This invention relates to a Cu-BTC MOF which is water stable. The Cu-BTC MOF has been modified by substituting some of the BTC ligand (1,3,5, benzene tricarboxylic acid) with 5-aminoisophthalic acid (AIA). The resultant MOF retains at least 40% of its as synthesized surface area after exposure to liquid water at 60° C. for 6 hours. This is an unexpected result versus the MOF containing only the BTC ligand. This MOF can be used to abate contaminants such as ammonia in gas streams and especially air streams.

An object of the present invention is to provide a new frameless catalytic thermal oxidation device capable of treating concentrations of harmful materials including NOx at a low temperature. Further, another object of the present invention is to provide a frameless catalytic thermal oxidation device capable of minimizing the occurrence of THC and minimizing a risk of accidents and environmental pollution which may occur in maintenance operations. According to the objects, the present invention provides a cartridge-type thermal oxidation device capable of being separated for maintenance, wherein a cartridge internal structure is configured so that the time while the material to be treated stays in a zone with the catalyst is increased, and a member capable of dropping and collecting powder generated by thermal oxidation reaction is configured.

Disclosed is an apparatus for preparing phosphoric acid from a fume exiting the kiln in a kiln phosphoric acid process, the apparatus comprises a hydration tower and an acid solution cyclical spraying system, a fume inlet of the fume exiting the kiln is disposed at a lower portion of the hydration tower, a fume outlet after hydration and absorption is disposed at the top, a spraying device is disposed in a cavity of the hydration tower above the fume inlet, a liquid inlet of the acid solution cyclical spraying system is disposed on a bottom of the hydration tower, a liquid outlet of the acid solution cyclical spraying system is connected to a liquid intake pipe of the spraying device. The present invention has the advantages of simple structure, reasonable layout, strong adaptability, high raw material utilization rate, reduced contaminant emissions, and high recovery rate of phosphoric acid etc.

In some embodiments, a side storage pod apparatus of an equipment front end module (EFEM) includes a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module. The EFEM further includes a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon. The EFEM further includes a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber and an exhaust port coupled to the plenum chamber.

An air filter medium reduces a decrease in collection efficiency in the case where a main collection layer and a pre-collection layer having a lower collection efficiency than the main collection layer are used. An air filter medium that collects dust in gas includes a main collection layer and a pre-collection layer that has a lower collection efficiency of NaCl particles having a particle size of 0.3 μm than the main collection layer, is disposed on an upstream side of an air flow with respect to the main collection layer, and has water repellency.

A method and composition of matter for detecting and decontaminating hazardous chemicals, the composition of matter including: a magnetic material for any of chemisorbing, molecularly dissociating, or decomposing a hazardous chemical, wherein the magnetic material changes its magnetic moment upon any of chemisorption, decomposition, and molecular dissociation of the hazardous chemical and the change in magnetic moment is used to detect the presence of the hazardous chemical, and wherein the hazardous chemical includes any of toxic industrial chemicals, chemical warfare agents, and chemical warfare agent related compounds.

A method of obtaining helium from a process gas. The process gas is at a pressure less than 15 bar to a first membrane separation stage having a first membrane more readily permeable for helium than for at least one other component in the process gas. A first retentate stream is fed to a second membrane separation stage having a second membrane more readily permeable for helium than for at least one other component in the process gas. Helium is separated from a first helium-containing permeate stream using a pressure swing adsorption to obtain a helium-containing product stream. A second helium-containing permeate stream is recycled to the first membrane separation stage. A purge gas from the pressure swing adsorption is also recycled to the first membrane separation stage.

The present disclosure provides a method for converting the target gas contained in the exhaust gas in plasma phase and an apparatus for implementing the method, the method comprising the steps of: generating a plasma in a conversion region in which the conversion of the target gas occurs; supplying, to the conversion region, a conversion promoting agent containing a conversion promoting element of which the first ionization energy is not greater than 10 eV for promoting the conversion of the target gas; supplying, to the conversion region, a conversion agent that produces conversion products by combining with the dissociation products of the target gas and prevents the dissociation products from recombining into the target gas; and supplying the exhaust gas containing the target gas to the conversion region.

A MEG reclamation process includes the step of increasing above 2,000 ppm the divalent metal salts concentration of a rich (wet) MEG feed stream flowing into a precipitator. The increasing step includes routing a salts-saturated MEG slipstream from the flash separator it to the precipitator. The slipstream may be mixed with a fresh water feed stream, a portion of the rich MEG feed stream, or some combination of the two. The rich MEG feed stream also may be split into two streams, with a portion of the stream being heated and routed to the flash separator and the other portion being combined as above with the removed slipstream. The process can be performed on the slipstream after dilution and prior to entering the precipitator or after being loaded into the precipitator. Removal of the insoluble salts may be done in either a batch or continuous mode.

A tetrafluoroethylene polymer is provided in an air filter medium having a pressure loss that can be reduced and made uniform at a plurality of positions. The tetrafluoroethylene polymer may also be provided in an air filter medium, a filter pack, or an air filter unit. The tetrafluoroethylene polymer has drawability and non-melt processability. The tetrafluoroethylene polymer has a ratio S.sub.2/S.sub.1 of 0.60 or more, where S.sub.2 represents an endotherm mJ/mg in a range of T.sub.0° C. or higher and 350° C. or lower, T.sub.0° C. is a temperature 2.5° C. lower than a temperature T.sub.p° C. (340≤T.sub.p≤345) at which a minimum point is given on a heat-of-fusion curve obtained by measuring an unbaked polymer for measurement having no history of heating to a temperature of 300° C. or higher using a differential scanning calorimeter at a temperature-increasing rate of 2° C./min, and S.sub.1 represents an endotherm mJ/mg in a range of 320° C. or higher and T.sub.0° C. or lower.