas treating tank and inserted into the reaction chamber. A water injection pipe is disposed at the outside end of the heat pipe formed at an outside of the waste gas treating tank, a heating rod is disposed in and passes through the heat pipe, a passage is formed between the heating rod and the heat pipe, water is guided and enters into the passage by the water injection pipe, the water in the passage contacts with the heating rod to produce a mist gaseous water at a high temperature, the mist gaseous water is guided and enters into the reaction chamber via the plurality of spit-outs to dissolve the fluoride to be reacted into a hydrogen fluoride, and a dissolving temperature of the mist gaseous water contacting with the fluoride is 3701300 C.

The present invention relates generally to the field of emission control equipment for boilers, heaters, kilns, or other flue gas-, or combustion gas-, generating devices (e.g., those located at power plants, processing plants, etc.) and, in particular to a new and useful method and apparatus for: (a) achieving a reduction in the level of one or more halogens, or halogen-containing compounds, necessary to affect gas-phase mercury control; (b) permitting the oxidation of at least a portion of any elemental mercury (Hg.sup.0) contained in a flue gas and/or combustion gas stream; and/or (c) permitting the oxidation of at least a portion of any elemental mercury (Hg.sup.0) contained in a flue gas and/or combustion gas stream so that the use of at least one post-oxidation mercury capture method and/or process results in the capture of at least a portion of oxidized mercury contained in the flue gas and/or combustion gas stream.

A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.

A tetrafluoroethylene polymer is provided in an air filter medium having a pressure loss that can be reduced and made uniform at a plurality of positions. The tetrafluoroethylene polymer may also be provided in an air filter medium, a filter pack, or an air filter unit. The tetrafluoroethylene polymer has drawability and non-melt processability. The tetrafluoroethylene polymer has a ratio S.sub.2/S.sub.1 of 0.60 or more, where S.sub.2 represents an endotherm mJ/mg in a range of T.sub.0 C. or higher and 350 C. or lower, T.sub.0 C. is a temperature 2.5 C. lower than a temperature T.sub.p C. (340T.sub.p345) at which a minimum point is given on a heat-of-fusion curve obtained by measuring an unbaked polymer for measurement having no history of heating to a temperature of 300 C. or higher using a differential scanning calorimeter at a temperature-increasing rate of 2 C./min, and S.sub.1 represents an endotherm mJ/mg in a range of 320 C. or higher and T.sub.0 C. or lower.

A filtration membrane including a first layer having a triamine-functionalized copper oxide polysilicate mesoporous material, a second layer including a polysulfone, and a third layer including a polyester terephthalate. The triamine-functionalized copper oxide polysilicate mesoporous material includes a copper oxide polysilicate backbone and a silicon atom of a silicon-containing triamine bonded to a silicate group in the copper oxide polysilicate backbone. The copper oxide polysilicate backbone is datively bonded to one or more tetramines, and the silicon-containing triamine and one or more tetramines are covalently cross-linked with terephthaloyl chloride to form a polyamide.

A plant and a related method for the regeneration of fluorinated compounds, particularly sulfur hexafluoride, includes an inlet section designed to receive a gas mixture with the fluorinated compound to be regenerated, an outlet section designed to convey out the regenerated gas, and a fluid dynamic circuit that connects the inlet section to the outlet section and includes filtering elements. The filtering elements have a separation unit where the gas mixture is brought to a temperature and pressure that cause the fluorinated compound to condense while keeping the other components of the mixture in the gaseous state. The condensed fluorinated compound represents the regenerated compound to be conveyed toward the outlet section.

A method and composition of matter for detecting and decontaminating hazardous chemicals, the composition of matter including: a magnetic material for any of chemisorbing, molecularly dissociating, or decomposing a hazardous chemical, wherein the magnetic material changes its magnetic moment upon any of chemisorption, decomposition, and molecular dissociation of the hazardous chemical and the change in magnetic moment is used to detect the presence of the hazardous chemical, and wherein the hazardous chemical includes any of toxic industrial chemicals, chemical warfare agents, and chemical warfare agent related compounds.

A method and composition of matter for detecting and decontaminating hazardous chemicals, the composition of matter including: a magnetic material for any of chemisorbing, molecularly dissociating, or decomposing a hazardous chemical, wherein the magnetic material changes its magnetic moment upon any of chemisorption, decomposition, and molecular dissociation of the hazardous chemical and the change in magnetic moment is used to detect the presence of the hazardous chemical, and wherein the hazardous chemical includes any of toxic industrial chemicals, chemical warfare agents, and chemical warfare agent related compounds.